Title: 300mm Single Arm Atmospheric Wafer Handling Robot
1300mm Single ArmAtmospheric Wafer Handling Robot
- https//www.kensingtonlabs.com/
2About us
- Kensington Laboratories 300mm single arm
atmospheric wafer handling robot, part of the
Multilink robot family, is designed to meet the
industrys most rigorous 300mm performance
standards. The Multilink Single Arm robot
incorporates a host of unique, proprietary design
features which combine to provide unsurpassed
reliability, superior performance, and high
throughput. Kensington Laboratories, a leader in
advanced robotics technology, is committed to
developing and manufacturing the highest quality
and most cost effective atmospheric robots in the
industry.
3Automated Self Teach
- The patented Automated Self Teach feature reduces
time required to bring systems online and
provides faster time to production ramp.
Continuous rotation translates to short, discrete
theta moves less than 180 degrees, which
significantly increases throughput.
4Accurate Wafer Placement
- High performance design provides precise motion
control and eliminates structural deflection and
creep. All robot axes are guided by preloaded
bearings mounted on monolithic frames machined
from single ingots of highly stable
aircraft-quality aluminum.
High performance through-beam wafer mapping
allows fast, accurate wafer detection.
5High Reliability
- The Multilink robot achieves industry-leading
MCBF by employing direct-drive DC servo motors
with real time force feedback and non-contacting
glass scale encoders that monitor actual drive
train output.
- Zero Preventative Maintenance
Superior precision design requires no periodic
lubrication or adjustments under standard
operating conditions.
6Cleanliness
- Patented edge grip technology provides better
than ISO Class 1 particle performance. In
addition, the side-mounted Multilink robot,
combined with Kensington Laboratories
side-mounted Multilink robot track, maximizes the
exhaust opening of the equipment front end module
allowing uniform air flow from the fan filter
unit through the perforated fab floor.
7CONTACT US
- SalesĀ Kensington Robots Stages, Newport PM500
Stages, Spare Parts - sales_at_kensingtonlabs.com
- ServiceĀ - Kensington robot and stage repairs,
Newport PM500 stage repairs - service_at_kensingtonlabs.com
Kensington Laboratories, LLC 6200 Village
Parkway Dublin , CA 94568 Phone
510.324.0126 Fax 510.324.0130 www.kensingtonlabs.
com
Our Toll Free Number 1-888-977-7800