Roadshow presentation

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An integrated modular service for
microfluidicsand mixed technologies
microBUILDER

• Roadshow presentation
• Chapter 1 Introduction

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microBUILDER is ...

• A collaboration of 9 European companies, RD
  institutes and universities on microsystem
  foundry services, focusing on microfluidic
  applications
• Part of the EUROPRACTICE network
• www.europractice.com
• Supported by the European Union within the
  Information Society Technology (IST) thematic
  priority of the 6th Framework program
• Providing a complete service package for the
  development and production of new products
• based on mixed technologies
• with a focus on microfluidics applications

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The Mission

• Increase the commercial success and
  competitiveness of European industry
• Simple and cost-efficient access to mixed
  technology development and manufacturing through
• Design engineering services
• Prototyping and manufacturing services
• Specific CoventorWare software modules
• Training
• Demonstration of technological capabilities by
  sample devices
• SME User club
• Advises the microBUILDER partners
• First-hand access to information
• Open for interested SMEs

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Mixed Technology

• Combination and interaction of different
  technologies and competences
• Moulding of plastics
• Silicon and glass micromachining
• Packaging andsystem integration
• Actuators
• Electronics
• Surface functionalisationand modification
• All technologies and competences are available
  within the microBUILDER network

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Microfluidics

• Handling of small amounts of liquids and gases
• Key enabling technology for different application
  areas
• Diagnostics and analytics
• Drug discovery
• Drug delivery
• Medical devices
• Fuel cells
• Process control
• Machinery and automation
• Microfluidic devices and systems
• Lab-on-chip
• Valves and pumps
• Flow and gas sensors
• Chemical micro-reactors

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The Offer

• Complete service package from the first idea to a
  final product
• Design and engineering services
• Silicon prototyping and series production
• Prototyping and series production of polymer
  parts
• CoventorWare software modules
• Training and education
• Technologies and processes are documented in a
  design handbook
• Easy access to services through one single
  customer interface

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Design Engineering Services

• Custom-tailored development services
• Feasibility and concept studies
• Proof of principle investigations
• Design, modelling and simulation
• Prototyping
• Test and characterisation
• Based on a portfolio of validated methods,
  processes and technologies
• Design Handbook
• Specifications of the available technologies and
  processes
• Design rules
• Examples of validated designs
• Enables experienced users to design their own
  device

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CoventorWare Process Access Kits

• Library of microBuilder specific process
  emulation files
• Specific material property databases
• Library of parametric elements for system-level
  and component design
• Layout template file incl. DRC

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MPW Services atInfineon Technologies SensoNor

• Bulk micromachining of Si and glass
• Minimum feature size 2 µm
• High-volume approach to production
• High-precision membrane definition by etch stop
  against pn-junctions
• High aspect ratio RIE

• High stability piezoresistors for sensing
  elements
• Triple-stack Glass/Si/Glass anodically bonded
• Hermetically sealed cavities with electrical
  feed-throughs
• Thermal excitation / Piezoresistive detection

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MPW and manufacturing services atTRONICS
Microsystems

• Industrialization and manufacturing of Si/Glass
  products
• Advancing concepts into reliable products
• Building supply chains for custom products
• Prototyping on MPW and semi-custom runs
• SOI-HARM (High Aspect Ratio Micromachining)
• Si-DRIE/Glass under development

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Polymer technology
Full service From design and construction to
mass production

• Microfludic design Service
• Check for mass production

• Ultra precision milling
• Quick prototyping

• Small volume production
• Mass production by high precision moulding

• Advanced quality service

• Add on processes, e.g. hydrophilic
  coating
• Micro assembly

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Microfluidic Construction Kit
The idea modular concept as an intermediate step
on the way to integrated systems
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Microfluidic Construction Kit

• The product
• Assembly platform and microfluidic connectors
• Library of standard slidespumps, mixers,
  splitters
• Customer specific microfluidic slides by high
  precision moulding

• Application field examples
• Fuel cells
• Environmental monitoring
• Biological assay development
• Pharmaceutical formulation
• Drug synthesis on demand

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Add-on processes bioactive layers

• Functional surfaces for attachment of
• proteins (antibodies)
• single strandedoligo-nucleotides
• glucose molecules
• Au or NiCr/Au films on silicon
• Commercial or customers own biochemistry
• To be combined with lab-on-chip systems

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Add-on processes hydrophobic surfaces

• Functional surfaces for inhibiting fluids or for
  driving fluids through designated areas
• Teflon (C4F8) or SiO2 on silicon as hydrophobic
  and hydrophilic surfaces
• Attractive for making valves and for metering
  (hydrophobic) and for pumps (hydrophilic)
• To be combined with lab-on-chip systems

Hydrophobic surface
Hydrophobic surface utilized to inhibit fluid
flow in a channel
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Add-on processes optimizing lab-on-chip systems

• Au films or piezoresistors for local heating
• On-chip temperature measurements
• Sample separation, enrichment and cleaning by
  electric fields (using e.g. Au thin film
  electrodes)
• Avoid inhibition of biochemistry reactions by
  means of surface coatings

Infineon SensoNor process
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Add-on processes piezoelectric thin films

• Functional surfaces for resonating elements
  (cantilevers or diaphragms) or for pumps and
  actuators
• Attractive for chemical and biochemical sensors
• Piezorelectric film (PZT) on silicon
• To be used as stand-aloneor to be combined
  withlab-on-chip systems

Prototype acoustic gas sensor in a ceramic
package
Frequency characteristics of the prototype
acoustic gas sensor in CO2 at room temperature
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Training

• Short courses 1 to 2 days introduction to the
  microBUILDER foundry processes
• 2-4 days hands-on training courses Design
  training for the microBUILDER foundry processes
  using state-of-the-art design tools like
  CoventorWare
• Web-based distant learning with animation
  presentation
• Master level university course with MEMS and
  microfluidics basics, introduction to
  microBUILDER foundry processes and hands-on
  design with design tools

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Application Areas

• Life sciences research
• Medical diagnostics and analysis
• Drug discovery
• Drug delivery
• Environmental monitoring
• Process control e.g. oil industry and food
  industry
• Food analysis
• Security devices e.g. detection of explosives
• Energy technology including fuel cells

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microBUILDER partners