Active MEMS for Wireless and Optical Space Communications

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Active MEMS for Wireless and Optical Space
Communications
NASA SpaceCommunications Symposium

• Principal Investigators Frank Merat, Stephen
  Phillips
• Task Number NAG3-2578
• Case Western Reserve University
• September 18, 2002

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Active MEMS for Communications

• Project Overview

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Active MEMS for Communications

• Enterprise Relevance and Impact

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Active MEMS for Communications

• Milestones - Technical Accomplishments and
  Schedules

Due Date Milestone Description Tech Accomplishments
1 April 2002 Characterize MultiPoly for mirror design 1mm radius of curvature achieveable
1 April 2002 Schedule Status Schedule Deviation
1 April 2002 Completed none
Film Stress (MPa)
615 C
570 C
Film Thickness (µm, from SiO2 interface)
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Active MEMS for Communications

• Milestones - Technical Accomplishments and
  Schedules

Due Date Milestone Description Tech Accomplishments
2 June 2002 Verify MultiPoly fabrication for device fabrication Multilayers with prescribed curvatures demonstrated
2 June 2002 Schedule Status Schedule Deviation
2 June 2002 Completed none
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Active MEMS for Communications

• Milestones - Technical Accomplishments and
  Schedules

Due Date Milestone Description Tech Accomplishments
3 September 2002 Develop deposition and etch processes for doped Multipoly Wafers processed, Verification in progress
3 September 2002 Schedule Status Schedule Deviation
3 September 2002 In progress Near schedule
Due Date Milestone Description Tech Accomplishments
4 December 2002 Verify actuated devices with electrodes and doped structures Devices in process
4 December 2002 Schedule Status Schedule Deviation
4 December 2002 In progress none
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Active MEMS for Communications

• Risks

Risk Impact Resolution Plan
1 Poor doped device etching Delays schedule Delays demonstration Modify etch process. Process new wafers
2 Unexpected doped device curvature Delays schedule Delays demonstration Modify device design Process new wafers
3 Doped devices do not actuate Delays demonstration Isolate failure source Redesign devices/processes Process new wafers
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Active MEMS for Communications

• Funding Issues

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Active MEMS for Communications

• Future Plans

Event Goals
1 Doped device verification Successful release of devices Achieve desired curvature
2 Active device demonstration Electrical actuation demonstration Achieve desired steering angles
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Active MEMS for Communications

• Papers and Awards