MultiLink Robot- 300mm Single Arm

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Multilink Robot- 300mm Single Arm

• Atmospheric Wafer Handling Robot

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About Us

• Kensington Laboratories 300mm single arm
  atmospheric wafer handling robot, part of the
  Multilink robot family, is designed to meet the
  industrys most rigorous 300mm performance
  standards. The Multilink Single Arm robot
  incorporates a host of unique, proprietary design
  features which combine to provide unsurpassed
  reliability, superior performance, and high
  throughput.

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• Automated Self Teach The patented Automated Self
  Teach feature reduces time required to bring
  systems online and provides faster time to
  production ramp.
• High Throughput Continuous rotation translates
  to short, discrete theta moves less than 180
  degrees, which significantly increases
  throughput.
• Accurate Wafer Placement High performance design
  provides precise motion control and eliminates
  structural deflection and creep. All robot axes
  are guided by preloaded bearings mounted on
  monolithic frames machined from single ingots of
  highly stable aircraft-quality aluminum.
• Cleanliness Patented edge grip technology
  provides better than ISO Class 1 particle
  performance. In addition, the side-mounted
  MultiLink robot, combined with Kensington
  Laboratories side-mounted MultiLink robot track,
  maximizes the exhaust opening of the equipment
  front end module allowing uniform air flow from
  the fan filter unit through the perforated fab
  floor.

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• High Reliability The MultiLink robot achieves
  industry-leading MCBF by employing direct-drive
  DC servo motors with real time force feedback and
  non-contacting glass scale encoders that monitor
  actual drive train output.
• Precise Wafer Mapping High performance
  through-beam wafer mapping allows fast, accurate
  wafer detection.
• Zero Preventative Maintenance Superior precision
  design requires no periodic lubrication or
  adjustments under standard operating conditions.

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Key Features

• Patented edge grip technology
• Patented Automated Self Teach
• Through-beam wafer mapping
• Advanced wafer cassette error detection
• Direct drive technology
• Continuous rotation
• State-of-the-art motion control
• Off center pick and place
• Machine tool quality construction
• High resolution optical encoders on all axes
• Reduced wear Z axis counter balance

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Key Patents

• Robot Arm with Specimen Edge Gripping End
  Effector, 6256555
• Robot Arm with Specimen Sensing and Edge Gripping
  End Effector, 6275748
• Self-Teaching Robot Arm Position Method, 6360144
• Self-Teaching Robot Arm Position Method to
  Compensate for Support Structure Component
  Alignment Offset, 6366830

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Options

• 4th axis supinator wafer flipper
• Vacuum end effectors (200mm and 300mm)
• Reflective mappers
• E-diagnostics with GUI

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CONTACT US

• Sales  Kensington Robots Stages, Newport PM500
  Stages, Spare Parts
• sales_at_kensingtonlabs.com
• Service - Kensington robot and stage repairs,
  Newport PM500 stage repairs
• service_at_kensingtonlabs.com

Kensington Laboratories, LLC 6200 Village
Parkway Dublin , CA 94568 Phone
510.324.0126 Fax [phone] www.kensingtonlabs.
com
Our Toll Free Number 1-888-977-7800