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Dimensional metrology as enabling technology for
long-term fundamental research
Triggers Targets Experimental
realisation Metrologicalapplication
ofbasic science technology Enablingscienc
e technology
Research into fundamental constants, basic
physics and future space science missions are
critically dependent on dimensional metrology at
levels of accuracy far exceeding those available

kg _at_ 110-8
kB _at_ 10-7
kg _at_ 110-9
Enabling new definition of kg _at_ 210-8 level
based on fundamental constants
Enabling progress of research into further
fundamental constants and basic physics e.g. G,
h/m, (ST)EP
Enabling space metrology and positioning
capabilities _at_ 10-15
Enabling new determination of kB _at_ 10-6
Ultra stable materials and position metrology in
cryogenic environments
Ultra stable structures for nano processing
Specimen adapted interferometerPrecision
velocity interferometer
Improved instrumentation for dimensional
measurements
3D metrology on artefacts - pressure
piston/cylinder area ur lt 10 nm - sphere
resonator lt 1 ppm- diaphragm area U lt 10-5
length interferometry at the pm level
Micro/Nano thruster positioning capability
Nano radian angle metrology
Surface effects
Extended range (gt 100 mm) high accuracy µCMM
Prismatic ultra-stable reference artefacts
Dilatometry stability _at_ lt10-10 level
Surface layer characterization
High speed simultaneous fringe fractioning
counting on multi-l
X-ray opt. interferometry _at_ 310-9
Precision dilatometry stability measurements_at_
lt10-9 level
Higher power, reduced waveband fs comb technology
Existing procedures, instruments and light
sources for precision interferometry
long-range metrology.
New ultra stable materials
Improved temperature metrology
2005 2010 2015 2020
2
Dimensional metrology for advanced manufacturing
technologies
Triggers Targets Experimental realisation
Metrologicalapplication ofbasic science
technology Enablingscience technology
Cost effective sustainable manufacturing of
innovative products with structures down to 10 µm
and up to 10 m, facing requirements of increased
complexity, normative requirements, higher
measuring speed and reduced tolerances

Dimensional metrology lt 10 m
in measuring room (U lt 10-7)
in production environment (U
lt 10-6)
Short range dimensional metrology 0.01 mm lt Llt 10
mm
U lt 0.005 µm
U lt 0.05 µm
U lt 0.01 µm
Measuring instruments in labs for complex and
freeform geometries
Measuring instruments for 10 m-range under
industrial conditions
Measuring instruments for short range under
industrial conditions
Multi-parametric results from high resolution
point clouds
Automatic uncertainty evaluation (virtual
instruments)
Advanced traceability methods for in-process
metrology
Artefacts for small objects or those with
non-cooperative surfaces
Numerical artefacts software datasets
Research facilities for metrology in
non-laboratory environment
Probe-surface interaction including soft surfaces
Influences of environment (refractive index,
temperature, vibrations, dust,)
3D-Segmentation and evaluation of large data
files
Fast and precise positioning (mechatronics, PZT
motors,stick slip, DC, advanced servo controls
Next generation of sensors and measuring
instrumentation (Computer Tomography ,
indoor-GPS, Laser tracker, Laser interferometer,
incremental scales, rangefinders/ADMS)
Existing procedures, sensor principles, ...
New materials, advanced computers and IT, ...
2005 2010 2015 2020
3
Long range dimensional metrology
Triggers Targets Experimental
realisation Metrologicalapplication
ofbasic science technology Enablingscien
ce technology
Research into large scale production, global
monitoring and waste management depend critically
on dimensional parameters being measured or
controlled to levels of accuracy that are
currently unachievable over longer ranges (L gt
10 m up to several km)

10-7 3D accuracy in large scale production
Traceable verification of global mapping systems
at 10-6
10-7 1D accuracy over long range in air
10-8 1D accuracy over long range in air
10-6 3D accuracy inlarge scale production
Long range calibrated terrestrial baselines
Long range free air refractometer
Precision 3D measuring instruments and sensors up
to 100 m range
Advanced 3D measuring instruments up to 100 m
Advanced refractometer
Large scale coordinate metrology test
comparison facility
High speed simultaneous fringe fractioning and
counting on multi wavelengths
Precision total stations with up to 1 km range
Refractive index metrology over extended ranges
Multi-wavelength ADM/ refractometry
Multi-wavelength interferometry
Metrological class precision laser trackers
Existing metrology for long range 1D/2D Laser
trackers, ADM, total stations, µGPS, ..
New light sources, e.g.Higher power, reduced
waveband fs comb technology
2005 2010 2015
2020
4
Dimensional metrology for micro-nano technology
Triggers Targets Experimental
realisation Metrologicalapplication
ofbasic science technology Enablingscien
ce technology
European micro- and nano-technology is reaching
increasing levels of miniaturisation and
encountering new issues of health, production
feasibility, quality and efficiency for control
and manuf. on µm/nm-scale metrology is needed!

Traceable 2D(3D) metrology at sub-nm accuracy
over sub-mm range
Traceable 2D(3D) metrology at (sub)-nm acc. over
several 100 mm range
Nanoparticles traceable counting, size, shape
and distribution on 1 nm accuracy level
Instrumentation for multi-parametrical
characterization of new functional nano-materials
Multi probe 2D(3D) instrumentation over longer
range
Traceable instrumentation for micronano-particles
Single probe 2D(3D) instrumentation with mm range
Cross calibration of sensors
Improved new high resolution microscopy methods
Modelling of functional properties dependent on
material and dimension
Nanostructured standardsover several 100 mm
range
Nanostandards over sub-mm range
Nanoparticle standards
Probe surface interaction modelling
New sensors/probes
Correlation of local and global particle
metrology methods
2D(3D) positioning capabilities self calibration
X-ray/optical interferometry, linear encoders
Stable materials/structures design principles,
vacuum bearing technology, vacuum thermal
metrology
Nano force metrology
Existing high resolution microscopy, position
measurement, probes, data evaluation and
micro/nano-fabrication methods (top-down)
New technologies and materials (short wavelength
lasers, nanotubes, )
Improved Nano fabrication (top down bottom up)
2005 2010 2015 2020 2025