Use of HF and BOE in Nanolab

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Use of HF and BOE in Nanolab

• Training Presentation
• April 2003

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Use of HF and BOE in Nanolab

• Only trained users may use HF or BOE
• Visor, gloves and apron must be used when pouring
  or handling
• Waste must be segregated in dedicated plastic
  bottles
• Do NOT use glass around HF
• Do NOT mix with other chemicals without prior
  approval and supervision.

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Use of HF and BOE in Nanolab

• Do not cover beaker with metal foil or use with
  metal holders
• Do NOT heat HF/BOE
• Use dedicated tanks at acid hood for large
  volumes eg 1 liter or more
• Use funnels for pouring neutralize and clean up
  spills immediately

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Use of HF and BOE in Nanolab

• BOE stands for buffered oxide etch
• It is a mixture of NH4F and HF
• Extra fluorine acts as a buffer to preserve etch
  rate due to load effects or bath aging
• Very dangerous-same as HF
• We use 61 (6 NH4F to 1 HF)
• BOE/HF is one of the most useful chemicals in the
  semiconductor industry (next slide)

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Use of HF and BOE in Nanolab
Many useful mixtures applications of BOE and
HF/H2O
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Use of HF and BOE in Nanolab

• Label the setup
• Use only in approved locations
• Concentration/mixture
• Your name and phone
• Date time poured
• Date time finished
• Fill out log book for in-deck HF/BOE baths and
  label bath cover with mixture eg 101 H2OHF, BOE
  61 etc
• Setups cannot remain longer than 24 hours
• Exception In deck HF tanks Porous Si Setup

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Use of HF and BOE in Nanolab

• Allowed locations for HF/BOE in Nanoab
• PFC sink in deck
• In deck acid sink in yellow room

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Use of HF and BOE in Nanolab

• Allowed locations for HF/BOE in Nanoab
• HBr/HF sink
• Porous silicon etch set-up

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Use of HF and BOE in Nanolab

• Know the safety procedure for exposure
• Remove affected clothing
• Wash with water
• Apply calcium gluconate cream
• See the Doctor
• Report the incident
• See attached detailed procedure

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Use of HF and BOE in Nanolab

• In case of HF/BOE spill
• Wear gloves, visor and apron
• Evacuate area
• Neutralize with lime or neutraspray
• Use spill towels or pillows to collect waste
• Put waste in yellow bags and label it HF/BOE
  Hazardous Waste Put it in Haz Waste Cabinet
• Report spill to lab staff
• Do NOT attempt to clean up large or unknown spills

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Use of HF and BOE in Nanolab

• HF/BOE is extremely dangerous and can cause
  severe burns and even death.
• HF/BOE attacks bone tissue by reacting with
  calcium in the bone
• HF/BOE attacks most organs including the heart by
  disrupting Ca ions
• HF/BOE in dilute concentrations may not even
  cause any pain initially but is easily absorbed
  through the skin to attack bone and other tissue

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Use of HF and BOE in Nanolab

• Improper mixing of HF waste can have catastrophic
  results

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Use of HF and BOE in Nanolab
Store HF/BOE Waste in Proper Hazardous ACID Waste
Cabinet
White Room
Yellow Room
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Use of HF and BOE in Nanolab
NH4F MSDS DATA
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Use of HF and BOE in Nanolab
Sections 1 and 2 of HF MSDS

• Section 1 - Product and Company Identification
• 244279 HYDROFLUORIC ACID 48 ACS REAGENT
• -Product Identification 244279 HYDROFLUORIC ACID
  48 ACS REAGENT
• Date of MSDS 01/01/1997 Technical Review Date
  05/08/1998
• FSC 6550 NIIN LIIN 00F056013
• Submitter F BT
• Manufacturer's Name SIGMA CHEMICAL COMPANY
• Post Office Box 14508
• Manufacturer's Address1 3050 SPRUCE ST
• Manufacturer's Address2 SAINT LOUIS, MO
  63178-5000
• General Information Telephone [phone]
  5-3010
• Emergency Telephone [phone]

• Section 2 - Compositon/Information on Ingredients
  
• 244279 HYDROFLUORIC ACID 48 ACS REAGENT
• Ingredient Name HYDROFLUORIC ACID, HYDROGEN
  FLUORIDE
• Ingredient CAS Number 7664-39-3 Ingredient CAS
  Code M
• RTECS Number MW7875000 RTECS Code M
• Text N/K
• Enviromental Weight
• Other REC Limits 2.5 PPM
• OSHA PEL N/K OSHA PEL Code M
• OSHA STEL OSHA STEL Code
• ACGIH TLV C 2.6 MG/CUM ACGIH TLV Code M
• ACGIH STEL N/P ACGIH STEL Code
• EPA Reporting Quantity 100 LBS
• DOT Reporting Quantity 100 LBS
• Ozone Depleting Chemical N

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Use of HF and BOE in Nanolab
Sections 3 and 4 of HF MSDS

• Section 3 - Hazards Identification, Including
  Emergency Overview
• 244279 HYDROFLUORIC ACID 48 ACS REAGENT
• Health Hazards Acute Chronic FATAL IF INHALED,
  SWALLOWED/BY SKIN ABSORPTION. MATERIAL IS
  EXTREMELY DESTRUCTIVE TO TISSUE OF THE MUCOUS
  MEMBRANES UPPER RESPIRATORY TRACT, EYES SKIN.
  FATAL AS A RESULT OF SPASM, INFLAMMATION E DEMA
  OF THE LARYNX BRONCHI, CHEMICAL
  PNEUMONITIS/PULMONARY EDEMA. MAY AFFECT THE LIVER
  KIDNEYS. POSSIBLE MUTAGEN.
• Signs Symptoms of Overexposure
• IRRITATION, INFLAMMATION, BURNING SENSATION,
  COUGHING, WHEEZING, LARYNGITIS, SHORTNESS OF
  BREATH, HEADACHE, NAUSEA, VOMITING

• Medical Conditions Aggravated by Exposure
• N/K
• LD50 LC50 Mixture N/P
• Route of Entry Indicators
• Inhalation YES
• Skin YES
• Ingestion YES
• Section 4 - First Aid Measures
• 244279 HYDROFLUORIC ACID 48 ACS REAGENT
• First Aid
• EYES/SKIN IMMEDIATELY FLUSH W/COPIOUS AMOUNTS OF
  WATER FOR 15 MINS. INHALATION REMOVE TO FRESH
  AIR. GIVE CPR/OXYGEN IF NECESSARY. INGESTION
  DON'T INDUCE VOMITING. IF CONSCIOUS AFTER
  INGESTION OF MA TERIAL, IMMEDIATELY GIVE 4-8
  OUNCES OF MILK/WATER. OBTAIN MEDICAL ATTENTION IN
  ALL CASES.