Cleanroom Energy Benchmarking Results

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(No Transcript)
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Two promising research areas

• Demand controlled filtration
• Fan-filter unit energy performance

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Demand controlled filtration

• The goal Match airflow to cleanliness.
  Through real-time monitoring of cleanliness in
  the cleanroom, allow lower airflow unless
  excessive numbers of particles are detected. If
  particle counters record increased particulates,
  airflow is automatically increased through
  variable speed drives on recirculation fans.

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Demand controlled filtration pilot study

• Pilot study in LBNL cleanroom confirmed
  feasibility
• Particle sizes of concern were studied
• Fan speed controlled by particle counts
• Optimum airflow is not too high or too low
• Location and numbers of particle counters need
  additional study

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Demand controlled filtration demonstrations

• LBNL is planning a demonstration to use the
  concept in an operating industrial cleanroom
• Cornell University will be demonstrating the
  concept in its new Duffield Hall cleanroom

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Demand controlled filtration other options

• Turndown of airflow can be achieved through
  simple controls
• Manual
• Timers
• Occupancy sensors
• Combinations of these
• An informal survey of the ASHRAE TC 9.11
  committee (cleanspaces) found a that number of
  cleanrooms are currently turning down airflow

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Fan-filter units

• The Need A standard method of testing and
  reporting performance so that owners and
  designers can select units based upon performance
  not hype. Performance can include energy
  use, noise, vibration, filtration effectiveness,
  etc.

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The players

• Industrial Technology Research Institute (ITRI)
• Institute of Environmental Sciences and
  Technology (IEST)
• Air Movement and Control Association
  International (AMCA)
• SEMATECH International
• FFU manufacturers and end users
• CA Energy Commission and public utility companies

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FFUs are popular

• Fan-filter units are increasingly specified in
  cleanrooms in various industries
• Fan-filter units are used in mini-environments
• Many manufacturers produce fan-filter units for
  use in cleanrooms

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Why the need for standardized reporting?

• Benchmarking and testing in Taiwan has shown wide
  variations in performance
• Fan-Filter manufacturers report performance in
  different ways
• Cleanroom Owners and Designers need a standard
  comparison
• Incentive programs need a baseline and standard
  comparison
• Serious cost and energy efficiency implications

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Recirculation systems

Average 3440
Average 1953
LBNL Data
Sematech Data
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Comparing fan-Filter units

• If fan-filters are desired, how can their energy
  efficiency be determined?
• Confusing claims and catalogue information
• Watts/fpm
• Noise (dBA _at_ distance) for single unit vs. many
• External static
• Flow area

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FFU energy efficiency
Source Rumsey Engineers
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Taiwan test data
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Test procedure development

• LBNL has developed a draft test procedure
  addressing energy performance
• Draft procedure available on LBNL website
  comments welcome

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Test procedure considerations

• Available total pressure
• Air flow
• Quantity/Variable flow
• Uniformity
• Sensible cooling (if provided)
• Total power consumption
• Noise and vibration levels
• Filter area
• Size of FFU (2 x 4, 4 x 4, etc.)

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Test arrangements

• Similar to testing large fans

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Establishing a baseline

• PGE is sponsoring a test of the test procedure
  at their test facility
• CA Energy Commission Public Interest Energy
  Research (PIER) is sponsoring testing to
  establish baseline
• If you can loan units for testing let us know

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Expected outcomes

• An IEST recommended practice will be issued
• CA public utilities will establish baseline and
  include in incentive programs
• Owners and designers will have a standard way to
  compare performance
• Owners can evaluate first cost vs operating cost
• Improvement in performance will follow

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Energy-efficient Fan-filter Units

• Design Considerations
• Contour of inlet
• airflow path
• Baffles to direct flow and deaden sound
• Motor efficiency AC or DC
• Fan efficiency
• Clearances
• Filter media
• Depth of box
• Filter area
• Controls
• More efficient units have considered all of this

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Questions?
Thank you!
http//hightech.lbl.gov