Cleanroom Energy Benchmarking Results

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Diverse Support

• California Energy Commission
• Labs 21
• New York State Energy Research and Development
  Authority (NYSERDA)
• Northwest Energy Efficiency Alliance (NEEA)
• Public Utilities
• California Institute for Energy Efficiency (CIEE)
• Industrial Technology Research Institute (ITRI)
• Montana State University

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Industry Collaborations

• ASHRAE (lab, cleanroom, data center TCs)
• IEST (minienvironment, fan-filter units)
• Air Movement and Control Association (AMCA)
• Silicon Valley Manufacturers Group
• 7X24 Exchange Organization
• Uptime Institute
• ITRI (Industrial Technology Research Institute,
  Taiwan)
• Sematech

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Research Collaborations

• University of California
• UC Merced Campus
• Cornell University
• Demand Controlled Filtration
• Georgia Tech
• CEETHERM
• State University of New York
• Data Center Air Management
• Industrial Technology Research Institute
• Energy Benchmarking
• Fan-Filter Unit testing

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Energy Intensive High-tech Buildings

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Energy Benchmarking

• Enables comparison to other similar facilities
• Establishes baseline to track performance over
  time
• Prioritizes where to apply energy efficiency
  improvement resources
• Identify better performing systems
• Identify maintenance and operational problems
• Leads to operational cost savings

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Some Results

• Energy End Use in Cleanrooms

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Air Recirculation Comparison
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Air-change Benchmarks
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Make-up Air System Comparison
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Chilled Water Systems
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UPS Efficiency
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Benchmarking vision

• On-line benchmark results that anyone can access
  for comparison.
• Wed like to incorporate benchmark data that
  others have.
• Primarily interested in building systems
  efficiency metrics may include production
  metrics if there is interest.
• Data reporting will be anonymous.

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Tools and Publications
Available now from LBNL website

• Cleanroom Programming Guide
• Laboratory Design Guide
• Design Intent Tool
• Labs 21 Benchmarking Tool
• Energy Research Roadmaps

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Case Studies/Charrettes/Project Review

• Various Industries and Institutions
• Cleanroom Case Studies
• Laboratory Case Studies
• Data Center Case Studies
• Charrettes and project reviews
• IBM
• Genentech
• Sandia
• NEEA (fab of the future)

• HP
• LBNL Molecular Foundry
• UC Merced Campus

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Laboratories for the 21st Century

• Annual Conference October 5-7, St.Louis
• Training Seminars nationwide
• Labs 21 Partners
• Tool kit
• Lab Design Guide
• Design Intent Tool
• Website http//www.labs21century.gov/

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Energy Benchmarking Tool

• National database of lab energy use data
• Web-based input and analysis
• Currently approximately 40 facilities
• Building level data (e.g. Site BTU/sf)
• System level data (e.g. W/cfm)

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Energy Benchmarking Tool

• Data input requirements
• Location
• Type
• Area
• Hours of operation
• Energy use
• Peak loads
• System characteristics
• Efficiency features

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Benchmarking Tool Analysis
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Current Project Activities

• Cleanrooms
• Laboratories
• Data Centers

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Current Cleanroom Activities

• Energy benchmarking and best practices
  identification
• Demand controlled filtration
• Fan-filter test procedure
• Investigate efficiency opportunity in
• minienvironments

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Demand Controlled Filtration

• Pilot study in LBNL cleanroom - completed
• Workshop being planned to review the concept with
  industry
• Alternate methods of recirculation setback
  investigated
• Demonstration in an operating industry cleanroom
  (possibly Lam Research)

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Fan-Filter Unit Test Procedure

• Draft test procedure for energy performance
  issued for comments. Once in place, FFUs
  performance can be measured by the standard test
  and will have a basis for apples to apples
  comparisons and owner specification.
• IEST is developing a more comprehensive procedure
• CA utility is interested in using the procedure
  to establish baselines for incentives
• FFU manufacturers encouraged to volunteer their
  units for testing

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Pressure vs. Airflow Velocity
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Total Pressure Efficiency
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FFU Energy Performance IndexW/cfm _at_ 0.5 Pressure
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FFU Energy Performance IndexW/cfm _at_ 70 fpm Face
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Minienvironment Investigation

• Examine efficiency opportunity in selected
  minienvironment(s)
• Partner with Asyst
• Collaborate with Sematech
• Develop strategies to improve efficiency

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Minienvironment Investigation

• Identify opportunities to improve overall
  facility energy efficiency
• A field-study site is being sought
• A demonstration in operating facility will be
  proposed to the CA Energy Commission

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Current Laboratory Activities

• Energy Benchmarking and Best Practices
  Identification
• Low Flow Fume Hood Development
• Overcoming Barriers (CAL/OSHA)
• Side-by-Side Testing
• 3 Industrial Demonstrations

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Better Fume Hood Containment at 40 Less Exhaust
flow
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And better worker safety
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Current Data Center Activities

• Energy Benchmarking and Best Practices
  Identification
• Self Benchmarking Protocol
• Investigate Efficiency Opportunity in UPS Systems
• Investigate Efficiency Opportunity in Power
  Supplies

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Additional Activities

• Planning and Scoping Demonstration Projects
• Controlling air flow based upon particle counts
• (Lam Research)
• Fan-filter testing
• Efficiency improvement in mini-environment
• (Asyst, Jazzsemiconductor)
• Flow visualization using helium bubbles
• Others ?
• Technology Transfer

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Sematech input to LBNL project

• Ram Mallela and Phil Naughton are on the project
  advisory committee for the CEC project
• Others are welcome to participate
• The committee can recommend changes in direction
• Next CA project advisory meeting May 13
• Participation in Labs 21 is welcome also

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• Questions?

Bill Tschudi Tim Xu wftschudi_at_lbl.gov ttxu_at_lbl.
gov 510-495-2417 510-486-7810
Website http//ateam.lbl.gov