Title: NanoZoom
1Nano-Zoom
- JMAR Precision Systems, Inc.
- 9207 Eton Avenue,
- Chatsworth, CA 91311
- Phone 1.818.700.8977
- Fax 1.818.700.8984
- www.jmar-psi.com
2Nano-Zoom
- The Nano-Zoom combines a high quality optical
microscope and a state-of-the-art scanning probe
microscope (SPM) into a single system. - The Nano-Zooms SPM is capable of
- Atomic Force Microscopy
- Lateral Force Microscopy
- Magnetic Force Microscopy (optional)
- Electric Force Microscopy (optional)
- Use the optical microscope to find a feature on
your sample. - Press a button to move that feature precisely
under the SPM. - Scan your sample with the SPM at Angstrom
resolution. - The Nano-Zoom can be equipped with a vacuum
chuck for holding disk media or semiconductor
wafers, or fixtures for a variety of other
materials.
3Nano-Zoom
4Why use an AFM?
- Resolution.
- The resolving power of an optical microscope is
about 300 nm. - AFM offers the best resolution and fidelity. The
sharp, crisp high definition edge sets the stage
for good measurement. - Material independence.
- Versatility.
- Surface topography
- Height measurements
- Width measurements
- Profiles
- Non-Destructive.
- Compare to SEM, whose cross section measurements
are destructive.
5How Does an AFM Work?
- Instead of using light or electrons to probe the
sample, the AFM uses a tip suspended above the
surface. - The attractions or repulsions between the tip and
the surface cause the tip to deflect. - A laser senses the deflection.
- Scanning the tip across the surface generates the
image.
6Scanned Disk Media
- The next slide shows a 5 mm 5 mm Nano-Zoom
Atomic Force Microscope (AFM) image of rigid disk
media. The AFM renders a 3-dimensional image of
the surface of the media. Features that are too
small to see in an optical microscope are clearly
visible in the AFM scan.
7AFM Image of Disk Media
8AFM Image of Disk Media 3D View
The next slide shows a 3 dimensional plot of the
same 5 mm 5 mm AFM scan of rigid disk media.
9AFM Image of Disk Media -- 3D View
10Surface Roughness Calculation
- The Nano-Zoom includes software with many
features for analyzing AFM data. The next slide
shows a height histogram and surface roughness
calculations for the same AFM scan of rigid disk
media. For this sample, the RMS deviation of the
surface height is 4 Angstroms.
11Surface Roughness CalculationAFM Data on Rigid
Disk Media
12AFM Image of Grating Pattern
- The next slide shows an AFM image of a metallic
grating imprinted on a film substrate.
13AFM Image of Grating Pattern Slope View
14AFM Image of Grating Pattern 3D View
- The next slide shows a 3 dimensional rendering of
the same AFM scan.
15AFM Image of Grating Pattern 3D View
16Measurement View of Grating Pattern
- The next slide shows the measurement screen of
the AFM software, along with a sample measurement
of two periods of the grating. The grating pitch
is 40 mm, conforming to specification!
17Measurement View of Grating Pattern
18Defect View
- The next slide shows the Defect Screen of the
Nano-Zoom software. Several software features
are illustrated, including the following - A defect table with imported data.
- A Polar View of the entire sample surface
indicating the current field of view and the
defect locations. - Live video from the microscope.
- Big Digital Readouts showing the position in the
sample parts coordinate system.
19Nano-Zoom Defect View
20Nano-Zoom Applications
- Defect Review
- CMP Process Verification
- IC Failure Analysis
- Width, Depth, and Height Measurements
- Surface Roughness
- Fiber Optic Gratings
- Pole Tip Recession
- CD/DVD Inspection
- Disk Media Inspection
- Wafer Inspection
- Thin Film Inspection
- Etc.
21Specifications AFM Optics
- Scanning Probe Microscope (SPM) Specifications
- X,Y Scan Size 80 µm x 80 µm standard, extendable
to 200 µm. - Z Range 8 µm standard, extendable to 20 µm.
- X,Y resolution 1 nm (smaller resolutions are
available). - Z resolution lt 1 Ã….
- Variety of probe tips available
- Operational modes Contact, Intermittent Contact,
Broadband, etc. - Lateral Force Microscopy.
- Optional Magnetic Force Microscopy.
- Optional Electric Force Microscopy.
- Easy probe tip installation and alignment.
- Automatic probe tip engage feature.
- Top Quality Optical Microscope
- Dark field and bright field illumination.
- 5 position lens turret.
- Objective lenses 5x, 20x, 50x, 100x
standard.Other lenses are available. - 10X eyepieces standard.
- Optional Differential Interference Contrast
(DIC).
22Additional Specifications
- Precision Motion Platform
- Computer-controlled R, ?, Z precision motion
platform. - R Stage 0.1 micron resolution, 10 inches travel.
- Z Stage 0.1 micron resolution, 6 inches travel.
- ? Stage 0.001 resolution.
- For 150 mm wafers or disks (extendible to 200
mm). - Acoustic and vibration isolation included.
- Other features
- Optional scriber with diamond or steel tips to
etch your sample. - Acoustic and vibration isolation.
- Small equipment foot print.
- Measurements are non-destructive.
23System Isolation
- Vibration Isolation
- Standard passive vibration isolation system,
natural frequency 1 Hz. - Optional AVI-150 active vibration isolation
system. - Active isolation 1-200 Hz.
- Passive isolation gt200 Hz.
- Correctional forces to 8N horizontal, 4N
vertical. - Isolation in 6 degrees of freedom.
- Virtually no resonance.
- Acoustic Isolation
- Foam-lined enclosure isolates the system against
acoustic noise and air currents.
Optional AVI-150
24Software Features
- Easy to Use Windows-based software.
- 3D Visualization of AFM images.
- Image refinement with tilt removal, streak and
spot removal, smoothing and user defined filter. - Fourier transform analysis for analyzing and
modifying the frequency spectrum of SPM images. - Histogram analysis and surface roughness
measurements. - Dimensional analysis for measuring feature
height, width, and length. - Image storage and retrieval.
- Optional Pax-It image archival software
maintains a database of images, makes it easier
to organize, analyze, network, transmit and print
images. - Defect classification system. Defect table
displays list of defects, allows user to move to
a defect manually or automatically and classify
it. - Reads/writes text files containing defect
positions. Easy to export/import defect data
to/from other machines. - Polar view displays a diagram of your sample with
all defect locations. - Large digital readouts display part position
continuously.
25Choosing an AFM Probe Tip
Chose a probe tip with a small enough radius to
resolve features of interest.
Chose a probe tip that is long enough and with a
narrow enough cone angle for the features being
measured.
26JMAR Probe Tips
27JMAR-PSI Sales
- Address
- JMAR Precision Systems, Inc.
- 9207 Eton Ave.
- Chatsworth, CA 91311-5808
- Web
- www.jmar-psi.com
- E-Mail
- salesjpsi_at_jmar-psi.com
- Phone
- 1-800-793-0179
- 1-818-700-8977
- Fax
- 1-818-700-8984
28Image Gallery
The remaining slides have more SPM images and
measurements. Enjoy!
29Alumina Layer
30CeO2 Film
31Crystals on Pr-Ce Pellet Surface
32Sapphire Substrate
33SiO2 Film
34SiO2 on Re Crystal Substrate
35Northrop-Grumman Test Pattern
36Alumina Layer With Vias
37Line Heights
38Pits on CD Media
39Via Height Measurements
40Photoresist Residue on 1-D Refill Lithography
41GaN
42Homoepitaxial SiC
43Polished SiC
44SiC Film
45Corrosion
46Chrome on Glass
47Stainless Steel
48Ti Film
49JMAR-PSI Sales
- Address
- JMAR Precision Systems, Inc.
- 9207 Eton Ave.
- Chatsworth, CA 91311-5808
- Web
- www.jmar-psi.com
- E-Mail
- salesjpsi_at_jmar-psi.com
- Phone
- 1-800-793-0179
- 1-818-700-8977
- Fax
- 1-818-700-8984