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Title: MEMS based S


1
NDIA 50th Annual Joint Services Small Arms
Symposium12 May 2004
  • MEMS based SA Development for 25 mm HEAB
    Munitions

Briefer Camilo A. Sanchez AMSRD-AAR-AIJ US
Army ARDEC Picatinny, NJ csanchez_at_pica.army.mil
Co-author Charlie Robinson
AMSRD-AAR-AEP-F(A) US Army ARDEC
Adelphi, MD chr_at_pica.army.mil
2
Agenda
  • OICW System Enhancements Science and Technology
    Objective (STO)
  • MEMS SA Manufacturing Technology Objective (MTO)
  • MEMS SA Related Efforts

3
OICW SE STO
  • OICW System Enhancements (SE) STO
  • Demonstrating the feasibility of applying Micro
    Electro-Mechanical Systems (MEMS) to fuzing
  • Designing, building MEMS based Safe and Arm (SA)
    Devices for high-explosive air-burst munitions
    (HEAB)
  • Scope
  • Map inertial mechanical logic SA functions to
    MEMS wafer-based domain
  • Novel ultra-miniature out-of-line firetrain,
    micro-scale firetrain (MSF)
  • Design, build, test prototype MEMS-based SA
    devices
  • Fuze integration and ballistic testing

XM25 Airburst Weapon System
4
MEMS Based SA Project Sponsorship
End-to-end MEMS SA manufacturing process
MEMS SA Design, Development and Feasibility
Demonstration
Manufacturing Technology Objective (MTO)
Science Technology Objective (STO)
Acquisition
SBIR
Future MEMS SA designs and micro-scale firetrain
initiators
  • Endorsements
  • PM Individual Weapons
  • PM Crew Served Weapons
  • ONR / PM HIMARS (USMC)
  • PM Aviation, Rocket, Missile

5
MEMS SA TEAM
6
(No Transcript)
7
MEMS SA Part/Frames
Direction of Acceleration
Spin Center
Safe
Armed
Meets MIL-STD-1316 intent
8
Micro-Scale Firetrain (MSF)
Initiator Board
Transfer Charge
Receptor Charge
Cross-section, MEMS SA Assembly
Output Charge
Initiator Chip
Transfer Charge
Input Charge
Receptor Charge
Output Charge
Transfer Charge in Armed Position
Transfer Charge Exploded
9
MEMS SA Fuze Integration Packaging by Assembly
Output Charge
MEMS SA for 20-mm OICW
SA Assembly
No MEMS Packaging per se, use functional
assembly parts for enclosure.
Output Base
Cover Plate
Initiator Board
10
Laboratory and Ballistic Testing Jun 03 to Present
  • 20-mm OICW Fuze Integration
  • Mechanical Fit of MEMS SA (laboratory) ?
  • Alliant OICW Fuze Electronics Module Integration
    ?
  • Functional Integration
  • Structural integrity soft catch at ATPG, Elk
    River, MN ?
  • Success with all-metal SA parts, frame, and
    substrate
  • Mechanical function (dynamic arming) soft catch
    at ATPG ?
  • MIPA in-flight function, followed by post-catch
    MSF detonation
  • Demonstrated no arming before safe-separation
    (30-m target)
  • Experienced but resolved explosive crosstalk
    problem
  • Explosive Integration and Optimization Testing ?
  • In-Line reliability
  • Out-of-Line safety
  • SA output to fuze relay

11
Explosive Train Propagation Test Results
Clamshell Carrier
ATK Electronics Module
Battery
MEMS SA Assembly
High order Initiation, Relay and MDF
12
OICW SE STO Status
Integrated Fuze Assembly
  • Volume 62 less than baseline
  • Weight 47 less than baseline
  • Cost goal 50 less than baseline
  • Remaining
  • Finish explosive-train safety and reliability
    testing
  • Environmental testing of full-up round
  • Airburst Demonstration

13
MEMS Fabrication Technologies for SA
DRIE Si Standard LIGA
Replication LIGA Ultra-Violet LIGA
Hot embossing High Volt Electron Beam
Lithography
Limitations/Constraints
  • Dimensional tolerances
  • Reproducibility
  • Minimum feature sizes
  • High aspect ratio
  • Smooth sidewalls
  • Appropriate materials base

Laser Micromachining Electro-Discharge
Machining (EDM) Electro-Chemical Fabrication
(EFAB)
LIGA German acronym for Lithography,
Electroforming, Molding
14
MEMS Safe and Arm (SA) ManTech
  • Goal
  • Method for end-to-end process to fabricate high
    precision, low cost parts and finished assemblies
  • Approach
  • Task 1 Implement MEMS-based replication
    technologies to overcome dependency on
    synchrotron exposure
  • Replication UV-LIGA, Hot Embossing, Injection
    Molding
  • Task 2 Demonstrate scalable explosive batch
    loading techniques
  • Micro-scale firetrain development slurry load,
    direct load
  • Payoff
  • Provide capability to have a low-cost,
    medium-caliber fuzing solution for the XM29 and
    XM307 combat weapons applications.
  • Transition to PM-IW and PM-CSW in 2nd QTR of
    FY08 for 25 mm munitions LRIP

XM307 OCSW
XM29 OICW
SCHEDULE
(Tasks)
FY04 FY05 FY06 FY07
(1) Evaluation of fab tech and coupon/SA
builds (2) Explosive loading methods
evaluated (1,2) Loaded MEMS for XM29, XM307
tested (1) Fab technology down selected (2)
Loading methodology implemented (1,2)
Packaging/Inspection and expl diagnostics (1)
Validate MEMS SA by qual testing
MRL
15
LIGA High Aspect Ratio (HAR) Replication
LIGA (German acronym) combination of lost wax
and plating to make metal parts
X-Ray Radiation
Gold Mask
PMMA
3. Electroplate into mold STO parts are from
this step
2. Develop PMMA mold
1. Expose PMMA
4. LIGA Part or Molding Tool
6. Electroplate into replicated mold MTO parts
are from this step
5. Print New Molds!
16
Replication -Injection Molding or Hot Embossing
  • Objective Eliminate exposure and development
    steps
  • Method Create re-usable LIGA tool use it to
    create precise micro cavities in polymer wafers

Precise LIGA tool
Lapping
Dissolve Plastic Mold
(Create precise micro cavities in a plastic
hockey puck in the shapes of desired parts)
Finished Metal Parts
17
Replication -Injection Molding or Hot Embossing
  • Benefits Significant cost reduction elimination
    of potential synchrotron bottleneck
  • Status
  • Working under CRADA with Sandia National
    Laboratories (CA)
  • Optimizing tools, building molds, and developing
    advanced processes
  • Working with MEMS Exchange to procure HE platform

Result will be low cost metal micro parts with
precise feature fidelity
18
UV LIGA
  • Objective Replacement of x-ray with UV light
    source
  • Benefits Substantial cost reduction elimination
    of potential synchrotron bottleneck
  • Challenges
  • Achieving required feature fidelity
  • Removal of thick UV resist at end of process
    without damage to finished metal parts
  • Status
  • Working with multiple resist materials and
    removal processes

Replace X-Rays With UV Light
Etc.
19
UV LIGA - Results to Date
Objective As Good as X-Ray LIGA
  • Achieved good feature fidelity
  • Resist 98 removed

Current UV LIGA Process
20
DRIE-based Molding Efforts NJNC/Lucent
Technologies
DRIE Si ? PDMS Mold ? Ni Plating
Air
Air
Mold
Tool
21
MSF Development
  • Various alternatives to RSI007 being
    developed/tested
  • different binders, flow properties
  • Direct write instrument being demonstrated w/
    secondary explosive
  • Computer controlled, robotic arm, for dispensing
    liquid now dispensing explosive
  • Single cavity then array loading
  • 2 related Phase I SBIRs awarded for consolidating
    bridgewire w/ explosive load

22
MEMS SA Transition Plan
FY03 FY04 FY05 FY06 FY07 FY08 FY09 FY10






FCS Incr. 1
SDD
LRIP PD
ATD
XM307
MEMS SA
MTO
STO
XM25
LRIP Production
PDRR
SDD
Increment 1
23
MEMS SA Related
  • Small Business Innovatiion Research (SBIR) Topic
    for the FY04 DoD SBIR Solicitation
  • Design and fabrication of prototype MEMS SA
    devices for low G/low spin environment
  • Solicitation opens 1 July 2004 - 12 August 2004
  • Supports Advanced Precision Kill Weapon System
    (APKWS) Block II
  • General Dynamics - OTS
  • MEMS SA to be demonstrated in ACSW 25 mm
    Tactical round
  • Inert MEMS SA units delivered to GD
  • Ballistic test planned for summer 04
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