EVOLUTION OF MEMS TECHNOLOGY

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EVOLUTION OF MEMS TECHNOLOGY ITS FUTURE
PERSPECTIVES

• Presented by
• Ghulam Mujtaba Khan
• (B11MEESE-01)

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MEMS

• An acronym of Micro-electromechanical systems.
• MEMS are very small devices or group of devices
  that can integrate both electrical and mechanical
  components.
• It is a technology can be defined as
  miniaturized mechanical and electro-mechanical
  elements
• (i.e. devices and structures) that are made
  using the techniques of micro fabrication.

GHULAM MUJTABA KHAN

B11MEESE-01
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MEMS

• The interaction of electronics, mechanics, light
• or fluids working together makes up a
• microelectromechanical system or MEMS.

GHULAM MUJTABA KHAN

B11MEESE-01
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MEMS

• MEMS are constructed on one chip with
• electrical circuitry for inputs and outputs
• of the electromechanical components.
• MEMS can consist of a combination of components
  in various scales nano, micro
• and milli.

GHULAM MUJTABA KHAN

B11MEESE-01
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MEMS

• An example is the MEMS artificial retina.
• This MEMS consists of an electrode microarray
  (shown in picture) that is placed on the retina
  inside the eye.

GHULAM MUJTABA KHAN

B11MEESE-01
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MEMS
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MEMS

• FUNCTIONAL ELEMENTS
• Miniaturized structures
• Sensors
• Actuators
• Micro-electronics

GHULAM MUJTABA KHAN

B11MEESE-01
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MEMS

• MEMS DEVICE TECHNOLOGIES
• Accelerometers
• Inclinometers
• Gyroscopes
• Pressure sensing measurements
• Microphones
• RF MEMS
• Emerging MEMS

GHULAM MUJTABA KHAN

B11MEESE-01
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MEMS

• TECHNOLOGY REQUIREMENTS
• Device Performance
• Design and Simulation
• Packaging and Integration
• Device Testing

GHULAM MUJTABA KHAN

B11MEESE-01
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MEMS

• RF MEMS
• RF MEMS are intended to lower the power
  dissipation of the radio.
• RF MEMS are still in the process of increasing
  their reliability and lowering cost before they
  can be adopted in mobile devices.
• The biggest challenge in RF MEMS is enhancing
  reliability and lifetime ( of operations)

GHULAM MUJTABA KHAN

B11MEESE-01
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MEMS

• MEMS MICRO-GRIPPERS
• Grippers or tweezers used in a variety of fields
  to clasp, pick up, and move micron to nanosize
  components.
• The micro grippers (50 microns thick), developed
  by Zyvex Corporation, pick and place other
  microdevices in an automated micro assembly
  process.

GHULAM MUJTABA KHAN

B11MEESE-01
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MEMS
The gripper on the left opens to 100 microns
The gripper on the right opens to 125 microns.
GHULAM MUJTABA KHAN

B11MEESE-01
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MEMS

• MEMS devices sense, think, act and communicate.
• They redirect light, pump and mix fluids, and
  detect molecules, heat, pressure, or motion.

GHULAM MUJTABA KHAN

B11MEESE-01
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MEMS

• TYPES OF MEMS DEVICES
• Pressure sensors
• Accelerometers (inertial sensors)
• Micro mirrors and Gear Trains
• Miniature robots and Fluid pumps
• Micro droplet generators
• Optical scanners
• Analyzers and Imagers

GHULAM MUJTABA KHAN

B11MEESE-01
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MEMS

• MEMS IN AUTOMOTIVE INDUSTRY
• MEMS pressure sensors
• sense, monitor and
• transmit.
• Tire pressure, Fuel Pressure, Oil Pressure,
• Airflow, Absolute Air Pressure

GHULAM MUJTABA KHAN

B11MEESE-01
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MEMS

• MEMS SENSORS
• Three Primary MEMS Sensors
• Pressure sensors
• Chemical sensors
• Inertial sensors (accelerometers, gyroscopes)

GHULAM MUJTABA KHAN

B11MEESE-01
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MEMS

• MEMS INTERTIAL SENSORS
• MEMS inertial sensors are designed to sense a
  change in an object's inertia, and then convert,
  or transduce inertial force into a measurable
  signal.
• They measure changes in acceleration, vibration,
  orientation and inclination. This is done through
  the use of micro-sized devices called
  accelerometers and gyroscopes.

GHULAM MUJTABA KHAN

B11MEESE-01
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MEMS

• The simplest MEMS accelerometer sensor is an
  inertial mass suspended by springs.
• A gyroscope is generally a spinning wheel or disk
  with a free axis allowing it to take any
  orientation (below left). Some MEMS gyroscopes
  use a vibrating structure rather than the
  traditional rotating disk to determine
  orientation.

GHULAM MUJTABA KHAN

B11MEESE-01
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MEMS

• MEMS INERTIAL SENSORS IN AUTOMOBILES
• Airbag deployment
• "Smart" sensors for collision
• avoidance and skin detection
• Active suspension
• Automobile navigation
• Antitheft system
• Headlight leveling and
• Positioning and Rollover detectors

GHULAM MUJTABA KHAN

B11MEESE-01
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MEMS

• APPLICATIONS OF MEMS INERTIAL
• SENSORS
• Motion and shock detection
• Vibration detection and measurement
• Measurement of tilt and inclination
• Anti-theft Home security devices
• Computer screen and zooming devices
• Gaming devices for portables
• Image stabilizer cameras and phones

GHULAM MUJTABA KHAN

B11MEESE-01
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MEMS

• APPLICATIONS OF MEMS
• Aerospace
• Automotive
• Biomedical
• Chemical
• Optical displays
• Wireless sensor networks
• Fluidics

GHULAM MUJTABA KHAN

B11MEESE-01
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MEMS

• OPTICAL APPLICATIONS OF MEMS
• Optical communication networks
• Tunable lasers and filters
• Variable optical attenuators
• Barcode readers
• Optical Spectrometers

GHULAM MUJTABA KHAN

B11MEESE-01
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MEMS

• REFERENCES
• Microelectromechanical Systems and Devices
  Electrical and Electronic Engineering by Igor
  Minin
• Micro Electronic and Mechanical Systems
• By Kenichi Takahata
• Optical MEMS by Wibool Piyawattanametha and Zhen
  Qiu
• Integrated MEMS Opportunities Challenges by
  P.J. French and P.M. Sarro

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MEMS

• REFERENCES
• MEMS Biomedical Sensor for Gait Analysis By
  Yufridin Wahab and Norantanum Abu Bakar
• A New Methodology for RF MEMS Simulation by
  Peyrou David, Coccetti Fabio, Achkar Hikmat,
  Pennec Fabienne, Pons Patrick and Plana Robert

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• THANX
• FOR
• PATIENCE

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• QUESTIONS???