????MEMS???????

1
????MEMS???????
?? ? (???????????)
2
??????

• ??????(AO)???????(DM)
• AO?MEMS-DM
• ???MEMS-DM??????

3
?????????????
4
????????

• ??????????????
• ????????????

w/ AO
w/o AO

• ??????????????

??
???
w/o AO
w/ AO
w/ AO
w/o AO
5
????? (Deformable Mirror DM)

• ??? (??????????)
• ??
• ???
• ???????????????????????
• ??? ?????
• ???????????
• ???
• ???????????????
• ??
• ????

6
???DM????
?????????
?????
7
AO?MEMS-DM
8
??MEMS-DM?
??? MEMS
??? ??? ???? gt 5 mm (64x64?? gt300mm?) ??? ???? lt1 mm (64x64?? lt 60mm?)
?? ?? (???????????) 50kg ?? (CPU?????) lt100g
?? 1,000 / actuator 100 / actuator
?????? gt 5 lt 0.1
????? (???) ??? gt 10 mm ??? lt 10 mm
??MEMS-DM???????? ??MEMS-DM??????
9
???MEMS-DM
????????????????????(??)?????
????????
????????
?????
Iris AO
OKO
Boston Micromachines
10
??????
???????? ???????? ?????
?????? ???????????? ??????????
???lt100 ???lt4096 ???gt100
????????gt10um ????????? ???????? (??10um?????) ????????? (??10um???)
?????? ????????? ?????? ??????????? ?????? ??????
??AO?????????????????? DLP?DMD???????????????????
?
11
???MEMS-DM???????
12
??

• ??30m????????????
• TMT Thirty Meter Telescope
• ???????????10m?(???????8m)
• ?????????????????
• ?????????????????
• ???
• ???????????AO?????
• ?AO???????????(DM)???

13
TMT-AO??????

• ??? N ? (D/r0)2
• Subaru AO188???????????
• 188(30/8)22600
• 1000???????
• ???? s ? (D/r0)5/6
• 3s???(3s?????)?TT???
• 0.6"_at_0.5µm ?? Subaru 2.2µm?TMT 6.5µm
  
• 1.2"_at_0.5µm EL30Subaru 5.5µm?TMT 16.4µm
• ?????????????????????
• http//www.astr.tohoku.ac.jp/akiyama/index_Note_T
  MTinst_DM1.html

14
AO??????
???


(???AO)
???
??????
MOAO (Multi-Object AO)
ExAO (Extreme AO)
???????????
?????????
??????????????????????? - ???? - ???? - ??????

• ????????3D?????
• ?????????
• ??????
• ??????
• ????
• ?????
• ????

?????MEMS-DM?? ??ExAO?????????MOAO??????????
15
MEMS-DM???(?)

• ???MEMS-DM????????DM??????TMT-MOAO??????

Element count 1024 32x32 (goal 4096 64x64)
Pitch 300 1,000 mm
Aperture size 10 30mm (goal 20 60mm)
Fill factor 98
Actuator yield gt 99
Stroke (overall) 20 mm
Stroke (at highest spatial freq.) 4 mm
Surface roughness (RMS) lt 20nm (goal lt10nm)
Flatness (controlled RMS) lt 20 nm
Bandwidth gt 100Hz
First resonance gt 1kHz
Hysteresys lt 0.1
Reflective surface Gold (Silver) w/ overcoat
Uniformity of surface reflectivity 1 RMS
Stability lt 4nm
Repeatability lt 4nm
Resolution lt 4nm
Maximum drive voltage lt 300V
Operating temperature -5? 15? (goal -30? 30?)
Relative Humidity 0 90
Altitude 0 4500 m
16
??????

• ???MEMS-DM????????
• MEMS?????????????????????
• ?????
• ???
• ????
• ??

17
????????????????
?????????? ????(RMS)??
Zernike polynomials
???????? ??????
4.4 (????)
1
0.51
0.33
0.23
???????? ???? N-0.43 (R-0.87)
???????????????????????
18
Woofer-tweeter

• ????????????????????
• Woofer ????????????
• Tweeter ????????????

??????????????????? ????????????????woofer???????
19
????????

• ?????????
• Woofer-tweeter????
• ??????????????????TT????????
• ?????????????????????????????

???? 20 mm ??? (????????????) Woofer??????
???? 10 mm ????????????? ??????????? Woofer??????????
???? 5 mm BMC?MEMS-DM???? ?????????????????
20
???

• ?????????????????????????????
• ????
• ???????????????
• ? Boston Micromachines?kilo-DM
• ???(150V)????????????????
• ????????????lt 50?????
• ?????????
• ????????????????????????
• 10?????????????

21
????

• ?????
• ?????????
• ??????????
• ??????????2?????(D/A???????)
• ??-????????????????????????
• ????????
• ??????????????????????????
• ????????????????
• (???CMOS???????)
• ???????????????????

22
??

• ? Boston Micromachines?kilo-DM
• DM chip 75k
• Driver 75k
• 4000???DM????500k??
• ?????????????
• DM chip Driver lt 100k (1???)

23
???????????????

• ?????
• ????? (?????????)
• ?????? (????????????)
• ??????? (?????????????)
• ???????????????? ????????
• ?????
• ???????????(???????????)
• ???(????????)
• ??????????????????????????

24
???

• ??????(AO)???????(DM)
• AO?MEMS-DM
• ???MEMS-DM?????????
• Action Item
• ????????????
• ???????????????????????
• ??????????????????????????
• ??????????

25
????
26
??????? ????????
Boston Micromachines Kilo-DM
Element count 1032 (32x32)
Pitch 300 mm
Aperture size 9.3 mm
Fill factor 99
Actuator yield gt 99. (8/4096)
Stroke (overall) 1.5 mm surf.
Stroke (at highest spatial freq.) gt 0.2 mm surf.
Surface roughness (RMS) 20 nm surf.
Flatness (controlled RMS) 0.28 nm surf.
Reflective surface Gold-coated cont. face sheet w/ protect window
Stability lt 0.35 nm surf . (0.08 nm med.)
Repeatability lt 1 nm surf. (0.046 nm med.)
Resolution sub-nm (14bit)
Response (10-90 slew) 20 ms
Maximum drive voltage 160V
Operating temperature -30? 30?
27
??????? ?????
Iris AO S163-8
Element count 163 (max. 367 demo)
Pitch 700 mm
Aperture size 7.7 mm
Fill factor 98
Actuator yield ----------
Stroke (overall) 8 mm (12 mm for 37act.)
Stroke (at highest spatial freq.) 8 mm
Tilt of each segment 8 mrad
Surface roughness (RMS) lt 30 nm
Flatness (controlled RMS) lt 20 nm
Reflective surface Gold / protected Aluminum dielectric coating OK
Stability ----------
Repeatability ----------
Resolution 12 bit
Response (20-80 slew) 150 ms
Bandwidth (1dB) gt 2k Hz
Maximum drive voltage 200V
Operating temperature 5? 70? (-40? 85? by request)
28
ExAO???? ????????
Boston Micromachines Gemini Planet Imager
(ExAO)?tweeter
Element count 4096 (64x64)
Pitch 300 400 mm
Stroke (overall) 2.4 mm (4.0 mm)
Stroke (at highest spatial freq.) 1.0 mm
Differential stroke gt 1.0 mm
Fill factor 99
Aperture size 19.2 25.6mm
Surface roughness (RMS) lt10nm (goal lt3nm)
Surface roughness (PV) lt30nm (goal lt9nm)
Flatness (controlled RMS) lt 1nm
Bandwidth (1dB) gt 250Hz
First resonance gt 2,500Hz
Actuator yield gt 99.8 (8/4096)
Clear aperture 48act. across 2act. away from edge
Reflective surface Gold-coated continuous face sheet
Uniformity of surface reflectivity 1 RMS
Maximum drive voltage 300V
Operating temperature -30? 30?