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High Performance 300mm EFEM- Performix System

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Kensington Laboratories is an advanced technology leader committed to developing and manufacturing the highest quality, most reliable, and cost effective automation solutions in the industry. – PowerPoint PPT presentation

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Title: High Performance 300mm EFEM- Performix System


1
High Performance 300mm EFEM- Performix System
2
About Us
  • Kensington Laboratories is an advanced technology
    leader committed to developing and manufacturing
    the highest quality, most reliable, and cost
    effective automation solutions in the industry.
    Our technical innovation along with investment in
    capital infrastructure ensures that our customers
    receive products with superior performance, high
    reliability, and low cost of ownership. All
    Kensington Labs products are backed by our global
    service and support network.

3
Reputation for Leadership in Robotic Technology
  • Performix is backed by Kensington Laboratories
    reputation for high quality design and high
    performance technology. With a large installed
    base of robots and systems, Kensington Labs
    Performix sub-systems ensure faster start-up
    times and improved placement accuracies, in an
    ISO Class 1 mini-environment. Based upon a
    history of cutting-edge system design, Performix
    integrates the highest quality components to
    achieve performance unrivaled in the marketplace.
    Kensington has a large installed base of robotic
    systems with robots numbering in the thousands
    and wafer sorters exceeding 1,500.

4
Configurable Solutions
  • Flexible load port and robotic components
    designed for configurable solutions allow
    Performix to be easily tailored to a variety of
    automation requirements. Features that make the
    Performix EFEM configurable to your specific
    needs include
  • ADO load port with or without wafer mapping
    option.
  • MultiLink Dual Arm (4 axes of motion) and
    MultiLink Single Arm (3 and 4 axes of motion)
    robots.
  • End effector options 300mm edge grip, 300mm
    vacuum grip, 300mm supinator wafer flipper, and
    300mm batch edge grip all with through-beam
    wafer mapper. The integrated through-beam wafer
    mapper uses an eye safe LED that optically maps
    the entire FOUP and detects common storage
    errors.
  • Yaw axis robots (trackless) or Track
    configurations.

5
  • Zero Preventative Maintenance is an integral part
    of all Kensington robot systems. No periodic
    lubrication or adjustments are required under
    standard operating conditions.
  • Performix integrates the highest quality
    components based upon a history of cutting-edge
    system design.
  • The Performix 300mm EFEM is an innovative, high
    quality equipment front end solution that
    provides exceptional throughput and world class
    tool availability.
  • Kensington Laboratories The Leader in Robotic
    Technology

6
Specifications
7
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CONTACT US
  • Sales  Kensington Robots Stages, Newport PM500
    Stages, Spare Parts
  • sales_at_kensingtonlabs.com
  • Service - Kensington robot and stage repairs,
    Newport PM500 stage repairs
  • service_at_kensingtonlabs.com

Kensington Laboratories, LLC 6200 Village
Parkway Dublin , CA 94568 Phone
510.324.0126 Fax 510.324.0130 www.kensingtonlabs.
com
Our Toll Free Number 1-888-977-7800
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