Processing Problems

1
Processing Problems

• Substantial amount of cracks in SU-8 molds
• Indicates possible problem with SU-8 recipe
• Possible effect in PDMS layers (Mark is there a
  picture of this?)
• Difficulties encountered in layer alignment
• Methanol as a release agent
• Razor blade / Tweezers method
• Thickness of the layers
• Wrinkles
• Air pockets within the layers

2
Processing Problems Continued

• Feature alignment
• Extremely difficult
• Inaccurate
• Interconnect layer
• No connection provided
• Problem with layer thickness