Cleanroom Energy Benchmarking Results

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LBNLs high-tech buildings initiative a wide
breadth of activities
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Energy intensive high-tech buildings
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Cleanrooms The Opportunity

• Up to 100x more energy-intensive than typical
  buildings (Class-1 cleanroom can be up to 600
  ac-h)
• Promising Measures
• Govern ventilation by performance rather than
  rules of thumb
• Improved process load projection
• More efficient HVAC
• Low-pressure-drop design

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Current cleanroom activities

• Benchmarking and Best Practices
• Fan-filter unit test procedure
• Demand-controlled filtration
• Minienvironments

Cleanroom Measured Electricity End-use
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We see a wide range of efficiencies For example
cleanroom recirculation systems
Choice of air delivery strategy strongly
influences energy intensity
Avg Pressurized Plenum
Ducted FFU
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Wide range of efficiencies For example make-up
air systems
Choices in the design of air systems strongly
influences energy intensity
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Wide range of efficiencies For example
fan-filter units

• Efficiencies vary by a factor-of-four
• Need for test standards

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Working with benchmark results

• Benchmarking Best Practices
• Wide variation in performance
• Benchmarking results being reviewed to identify
  best practices
• Efficiency opportunity was found at each
  benchmarking site (see case study reports)

Chiller performance ranged from 0.5 to 5 kW/ton
over range of 5 to 50 tons
Air-change rates suggest possible reduction
without compromising process)
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Laboratories the opportunity

• Labs are up to 5x as energy-intensive as typical
  buildings fume hoods use gt3x as much energy as
  typical home
• Promising Measures
• Low-pressure-drop design
• Ventilation and hood flows governed by
  performance rather than rules of thumb

Berkeley Hood installed at UCSF
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Laboratories - current LBNL activities

• Benchmarking and Best Practices
• Laboratories for the 21st Century
• High-Performance Fume Hood
• Working towards CAL/OSHA acceptance
• Side-by-side testing including non-standard
  dynamic tests
• Demonstrations in three industrial settings

LBNLs Geoffrey Bell performing dynamic
side-by-side tests comparing 6-foot Berkeley Hood
with a standard hood.
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What are the big opportunities?

• Right sizing systems
• Low pressure drop systems
• Low face velocity in air handlers
• Low pressure drop filters
• Large duct/plennum
• Air change rates
• Lower airflow in fume hoods
• Variable speed chillers
• Minimize or eliminate reheat
• Free cooling for process loads
• Energy efficient Uninterruptable Power Supplies
• Recirculation air setback

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LBNL high-tech buildings website

• http//hightech.lbl.gov