????MEMS???????

1
????MEMS???????
?? ? (???????????)
2
??????

• ??????(AO)???????(DM)
• AO?MEMS-DM
• ???MEMS-DM??????

3
?????????????
4
????????

• ??????????????
• ????????????

w/ AO
w/o AO

• ??????????????

??
???
w/o AO
w/ AO
w/ AO
w/o AO
5
????? (Deformable Mirror DM)

• ??? (??????????)
• ??
• ???
• ???????????????????????
• ??? ?????
• ???????????
• ???
• ???????????????
• ??
• ????

6
???DM????
?????????
?????
7
AO?MEMS-DM
8
??MEMS-DM?
??? MEMS
??? ??? ???? gt 5 mm (64x64?? gt300mm?) ??? ???? lt1 mm (64x64?? lt 60mm?)
?? ?? (???????????) 50kg ?? (CPU?????) lt100g
?? 1,000 / actuator 100 / actuator
?????? gt 5 lt 0.1
????? (???) ??? gt 10 mm ??? lt 10 mm
??MEMS-DM???????? ??MEMS-DM??????
9
???MEMS-DM
????????????????????(??)?????
????????
????????
?????
Iris AO
OKO
Boston Micromachines
10
??????
???????? ???????? ?????
?????? ???????????? ??????????
???lt100 ???lt4096 ???gt100
????????gt10mm ????????? ???????? (??10mm?????) ????????? (??10mm???)
?????? ????????? ?????? ??????????? ?????? ??????
??AO?????????????????? DLP?DMD???????????????????
?
11
???MEMS-DM???????
12
??

• ??30m????????????
• TMT Thirty Meter Telescope
• ???????????10m?(???????8m)
• ?????????????????
• ?????????????????
• ???
• ???????????AO?????
• ?AO???????????(DM)???

13
TMT-AO??????

• ??? N ? (D/r0)2
• Subaru AO188???????????
• 188(30/8)22600
• 1000???????
• ???? s ? (D/r0)5/6
• 3s???(3s?????)?TT???
• 0.6"_at_0.5µm ?? Subaru 2.2µm?TMT 6.5µm
  
• 1.2"_at_0.5µm EL30Subaru 5.5µm?TMT 16.4µm

14
AO??????
???


(???AO)
???
??????
MOAO (Multi-Object AO)
ExAO (Extreme AO)
???????????
?????????
??????????????????????? - ???? - ???? - ??????

• ????????3D?????
• ?????????
• ??????
• ??????
• ????
• ?????
• ????

?????MEMS-DM?? ??ExAO?????????MOAO??????????
15
MEMS-DM???(?)

• ???MEMS-DM????????DM??????TMT-MOAO??????

Element count 1024 32x32 (goal 4096 64x64)
Pitch 300 1,000 mm
Aperture size 10 30mm (goal 20 60mm)
Fill factor 98
Actuator yield gt 99
Stroke (overall) 20 mm
Stroke (at highest spatial freq.) 4 mm
Surface roughness (RMS) lt 20nm (goal lt10nm)
Flatness (controlled RMS) lt 20 nm
Bandwidth gt 100Hz
First resonance gt 1kHz
Hysteresys lt 0.1
Reflective surface Gold (Silver) w/ overcoat
Uniformity of surface reflectivity 1 RMS
Stability lt 4nm
Repeatability lt 4nm
Resolution lt 4nm
Maximum drive voltage lt 300V
Operating temperature -5? 15? (goal -30? 30?)
Relative Humidity 0 90
Altitude 0 4500 m
16
??????

• ???MEMS-DM????????
• MEMS?????????????????????
• ?????
• ???
• ????
• ??

17
????????????????
?????????? ????(RMS)??
Zernike polynomials
???????? ??????
4.4 (????)
1
0.51
0.33
0.23
???????? ???? N-0.43 (R-0.87)
???????????????????????
18
Woofer-tweeter

• ????????????????????
• Woofer ????????????
• Tweeter ????????????

??????????????????? ????????????????woofer???????
19
?????

• ?????????
• Woofer-tweeter????
• ???????????????
• ?????TT?????????

???? 20 mm ??? (????????) Woofer??????
???? 10 mm ????????????? ??????????? Woofer??????????
???? 5 mm BMC?MEMS-DM???? ?????????????????
20
???

• ?????????????????????????????
• ????
• ???????????????
• ? Boston Micromachines?kilo-DM
• ???(150V)????????????????
• ????????????lt 50?????
• ?????????
• ????????????????????????
• 10?????????????

21
????

• ?????
• ??????????
• ????????????????(D/A???????)
• ??-????????????????????????
• ????????
• ??????????????????????????
• ????????????????
• (???CMOS???????)
• ???????????????????

22
??

• ? Boston Micromachines?kilo-DM
• DM chip 75k
• Driver 75k
• 4000???DM????500k??
• ?????????????
• DM chip Driver lt 100k (1???)

23
????????????

• ?????
• ????? (?????????)
• ?????? (????????????)
• ??????? (?????????????)
• ???????????????? ????????
• ?????
• ???????????(???????????)
• ???(????????)
• ??????????????????????????

24
???

• ??????(AO)???????(DM)
• AO?MEMS-DM
• ???MEMS-DM?????????
• Action Item
• ????????????
• ???????????????????????
• ??????????????????????????
• ??????????