What is MEMS Technology

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What is MEMS Technology?
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What is MEMS ?

• Micro Electro Mechanical Systems
• micro scale dimensions (1mm 1000 microns)
• electrical and mechanical features
• systems (features combined to perform a function)
• MEMS fabrication techniques
• Originally used IC (computer chip) fabrication
  techniques and materials
• More MEMS-specific fabrication techniques and
  materials are now in use
• MEMS is an enabling technology
• Smaller device size
• Batch processing for low cost,uniform production
• Distributed device placement
• More precise sensing

4000 die per 6 inch wafer
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Why is MEMS useful?

• Sensors and Actuators -two classes of MEMS
• Sensors - measure the environment
• SMALL gt interfere less with the environment it
  is measuring
• SMALL gt redundancy, batch fabricated,
• Actuators - perform work on the environment
• SMALL gt small motion but very precise
• SMALL gt can be placed in small spaces

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How are MEMS made?

• Bulk Micromachining - subtractive process (3-D)
• Create device by etching material out of a wafer
• Distinct processes and materials from IC
  fabrication
• Flexible for design of diverse device features
  sizes
• Advantageous for high precision sensors/actuators

• Surface Micromachining - additive process (2-D)
• Create device by adding materials on top of a
  wafer
• Easily mixed with IC fabrication techniques
• Limited to film thickness less than 4 microns
• (human hair 50-75 microns, IC gate 0.15
  microns)
• Typically used for high volume, low precision,
  low cost devices