Title: MEMS?????????? ??21????????????
1MEMS????????????21????????????
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2??21???????(??20??????)
?????? ??20?????????????????????????????????????
??????????? ??????? ???????????????????????MEMS?
?????????????????????? WEB????????????????????????
???????????? ??????? ???????????????????????????
?????????????????????? ???????????????????????????
???MEMS???????????????? ?1? International Contest
of Applications in Nano / Micro Technologies
(iCan2009)??(MEMS?????? ?????????????????????????)
??????????????????????????? ?????????? ???????
MEMS???????????????????????????????????? ????????
? ?MEMSPC????????????????????????????????????????
???????????? ?MEMS???????????????????????
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3??21?????????
??????? MEMS???????(??? 107 ?)???????????( 2
?) ???????(?20????????/MEMS??????????2009)
?20????????/MEMS?????????????????????6?????????
?? MEMSPC???????(???? 15 ?( 547
???/?)????? 45 ?) MEMS???????????????????
????????(??????????MEMS Engineer Forum2010 ? 8
?) ??????? ????(???????????)??? ?????? 163 ?
??????? ???? 2 ?(???? 2 ?) ??????? ???? 2
?(???? 2 ?) iCAN2009???????? ?? ???????
??????? ????15? ????????? MEMSPC?????? 4
? ?MEMS???????????????????????
???????(?)?????????????????????????????????(???G
IC) ??????? 79 ???????? 107 ?
4??21???????????
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???????? 2.????????????????????????
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???????????????????????? 3.?????????????????
? 21??????????22????????????????????????
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6??21??????????
MEMS???? in ??? ????21?8?4?(?)6?(?) ?????????
???? 107 ? ??????????????MEMS????????MEMS??????
?????????????????????????????????MEMS?????????????
????
iCAN2009????? ????21?10?13?(?) ????????????? ??
?? 150 ? ????????MEMS??????????????????????????
??????????????????????????????????????????????????
?????
?????? ???? ???TBT ?????????????????????
?????13?MEMSPC??????
7??21??????????
iCAN2009???????????????????
2009?10? ??????(???)
2009?10? ????
2009?10? ??????(???)
?????NHK(?????)??????????????????
8??21???????
??????? MEMS?????????????????????????????????????
????????100?????????????????????MEMS??????????????
???????????? ???????????????6???????????????????
????? ??????? ??20?????????????????????? ??????
?????100????????????MEMS??????????????????? ???
??????? ??????????????MEMS?????????????2?????????
???MEMS?????? ?????????? ??????????????iCAN2009?
??????????16??????????MEMS???????
??????????????????????????????????????????????????
?? ????????????????????????????????????MEMS?????
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MEMS?????????????????????????????? ?????????
MEMSPC????????MEMS????????????????????????????????
MEMS?????????????????????? ?MEMS????????????????
??????? ?????????????????????????????????????????
??????????????????????????????MEMS????????????????
???????????????????????
9MEMS????????????21??????
10??21??MEMS?????????????(??20??????)
11??21??MEMS???????????????
12MEMS????????????22???????????
?1???
13??22???????
?????? ??21?????????????????????????????????????
??????????????????????????????????????????????????
??????????? ??????? MEMS????????????????????????
????MEMS???????????????????????WEB????????????????
???????????????????? ???????6????????????????????
????????????? ??????? ??????????????????????????
????????????????????????????????????????? ???????M
EMS?????????????????2? International Contest of
Applications in Nano / Micro Technologies
(iCan2011)??(MEMS???????????????????????????????)?
???????????????????????????????????? ???????
??????????????????????????????????????MEMS????????
???????????????????????????? ?????????
?MEMSPC???????????????????????????????????????????
????????? ?MEMS???????????????????????
??????????????????????????????????????????MEMS???
?????? ?????????????????????????????????
14MEMS?????????? 22???? (?)??????
MEMS?????????????????????????????
??????? MEMS??????????????????MEMS???????????
???????????????? ?MEMS????
???????????????????????????????MEMS??????3??????
????????(??????????????) ?MEMSPC/???GIC???????
? ???GIC???????????MEMS???????????????????????
?? ???????????????????
????????????????????????????????
???????????????????????????????? WEB????????????
??? MEMSPC?????????????? ????????????????????
??????????? ??????????????????????????????????
?????????? ???????/MEMS?????????????? ?????????
?????????PR?????????????
15MEMS?????????? 22???? (?)??????-MEMS????
MEMS?????????????????????????????
MEMS???????? MEMS???????????????????????MEMS????
???????????????????????????????3?????????????????
22???????????????????????????????
??????????????????? ????????????? ????22?8?5?(?)
7(?) ???????????? ????? ???? ?????
(????????????) ??400? ????????????
?????(CD-R)???????? ???????????????!
???????
16MEMS?????????? 22???? (?)??????
MEMS?????????????????????????????
MEMS??????????????????????????????????? ?????????
MEMS??????????????????????
MEMS?????? MEMS?????????????????????????????????
? ???????????????????????MEMS?????????????????????
????????????????
??? ???? ????
???? MEMS????????,??,??,???????????????????,MEMS??????????,????????????????????????????-??????????? 20?? (41??)
???? ????????????????,MEMS???????????????Coventor Ware?????????????????????????,?????????,????????,????????????????? 2?? 10??
???? ???????????????????????4???????????????,??????????????,?????,???,??????????????????????????????,??????????? ?3??
17MEMS?????????? 22???? (?)??????(????)
????? ????????????????(ISTU)?????e-learning???ME
MS????????? ????????????????????????????????
???????MEMS??????????????????????????????????
?????????? ??? ???(?????????)?????MEMS????????
??? ????? ?20??(????41??)??????????????????????
??? ???????????????????????????????? ????
??(?????????) (????????????????????)
18MEMS?????????? 22???? (?)??????(????)
????? MEMS????????????????Coventor
Ware??????????????????? ??????MEMS???????????????
????????????????????? ???????????????????????????
?????????????????? ????? ???
???(?????????)?????MEMS??????????? ?????
?????( 2??)Coventor Ware?????????? ?????(
5??)??????????????????????
?????????? ?????(10??)????????????
??????????
??????????????? ???? ?????????????
?????????????????
??????3D???
19MEMS?????????? 22???? (?)??????(????)
????? ?????????????????????4????
??????????,??????????????,?????,???,??????????????
?? ??? ????????????????? ???
??MEMS??????????? ???? ?????????????
???3???????????
1.??????????????????????????4???????? 2.??????????
?????????????????
20MEMS?????????? 22???? (?)??????(iCAN2011????)
?iCAN2011???? MEMS???????????????????????????????
??????????????????????? ??????????????????????????
?????????????????????????? 10?12???????????????
??????????????????2011?6????????????
?????? ??????(??) MEMSIC?Microsensing
? ???? ???????????? ???????(??) 2010?4?6?
????????? 2010?6? ???? 2010?10?12? ????????
???????MEMS?????????? 2011?6? iCAN2011??(??
??) ???(????)(??) 1st Prize3000USD 2nd
Prize2000USD 3rd Prize1000USD Special
Awards500USD
Kyoto University Mechatronics Creators ß LED?????
?Sky Fish?
21MEMS?????????? 22???? (?)??????
MEMS?????????????????
MEMS?????????????? ??????????????????????????????
????????? MEMS??????????????????????????????(?MEM
S??????????)??? ??????????????????????????????????
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MEMS??????????
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WEB
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MEMSPC ??
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MEMSPC??
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22MEMS?????????? 22???? (?)????????
MEMS???????????????????????????????
MEMSPC?????? ???????????????????????????????????
?(MEMSPC???)??????????????????????????????????????
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??? ????????????????????????????????????????????
?? MEMSPC?????????????????????????????????????
?
?11?MEMSPC??? in SENDAI
?13?MEMSPC??? in ???
23MEMS?????????? 22???? (?) MEMS????????????????????
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MEMS?????????????????
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24MEMS????????????22?????
25??22??MEMS?????????????