Physics 358 Nanolithography

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Physics 358 Nanolithography
Instructor Venkat Chandrasekhar Meets
Tuesday, Thursday 930-1100 Classroom L170
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Course Description
Fabrication of devices using electron-beam
lithography The topics that we will cover in the
course are Overview of lithography Principles
and operation of SEM Techniques of
electron beam lithography Pattern design using
pattern generation program Exposure and
development of patterns Development of
resist Vacuum deposition techniques Scanning
probe microscopy
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Logistics
Primary communication and tools on
Blackboard All instruction and user
manuals Lectures Any topical information Requir
ements Keys to lab located in Tech FB10,
obtained from Physics Department office with
20 deposit Laboratory notebook (Mead quad ruled
or equiv) Set of tweezers, can be purchased at
cost from Physics Department
academic offices (Grant Darktower)
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Logistics, continued
Byron Watkins is the lab assistant for the
course Contact information
Room Tech F137
Tel 7-3848 Email bw_at_northwestern.edu
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Laboratory
Located in Tech FB10 Access is via keys
obtainable from Physics Dept offices
Contains Scanning electron microscope, atomic
force microscope, PMMA spinner, fume hood
for wet processing, thermal evaporator for
evaporation of metals SAFETY IS THE PRIMARY
CONCERN You must have a partner in with you
in the lab at all times !!! For the first 3
weeks, instruments are accessible only when
Byron Watkins is present
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Laboratory Protocol
Time on primary instruments can be reserved
on-line using Google Calendar username
phys_358_at_yahoo.com password
ebeamlith Reserve by putting down 2 names for
each instrument Start with 2 hour time
slots....will work out exact times

later SEM, AFM and thermal evaporator each have
log books USE THEM Note down name of
users, time in, time out, and any relevant
information for the instrument (e.g., acceleratin
g voltage, base pressure, etc.)
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Laboratory Protocol
Personal lab notebooks My main source for
evaluation of your performance is your lab
notebook, which I will look at frequently. Please
note down everything in your notebook, mostly in
real time. Date, time, procedures, parameters,
problems, thoughts, ideas, etc. Lab notebook
should be legible and comprehensible
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Lab notebooks
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Lab equipment
Hitachi 570 scanning electron microscope Topometr
ix Explorer Scanning Probe microscope 200x
Computerized optical microscope Laurell Spin
Coater Thermal Evaporator Electron beam design
software available on Blackboard
(electrond.exe) Should run on any Windows
computer, or on Linux under Wine