?????(4?) Microchip Fabrication ?4? :??????

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?????(4?)Microchip Fabrication?4?
?????? Peter Van Zant ???? ? ??? ???????
? ? ? 90 ? 11 ? 28 ?
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?? ???????,????????,??????????? ????(wafer
fabrication) ?????? (???) ???????????
?4.1 ??????
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??????????   (1)??(chip)???(die)???(device)
??(circuit)????(microchip)??? (bar)
(2)???(scribe lines)???? (saw lines)
?? (streets)???? (avenues) (3)?????
(engineering die) ????? (test die)
(4)???? (edge die) (5)?????? (wafer crystal
planes) (6)??????? (wafer flats / notches)
???(major flat)????(minor flat),
300????????
?4.2 ??????
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????????? ??(layering)???(patterning)???(doping),
???(heat treatments)
??(layering)?????????????? ???????????????? ????
?? (1)??????????? (2)?????????(CVD)
??????(PVD)-?????
?4.4 ???????MOS??????????????
?4.5 ?????
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??(patterning)????????????????? ????????????,?????
???? ?????,?? ???? -??(photomasking?masking?pho
tolithography?microlithography) -??(etching) ????
????????? (????),???? ??????????????
?4.7 ??
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??(doping) ????????(dopant)????????????????? ????
?????(thermal diffusion???????)
????,??????1000?C ,????????? ??????(ion
implantation) ????,?????????(????),?????????
?4.8 ????
?4.9 ???????N??P?????
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???(heat treatments)?????/??????????? -???????????
?????,???????? -???????????????????
????? (1)??(anneal)?????,?????1000?C??,
??????????????? (2)???(alloyed)??????
??, ???????????,?450?C?? (3
)????(photoresist)?????
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?4.18 ?? (?) ??
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??(packaging)????????????,????????
?4.19 ???? (IC) ?????
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??
??? (DIP) ??
?? (??) ??
???????
???????(CPU??)
???????