Wafer Handler

1
Wafer Handler
Load Stapel
Wafer Stage Kamer
Loadlock
Robot Arm (2)
Robot Arm (1)
Wafer Stage
Robot Kamer
Unloadlock
Unload Stapel
2
Assignment

• Form 4 groups
• Main good weather behaviour
• requirements, model, verification
• Extensions 2 out of 4 (equally divided)
• Test / simulation modes
• HW failures robustness recovery
• SW failures robustness recovery
• Lock configuration bi-directional verification,
  one lock mode