F.L. Lewis, Assoc. Director for Research

1
F.L. Lewis, Assoc. Director for
Research Moncrief-ODonnell Endowed Chair Head,
Controls, Sensors, MEMS Group
Automation Robotics Research Institute
(ARRI)The University of Texas at Arlington
2
Bruno Borovic
MEMS Modeling and Control
With Ai Qun Liu, NTU Singapore
Thermal Model
Mechanical Model
Electrical Model
Optical Model
FEA
Experiment
3
MEMS Power Generation
Vibration-driven E-Mag generator
Fab Layout of Coils with Folded Beam Suspension
4
Pressure Sensors for Pulmonary Ventilator Control
Load-deflection relation for square membrane
Maximum membrane slope occurs at (x,y) (a,a/2),
(a,3a/2), (a/2,a), (3a/2,a). maximum slope is
Optical Pressure Sensor
FEA of membrane deflection
Fiber intensity loss vs. beam offset
with Wendell McCulley- InterMEMS, Inc.
MEMS process Fab layout
5
Testing and Calibration of Optical Pressure
Sensors
Array of membranes with different
dimensions
MicroFAB, Inc. - fiberoptics Optical micro-lenses
David Wallace
Optical Pressure Sensor Calibration Facility
6
Flow Sensors for Pulmonary Ventilator Control
Self-Assembly Sequence
Drag Force
FEA
Optical Flow Sensor
For a wide range of Reynolds numbers, CD 1.28
Reynolds Number
Drag torque about the hinged bottom
Where a Cermak flow velocity profile is assumed
Steady-state tilt angle is
Surface Micromachined Design
7
Flow Sensor based on von Karman Vortices
No moving parts!
8
MicroFluidics for VLSI Chip Cooling
Number of transistors on a chip is now limited by
heat dissipation. Fabricate micro-channels on the
back of the chip for cooling.
With Dereje Agonafer, Director UTA Packaging
Center
Intellisuite simulation showing dry (RIE) etching
of 110 Si to get Micro Channels. Channels are
more than 100 microns high (ARRI).
9
Biochemical Monitoring
1. BCW Detectors
Molecular Recognition and Supramolecular
Chemistry - D. Rudkevich
In miniaturized supramolecular devices sensors,
surfaces, and membranes - communication between
the analyte-guests and their receptors on a
molecular level is transformed to measurable
macroscopic effects
calixarenes as unique, specific NO2-sensing
species
these interactions are reversible, unique, and
specific
10
1. BCW Detectors
Proteins (enzymes and antibodies) and aptamers as
BCW sensors R. Gracy, UNT Health Science Center
Functional protein microarrays bind specific
capture molecules to solid matrix materials
Immunoassay for oxidized Fibrinogen isoforms as
biomarkers for Alzheimers disease
Oligonucleotide aptamers bind selected molecules
Anti-ricin Aptamer as potential Biosensor for
ricin
11
template-directed growth of thin films and
composites.
2. Thin Films for BCW Detector Support
Structured chemically-activenanosphere thin
films- K. Rajeshwar
Deposit chemically active agent and dissolve
nanospheres
Electrostatically self-assembled polystyrene
nanospheres
To improve sensitivity to challenge agents down
to ppb, it is necessary to improve charge
separation to prevent recombination of
electron/hole photogenerated charges.
Site-proximity mechanism in a Ni/TiO2 composite
film illustrating the complementary roles of the
Ni and TiO2 components.
12
3. MEMS Platforms for BCW Detection Agents
Interdigitated Finger Gate Electrode FET Uses
induced resistivity changes
3x3 IGEFET sensor micro-array E. Kolesar
Microcantilever MEMS sensor array- Kolesar
DSP and CC User Interface for wireless networks-
Lewis
Uses induced mass changes
Neural network classification for unique
signatures
13
Microassembly Station
14
Micro Manipulator MP-285
Probe Controller
Manual Control
Automatic Probe MP-285
15
NI Hardware
Already in use Ideally, PXI system SCXI
signal conditioning

• NI 1411 IMAQ card (Image Acquisition)
• NI6711 PCI card (Data Aquisition)
• NI 485/8 Serial Port Card (serial com. with
  controlller)
• SCXI Signal conditioning (thermocouple,etc.)

16
Vision Automatic Probe Front Panel
17
Vision Feedback
Vision info
Stored map
Map From MEMS-Pro 3D info
Feature-based
Localization With 3D info
Based or pre-programmed behaviours
18
OpenGL LabWindows /CVI
19
MEMS Packaging
with Wendell McCulley Dereje Agonafer
Packaging for MEMS Pressure Sensor- W. McCulley
20
Piet Mondrian
21
Pantographs for Position Force Scaling