NANOTECHNOLOGIES IN FP7

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Micro- and Nanomanufacturing Community Towards a
European Technology Platform for Micro and
Nanomanufacturing
Hans-Hartmann Pedersen, European Commission
Dr. Johann Dorner, Fraunhofer IPADr. Wolfgang
Schäfer, Fraunhofer IPA Dr. Svetan Ratchev,
University of NottinghamHirani Hitendra,
University of Nottingham Markus Dickerhof,
Forschungszentrum Karlsruhe Dr. Ana Almansa, ARC
Seibersdorf Christian Wögerer, ARC
SeibersdorfKarl Prech, ARC Seibersdorf Dr.
Helmut Rempp, Forschungszentrum
Karlsruhe, Matthias Gebauer, Forschungszentrum
Karlsruhe
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Agenda

• Introduction
• Micro- and Nanomanufacturing
• Background European Technology Platforms
• Status on Activities Towards a Community for
  Micro- and Nanomanufacturing
• Conclusions
• Annex The Micro- and Nanomanufacturing Roadmap

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Micro and Nanomanufacturing

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From Technology / Materials to Application
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Micro- and NanoManufacturing is growing and
growing!
NEXUS Market Analysis 2005-2009

• New products in nearly all kind of sectors like
  medicine, automotive, textile, consumer, etc. are
  not imaginable without micro- or nanotechnology.
• Todays innovations in mechatronic systems
  arenot realizable without micro- and
  nanotechnology
• Undoubtedly micro- and nanotechnology is the
  future key technology world wide.

• growth rate of about 20 for Micro- and
  Nanoproducts
• Micro market may reach 20 billion in 2010

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Target of the Micro- and Nanomanufacturing
industry
Mission of Manufuture (www.manufuture.org)
.winning a major share of world manufacturing
output in the future

• To achieve these goals...
• the targets of a Micro- and NanoManufacturing
  industry are
• to establish a new industry for the manufacturing
  of products based on emerging Micro- and
  Nano-Technologies.
• to develop Europe as the leading location for the
  production of NanoParticles, Micro- and
  Nanostructures and components with Micro/Nano
  inside.
• to establish the complete Micro- and
  Nano-Technology value chain leading to the
  manufacturing of European MNT products.
• to ensure that the new MNT products are produced
  at European facilities using equipment and
  systems of European origin.

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The vision for Micro- and Nanomanufacturing
Vision The European community of Micro- and
NanoManufacturing aims at the worldwide
leadership of European manufacturers and
equipment-suppliers in the field of manufacturing
micro- and nano-technological products It will
be the European network in these fields.
RoadmapStrategic Research Agenda
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Background European Technology Platforms

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What is a European Technology Platform?

• see
• http//cordis.europa.eu/technology-platforms/home_
  en.html

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Industry led frameworks bringing together
European stakeholders

• ETPs
• provide a framework for stakeholders, led
  by industry, to define research and development
  priorities, timeframes and action plans on a
  number of strategically important issues where
  achieving Europe's future growth, competitiveness
  and sustainability objectives is dependent upon
  major research and technological advances in the
  medium to long term.

(Source http//cordis.europa.eu/technology-platfo
rms/home_en.html)
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Definition/development of European research
strategy

• ETPs
• play a key role in ensuring an adequate
  focus of research funding on areas with a high
  degree of industrial relevance, by covering the
  whole economic value chain and by mobilising
  public authorities at national and regional
  levels . As such, they are proving to be
  powerful actors in the development of European
  research policy, in particular in orienting the
  Seventh Research Framework Programme to better
  meet the needs of industry.

(Source http//cordis.europa.eu/technology-platfo
rms/home_en.html)
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Technological challenges for Europes
competitivenes

• ETPs
• address technological challenges that can
  potentially contribute to a number of key policy
  objectives which are essential for Europe's
  future competitiveness, including the timely
  development and deployment of new technologies,
  technology development with a view to sustainable
  development, new technology-based public goods
  and services, technological breakthroughs
  necessary to remain at the leading edge in high
  technology sectors and the restructuring of
  traditional industrial sectors.

(Source http//cordis.europa.eu/technology-platfo
rms/home_en.html)
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More about ETPs

• ETPs are a concept created and started in Europe
• First ETPs were initiated few years ago
• Some 29 ETPs up und running (18 Vision
  statements, 17 SRA, preparation for
  implementation)
• Some examples of ETPs for Manufacturing
  (Manufuture), for Sustainable Chemistry,
  Materials Nanoelectronics, Photovoltaics,
  Textiles
• Not everybody can create an ETP nor any topic can
  be set for an ETP! (it must be relevant enough-
  and be led by the industry)

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Why to propose a (sub-)ETP on Micro- and
Nanomanufacturing?

• Stakeholders getting together
• Currently no existing association with ALL
  relevant stakeholders in Micro- and
  Nanomanufacturing several not connected groups,
  not large industry driving force
• . to define a Strategic Research Agenda (SRA)
• Not coordinated National, EC, regional
  programmes and policies in Micro and
  Nanomanufacturing, RD industry effort
  independent, research and academic effort not
  industry oriented, no coherent and unified
  strategy
• on a number of strategically important issues
• Micro- and Nanomanufacturing strategically
  important!!

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Why to propose a (sub-)ETP on Micro- and
Nanomanufacturing?

• with high societal relevance
• Nanotechnology opportunities and fears, safety,
  ethics, presence and impact in everyday life,
  medical applications
• where Europes future growth, competitiveness
  and sustainable objectives
• Outsourcing, competition against USA, Far East,
  opportunities for Nanotechnology, employment
• is dependant upon major research and
  technological advnaces in the medium and long
  term
• Need for technology development, too many
  laboratory level research, need to enable
  industrial implementation, potential for new
  technologies, chance to establish European
  leadership in new topics

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Status on Activities Towards a Community for
Micro- and Nanomanufacturing

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First activities in Micro- and Nanomanufacturing

• IPMMAN and µSAPIENT
• Two Coordination Actions on Micro- and
  NanoManufacturing
• NanoManufacturing Working Group (NMG)
• very close collaboration with IPMMAN and µSAPIENT
  
• Recommendations for FP7-NMP concerning Micro-
  and
• Nanomanufacturing jointly
  developed by the three groups
• Shaping the Future
• IPMMAN, µSapient and NMG join efforts!
• Establishing a Working Group Micro- and
  NanoManufacturing
• One MicroNanoManufacturing Community in Europe

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European Micro- and NanoManufacturing Activities
2005
2007
2006
LEADERSHIP
European Technology Platform ManuFuture Vision
Paper, SRA, Implementation Plan
Working Group NanoManufacturing
Community Micro- and Nano- Manufacturing
µSapient / IPMMAN
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Preparatory Activities to establish a Community

• Close cooperation with industrial
  associations/networks
• Europe
• Semi Europe
• United Kingdom
• EUSPEN
• MNT-Network
• Netherlands
• NEXUS
• Austria
• Wirtschaftskammer Österreich
• Cooperation with other ETPs started
• Nanomedicine, Nanoelectronics ENIAC, SusChem,
  EUMAT, Photovoltaics, Industrial Safety, etc.

• Germany
• VDMA units Productronic and Micro Technology
• IVAM Fachverband der Mikrotechnik
• NANOMAT
• Switzerland
• CSEM Centre Swisse dElectronique and
  MicrotechniqueS.A.

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Is there a real need for an own Industrial Forum?

• Are the common interests, threats and
  opportunities big enough in order to establish an
  own forum or platform for
• discussing strategic issues and visions
• acting together on the industrial and political
  level

(answer in next slide.)
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Is really an ETP needed? (The Answer)

• There is a need for bringing together
  stakeholders in Micro- and Nanomanufacturing- but
  a European Technology Platform seems to be too
  much!
• Solution proposed
• Sub-ETP platform within the ETP Manufuture.
• In this way
• The structure, size and complexity is much
  smaller
• A sub-ETP on Micro- and Nanomanufacturing would
  benefit from positive synergies within the ETP
  for Future Manufacturing Technologies
  MANUFUTURE (see next slide)

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Proposed Sub-ETP within the ETP Manufuture
Manufuture Model
Micro- and Nanomanufacturing is proposed as one
of the Emerging Manufacturing Sciences and
Technologies
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Results of the workshop in Brussels on 14.
September

• Main objective To discuss the need and further
  steps towards the formation of a European Micro-
  and Nanomanufacturing Community
• 88 participants registered
• More then 50 from industry and industrial
  networks
• Around 20 positive Statements from Stakeholders
  confirmed interest and relevance of such a
  Community
• General opinion seemed to be that the best
  approach would by a Sub-ETP within the ETP
  MANUFUTURE.
• Every European player in Micro- and
  Nanomanufacturing is welcome to join the Micro-
  and Nanomanufacturing Community

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Conclusions

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• Micro- and NanoManufacturing is getting more and
  more important for innovative applications
• A new Micro- and NanoManufacturing-community is
  upcoming in Europe
• The Micro- and NanoManufacturing-community has
  developed a vision and first Roadmaps
• Micro- and NanoManufacturing is one of the
  emerging manufacturing sciences and
  technologies of Manufuture

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Annex The Micro- and Nanomanufacturing Roadmap

• Recommendation under consideration
• for FP7- NMP Programme

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From production processes
Manufacturing NanoMaterials
Manufacturing NanoSurfaces
Manufacturing Micro-Components
Technologies for (micro/nano) components and
devices
Nanophased particles production
functionalisation
Nanostructuring and coating of surfaces
Bulk integration
Volume production processes
Surface functionalisation and nanolayering
Nanophased particles production
functionalisation bulk integration
Assembly and integration processes
Micro- and Nano Manufacturing Systems and
Platforms
Knowledge based fabrication
Development and implementation of scalable,
intelligent and modular meso-, micro- and nano-
manufacturing systems
to production lines
Integrated platforms
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Manufacturing of Nanomaterials Roadmapping
Results
1 Bulk Integration Nanocomposites
Incorporation 2 Nanoparticles Production of
Nano-Phased Particles Functionalisation

• Vision
• Education -" European Nanomanufacturer"
• Standardised control system and parameters
  working
• Continuous process from material to production
  without transport leak
• Expert Data base for production parameters
• Equipment for safe transports of particle
• Methods for High Energy processes of particle
  production
• Continuous high pressure Process
• Definition of standardisized control systems
• Materials for production evaluated, process basic
  design done

Bulk Integration Nanoparticlesquality /
automation
2013
2012
Bulk Integrationautomation
Nanoparticlesquality
2011
Bulk Integrationproduction environment
2010
Nanoparticlesproduction environment
2009
Bulk Integration1 economical production
automation
2008
Nanoparticles2 economical production automation
2007
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Manufacturing of Nano-Surfaces - Roadmapping
Results

• Vision
• higher quality (robustness, controlled
  shape/size, long range order)
• better performance (optimized functionalities)
• higher flexibility (self-assembly, combination
  top-down / bottom-up, combination with robotics)
• high process integration
• high throughput (self-assembly, replication)
• high yield
• smaller structures, smart surfaces
• quality control including methodologies and
  measurement equipment
• Surface system (Substrat, layers, surfaces)

• State of the Art 2006
• Processes in lab-volume
• Structures from 10nm to sub-micron available
• Maturity strongly depends on the
  deposition/structuring process (eg plasma vs
  self-assembly)
• insufficient integration / technology transfer
  for high volume industry applications
• Lack of theoritical/simulation tools for
  predicting the structure/function relationship
• Lack of understanding of adhesion mechanisms
• Difficulties for homogeneous coating complex 3D

Surface functionalisationand nanolayeringAutomat
ion, economicalproduction
2013
2012
Nanostructuring and coating of surfaces Automation
, economicalproduction
2011
2010
Surface functionalisationand nanolayering Quality
2009
2008
Nanostructuring and coating of surfaces Quality
2007
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Manufacturing of Micro Components - Roadmapping
Results

• Vision
• Extended range of microfabrication capabilites
  (materials, geometry, accuracy)
• Highly compatible production processes satisfying
  functional and technical requirements of future
  emerging single and multimaterial
  microcomponents
• New production methods and technologies
  facilitating reliable and chip function
  integration in emerging new products (e.g.
  near-monolithic integration)
• Bridging the gap between mechanical
  ultraprecision engineering and MEMS/IC-based
  technologies
• Length-scale integration in new products

2013
Micro-assembly processes for multi-functional
multi-material meso-micro devices
2012
Technologies and tools for enabling volume
production process chains for development of high
throughput micro-manufacturing platforms
2011
Tools and technologies for multi-material
meso/micro components and devices with micro and
nano scale functional features
2010
Micro-assembly processes for multi-functional
multi-material meso-micro devices
2009
Technologies and tools for enabling volume
production process chains for development of high
throughput micro-manufacturing platforms
2008
Tools and technologies for multi-material
meso/micro components and devices with micro and
nano scale functional features
2007
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Production of Micro-Nano Manufacturing systems
and platforms - Roadmapping Results

• Vision
• Education -"European micro/nano manufacturer
• High degree of modularisation and
  standardisation (HW/SW)
• Knowledge based Micro- and Nano Manufacturing
  platforms
• Digitalisation and simulation for integrated
  meso/micro/nano manufacturing platforms
• Design tools and generalized introduction in the
  industry of low cost modular, miniaturised
  equipment and desktop factories
• Design for manufacturing
• High degree of scalability
• complexity mgmt
• tracebility
• distributed intelligence, self-learning,
  adaptable production platforms
• meso/micro/nano integratd process/supply chain,
  logistics, materials production mgmt
• mobile manufacturing
• cleanest production
• interdisciplinarity
• overall higher precision
• economical mass and small lot size production
• extreme high function integration
• manageable toxicology

Integration in specific and cross-domain sectors
2013
Integrated solutions for reliability, quality,
safety, and standardization
2012
2011
Collaboration (esp. SME production networks )
Fabrication environment under clean and safe
conditions
2010
1. Flexible, modular and knowledge based
manufacturing system architectures 2. Integrated
cross-domain approaches
2009
Intelligent, scalable, adaptable manufacturing
systems and platforms
2008
Design, modelling and simulation of specific
knowledge of the micro- and nano domain
2007
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Micro-Nano Manufacturing Integrated Topics
7-years Call Planning
Manufacturing NanoMaterials
Manufacturing NanoSurfaces
Nanophased particles production
functionalisation
Nanostructuring and coating of surfaces
Year 1 Economical production Automation
Year 1 Quality
Year 3 Production environment
Year 5 Automation and economical
production
Year 5 Quality
Bulk integration
Surface functionalisation and nanolayering
Year 2 Economical production automation
Year 4 Production environment
Year 3 Quality
Year 6 Automation
Nanophased particles production
functionalisation bulk integration
Year 7Automation and economical
production
Year 7 Quality automation
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Micro-Nano Manufacturing Integrated Topics
7-years Call Planning
Micro- and Nano Manufacturing Systems and
Platforms
Manufacturing Micro-Components
Knowledge based fabrication
Technologies for (micro/nano) components and
devices
Year 1 Design, modelling and simulation of
specific knowledge of the micro- and nano domain
Year 1/4 multi-material meso/micro components
and devices with micro and nano scale functional
features
Year 4 Fabrication environment under clean and
safe conditions
Volume production processes
Development and implementation of scalable,
intelligent and modular meso-, micro- and nano-
manufacturing systems
Year 2/5 enabling volume production process
chains for development of high throughput
micro-manufacturing platforms
Year 2 Intelligent, scalable, adaptable
manufacturing systems and platforms
Year 3 Flexible, modular and knowledge based
manufacturing system architectures
Year 6 Integrated solutions for reliability,
quality, safety, standardization
Assembly and integration processes
Integrated platforms
Year 3/6 Micro-assembly processes for
multi-functional multi-material meso-micro
devices
Year 3 and 7 Integration in specific and
cross-domain sectors
Year 5 Collaboration (esp. SME production
networks )