NanoZoom - PowerPoint PPT Presentation

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NanoZoom

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Scan your sample with the SPM at Angstrom resolution. ... For this sample, the RMS deviation of the surface height is 4 Angstroms. ... – PowerPoint PPT presentation

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Title: NanoZoom


1
Nano-Zoom
  • JMAR Precision Systems, Inc.
  • 9207 Eton Avenue,
  • Chatsworth, CA 91311
  • Phone 1.818.700.8977
  • Fax 1.818.700.8984
  • www.jmar-psi.com

2
Nano-Zoom
  • The Nano-Zoom combines a high quality optical
    microscope and a state-of-the-art scanning probe
    microscope (SPM) into a single system.
  • The Nano-Zooms SPM is capable of
  • Atomic Force Microscopy
  • Lateral Force Microscopy
  • Magnetic Force Microscopy (optional)
  • Electric Force Microscopy (optional)
  • Use the optical microscope to find a feature on
    your sample.
  • Press a button to move that feature precisely
    under the SPM.
  • Scan your sample with the SPM at Angstrom
    resolution.
  • The Nano-Zoom can be equipped with a vacuum
    chuck for holding disk media or semiconductor
    wafers, or fixtures for a variety of other
    materials.

3
Nano-Zoom
4
Why use an AFM?
  • Resolution.
  • The resolving power of an optical microscope is
    about 300 nm.
  • AFM offers the best resolution and fidelity. The
    sharp, crisp high definition edge sets the stage
    for good measurement.
  • Material independence.
  • Versatility.
  • Surface topography
  • Height measurements
  • Width measurements
  • Profiles
  • Non-Destructive.
  • Compare to SEM, whose cross section measurements
    are destructive.

5
How Does an AFM Work?
  • Instead of using light or electrons to probe the
    sample, the AFM uses a tip suspended above the
    surface.
  • The attractions or repulsions between the tip and
    the surface cause the tip to deflect.
  • A laser senses the deflection.
  • Scanning the tip across the surface generates the
    image.

6
Scanned Disk Media
  • The next slide shows a 5 mm 5 mm Nano-Zoom
    Atomic Force Microscope (AFM) image of rigid disk
    media. The AFM renders a 3-dimensional image of
    the surface of the media. Features that are too
    small to see in an optical microscope are clearly
    visible in the AFM scan.

7
AFM Image of Disk Media
8
AFM Image of Disk Media 3D View
The next slide shows a 3 dimensional plot of the
same 5 mm 5 mm AFM scan of rigid disk media.
9
AFM Image of Disk Media -- 3D View
10
Surface Roughness Calculation
  • The Nano-Zoom includes software with many
    features for analyzing AFM data. The next slide
    shows a height histogram and surface roughness
    calculations for the same AFM scan of rigid disk
    media. For this sample, the RMS deviation of the
    surface height is 4 Angstroms.

11
Surface Roughness CalculationAFM Data on Rigid
Disk Media
12
AFM Image of Grating Pattern
  • The next slide shows an AFM image of a metallic
    grating imprinted on a film substrate.

13
AFM Image of Grating Pattern Slope View
14
AFM Image of Grating Pattern 3D View
  • The next slide shows a 3 dimensional rendering of
    the same AFM scan.

15
AFM Image of Grating Pattern 3D View
16
Measurement View of Grating Pattern
  • The next slide shows the measurement screen of
    the AFM software, along with a sample measurement
    of two periods of the grating. The grating pitch
    is 40 mm, conforming to specification!

17
Measurement View of Grating Pattern
18
Defect View
  • The next slide shows the Defect Screen of the
    Nano-Zoom software. Several software features
    are illustrated, including the following
  • A defect table with imported data.
  • A Polar View of the entire sample surface
    indicating the current field of view and the
    defect locations.
  • Live video from the microscope.
  • Big Digital Readouts showing the position in the
    sample parts coordinate system.

19
Nano-Zoom Defect View
20
Nano-Zoom Applications
  • Defect Review
  • CMP Process Verification
  • IC Failure Analysis
  • Width, Depth, and Height Measurements
  • Surface Roughness
  • Fiber Optic Gratings
  • Pole Tip Recession
  • CD/DVD Inspection
  • Disk Media Inspection
  • Wafer Inspection
  • Thin Film Inspection
  • Etc.

21
Specifications AFM Optics
  • Scanning Probe Microscope (SPM) Specifications
  • X,Y Scan Size 80 µm x 80 µm standard, extendable
    to 200 µm.
  • Z Range 8 µm standard, extendable to 20 µm.
  • X,Y resolution 1 nm (smaller resolutions are
    available).
  • Z resolution lt 1 Ã….
  • Variety of probe tips available
  • Operational modes Contact, Intermittent Contact,
    Broadband, etc.
  • Lateral Force Microscopy.
  • Optional Magnetic Force Microscopy.
  • Optional Electric Force Microscopy.
  • Easy probe tip installation and alignment.
  • Automatic probe tip engage feature.
  • Top Quality Optical Microscope
  • Dark field and bright field illumination.
  • 5 position lens turret.
  • Objective lenses 5x, 20x, 50x, 100x
    standard.Other lenses are available.
  • 10X eyepieces standard.
  • Optional Differential Interference Contrast
    (DIC).

22
Additional Specifications
  • Precision Motion Platform
  • Computer-controlled R, ?, Z precision motion
    platform.
  • R Stage 0.1 micron resolution, 10 inches travel.
  • Z Stage 0.1 micron resolution, 6 inches travel.
  • ? Stage 0.001 resolution.
  • For 150 mm wafers or disks (extendible to 200
    mm).
  • Acoustic and vibration isolation included.
  • Other features
  • Optional scriber with diamond or steel tips to
    etch your sample.
  • Acoustic and vibration isolation.
  • Small equipment foot print.
  • Measurements are non-destructive.

23
System Isolation
  • Vibration Isolation
  • Standard passive vibration isolation system,
    natural frequency 1 Hz.
  • Optional AVI-150 active vibration isolation
    system.
  • Active isolation 1-200 Hz.
  • Passive isolation gt200 Hz.
  • Correctional forces to 8N horizontal, 4N
    vertical.
  • Isolation in 6 degrees of freedom.
  • Virtually no resonance.
  • Acoustic Isolation
  • Foam-lined enclosure isolates the system against
    acoustic noise and air currents.

Optional AVI-150
24
Software Features
  • Easy to Use Windows-based software.
  • 3D Visualization of AFM images.
  • Image refinement with tilt removal, streak and
    spot removal, smoothing and user defined filter.
  • Fourier transform analysis for analyzing and
    modifying the frequency spectrum of SPM images.
  • Histogram analysis and surface roughness
    measurements.
  • Dimensional analysis for measuring feature
    height, width, and length.
  • Image storage and retrieval.
  • Optional Pax-It image archival software
    maintains a database of images, makes it easier
    to organize, analyze, network, transmit and print
    images.
  • Defect classification system. Defect table
    displays list of defects, allows user to move to
    a defect manually or automatically and classify
    it.
  • Reads/writes text files containing defect
    positions. Easy to export/import defect data
    to/from other machines.
  • Polar view displays a diagram of your sample with
    all defect locations.
  • Large digital readouts display part position
    continuously.

25
Choosing an AFM Probe Tip
Chose a probe tip with a small enough radius to
resolve features of interest.
Chose a probe tip that is long enough and with a
narrow enough cone angle for the features being
measured.
26
JMAR Probe Tips
27
JMAR-PSI Sales
  • Address
  • JMAR Precision Systems, Inc.
  • 9207 Eton Ave.
  • Chatsworth, CA 91311-5808
  • Web
  • www.jmar-psi.com
  • E-Mail
  • salesjpsi_at_jmar-psi.com
  • Phone
  • 1-800-793-0179
  • 1-818-700-8977
  • Fax
  • 1-818-700-8984

28
Image Gallery
The remaining slides have more SPM images and
measurements. Enjoy!
29
Alumina Layer
30
CeO2 Film
31
Crystals on Pr-Ce Pellet Surface
32
Sapphire Substrate
33
SiO2 Film
34
SiO2 on Re Crystal Substrate
35
Northrop-Grumman Test Pattern
36
Alumina Layer With Vias
37
Line Heights
38
Pits on CD Media
39
Via Height Measurements
40
Photoresist Residue on 1-D Refill Lithography
41
GaN
42
Homoepitaxial SiC
43
Polished SiC
44
SiC Film
45
Corrosion
46
Chrome on Glass
47
Stainless Steel
48
Ti Film
49
JMAR-PSI Sales
  • Address
  • JMAR Precision Systems, Inc.
  • 9207 Eton Ave.
  • Chatsworth, CA 91311-5808
  • Web
  • www.jmar-psi.com
  • E-Mail
  • salesjpsi_at_jmar-psi.com
  • Phone
  • 1-800-793-0179
  • 1-818-700-8977
  • Fax
  • 1-818-700-8984
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