PowerPointPrsentation

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Analytical TEM Electron Intensity Distribution
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Outline
Introduction Instrumentation Elemental
Mapping EFTEM / EELS Analysis ELNES EXELFS
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Inelastic Scattering Analytical Information
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Schematical Energy Loss Spectrum
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The Omega Energy Filter
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Imaging W-Spectrometer
Energy selecting slit
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The Gatan Imaging Filter
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Elemental Distribution Images Three Window
Technique
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MOSFET-Transistor with sub - 100 nm gate length
and -width
500 nm
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O-map
Si-map
Gate width 12,5 nm
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EEL spectra from ESI series of images
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What is the best way to water flowers?
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Characterisation of Ohmic Contacts on GaN Thin
Film Devices
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Electron Spectroscopic Imaging Spectrum - Line
Profile for for the Elements Al, Ti, Ga and N
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Schottky Barrier ?
Ohmic Contact
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HAADF - STEM Imaging
Example individual Sb atoms in doped Si Voyles,
Muller and Kirkland, Microsc. Microanal. 10 (2004)
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Energy Loss Near Edge Structure (ELNES)
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TiO2 - Polymorphs (F. Hofer, TU
Graz)
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BaTiO3Ti in octahedralcoordination
Ba2TiO4Ti in tetrahedralcoordination
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ELNES-Interpretation (one electron
approximation)  
1) Fermi's Golden Rule
? local density of unoccupied states (LDOS)
2) Dipole selection rule
? symmetry projected DOS
3) Momentum resolved spectroscopy
? excitation into specific orbitals
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C-K edge in graphite
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Simulation of the ELNES
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O-K edges in different oxides
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HR-ELNES
Mitterbauer, Kothleitner Hofer, Ultramicroscopy
(in print)
HR-EELS of Co L2,3 of CoO
LaB6 0.65 eV
FEG 0.55 eV
0.20 eV
with crystal-field multiplet theory (FMF de
Groot)
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EXELFS - Extended Energy Loss Fine Structure
Multiple Scattering of outgoing spherical
wave High scattering cross section for
constructive interference
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EXELFS - Example Amorphous Alumina
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EXELFS - Radial Distribution Function
Crystalline Sapphire
Amorphous Alumina
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