Single Arm Atmospheric Wafer Handling Robot

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Single Arm Atmospheric Wafer Handling Robot

• Advanced System Technology

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• Kensington Atmospheric MultiLink SCARA Wafer
  Handling Robots have addressed the needs for
  semiconductor wafer and quartz substrate handling
  for more than a quarter century. Key innovative
  features developed for semiconductor robot wafer
  handling Through Beam Wafer Sensing, 300mm
  Edge-Grip End-Effector Robot Self-Teach
  Functionality. MultiLink SCARA wafer robots are
  used across the semiconductor equipment spectrum
  Metrology Systems, Deposition Systems, Etch
  Systems, Reticle Process Systems Thermal
  Processing Systems.

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Key Features

• Patented edge grip technology
• Patented Automated Self Teach
• Through-beam wafer mapping
• Advanced wafer cassette error detection
• Direct drive technology
• Continuous rotation
• State-of-the-art motion control
• Off center pick and place
• Machine tool quality construction
• High resolution optical encoders on all axes
• Reduced wear Z axis counter balance

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Key Patents

• Robot Arm with Specimen Edge Gripping End
  Effector, 6256555
• Robot Arm with Specimen Sensing and Edge Gripping
  End Effector, 6275748
• Self-Teaching Robot Arm Position Method, 6360144
• Self-Teaching Robot Arm Position Method to
  Compensate for Support Structure Component
  Alignment Offset, 6366830.

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Options

• 4th axis supinator wafer flipper
• Vacuum end effectors (200mm and 300mm)
• Reflective mappers
• E-diagnostics with GUI

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CONTACT US

• Sales  Kensington Robots Stages, Newport PM500
  Stages, Spare Parts
• sales_at_kensingtonlabs.com
• Service - Kensington robot and stage repairs,
  Newport PM500 stage repairs
• service_at_kensingtonlabs.com

Kensington Laboratories, LLC 6200 Village
Parkway Dublin , CA 94568 Phone
510.324.0126 Fax [phone] www.kensingtonlabs.
com
Our Toll Free Number 1-888-977-7800