??????S ??????S ???S???????? ????????

1
??????S ??????S ???S???????? ????????

• ??????S G?O?G?S
• ????T??H ?p??. ?a???. ?. ?????????????

2
?S?????? ????????

• 1839 A.E.BEQUERELFO?????????? F???.
• 1876 ?DAMS DAY FO?????????? F???. S?? Se
• 1950 ??????? CZOCHRALSKI
• 1954 FULLER, PEARSON CHAPIN F???????? ?? ??O??
  F? S??????? Si ?? ???F? p-n ??? ?????S? 6

3
??G? G????? S???????

• ? ????S ????? ???? S???????? ??G? ????G???S
• ?? ?????? FOS ??????????? ??? 3 S???S?OS?S
• ??????S ??????S ???S????????? ???S? ???????
  ???????????

4
??????S ??????S c-Si

• ? ?????? ?????? T?????O??S ????? ??T? F? ???????S
• ??????S ??????S -gt ????S?? -gt S?S??????S

5
???????

• 90 ??G??S???S ?G???S
• ??? ????? ??????? F?
• ??? ??????G???? ???????G??
• ???T?S??? S? ??G???S ??S?????S ?? ???? ????????
• ?????? ? ????S???? ?????O? ?????O? ?????S ?????S?S

6
???????G?? ?????O? ?????O?

• ? ???????G?? ???S ??S?????? S??? ????????S? ???
  FO??????????? F????????? S???S ????GOG??S
• ?? ??S??????? ????S ???S ??????S ??????S ?????
• ? ???F? p-n

7
???F? p-n
8
???F? p-n

• ???? ????? ?S???? ??T?????? ???????-n
• ??????? ???G???OS?S ???
• ???????-p ??????F??? ?? ????SS????? FO?????
• ????S ?????S?S ???????????

9
???F? p-n

• ? FO?????G??S? ???GO? ?????????O?-??O? ???
  S????SF???? S?? FO??????? ???????? ?O?? S?
  ??????? ??G?T??S

10
???F? p-n

• ?S???? ?????S????S? S?? ???????-n S? ???S??S?
  ??G??????? ??? Lh -gt ????? ???????-n
• ??S???S? FO????O? ??G???? ?????S ??????S -gt
  ????? ??????H-p ??? ??G??? Le

11
????O?? ???F?S p-n

• S????S? ???????S ???F?S p-n ?? F????? R

12

• ?? ????? ?????????OS?S ?I??? ?SC -IPH -KI
• ??T? ????? ??????
• ?p???????S???F? ????? ????S???
• nS??????S??S ????????S

13

• ?? S??????? ????? ?????
• ?????????S???? I-V ??????S ??????S

14

15

• O ????G????S ????OS?S ff ???????? ??
• ? ?????S? n ???????? ??

16
???????-??O?? ???

• S??? ???? ??????? SiO2 ??? ????? Si ??T???????S
  98-99.
• ?????? ???????S?? 99,99999

17
??T???S CZOCHRALSKI

• ???????? ??G??O? ???????S????O? Si G?? ???S? S?
  ???????????????? ??? FO?????????? S?S??????

18
??T???S CZOCHRALSKI

• 5 cm/h
• ???????? ??S ??T???? ? ???????? ???G???? S??
  ???S????? Si

19
???? ???S????O? Si

• MULTI-WIRE SAW
• ?????? ??????? 8h G?? 10x10cm
• ??S????? ??????? ?? 30 ??? ????????

20
??T???S EFG

• ??? G??G??? 160t.e?/???
• ???? ??G?????S ??O????S
• ???O????S ???????? ?????

21
????S???? ??????S ??????S
22
????S???? ??IA??S ??????S

• ??T???S??S ???F?????S ??? ??????
• ?????S? FOSF???? G?? ?? S??????S??? ? ???F? p-n
• ????S?? ??? ??SO ??????????
• ?????T?S? ??????????S????S ?????????S

23
?????G?S?? ???F?????S

• ??????S ??T???S??S
• G?? ?? c-Si,ME KOH,?????? ?? ????? ?? ???F?
• ????S? ??????S ??????F?S?S -gt ????S? ???
  FO?????????S

24
S??????S??S ???F?S p-n

• ?????? ?? ??????? ????? ?????-p.
• ?? P S??????????? ??? ???F?
• 870 C, 15-30min -gt 0.5µm
• POCl3 O2 -gt P2O5
• ???F????? -gt Si?2 FOSF???

25
??????????

• ???O ?????????? S???TOS ??G???S
• ???O ?????????? ????? ??G?????-??G????

26
??????????S???? ?????????

• ???? ? ???? ?? ?????????? ??S ???O ???F?????S
• ??????????? (?iO2)
• ?.?.2,4 (nSi3.1 , ng1,5), ????S70nm

27
FO?????????? ????S??

• ?VA ???F???S, T???????S???? ????????S
• 150 C ???S? S? ????

28
??????S ??????S ????O? ?????O?

• WOLF LOFERSKY
• ???O?????S ?? ????S, ??????? ?? Voc ?F??
  ???O????? ?? ????? ????S???
• S??O?? Si 50 µm

29
??????S ??????S ????O? ?????O? c-Si
30
G???? 50 µm
31
??????S ??????S ????O? ?????O? c-Si

• ?????????????
• ?????????S ??S?????S Si
• ??? ???S???? ???????? F???? Si
• ??????????S G??G???????S S??????S??S ????S?O?

32
????F? ???????

• ???S? ??S?? ?g1,75 eV
• a-Si(H) -gt ???? ??????F?S? ?????? ????S????
• ???????? ???? ????? ? p-I-n
• F???????? STAEBLER-WRONSKI

33
?????S? ???a??? ???????

• ??? ????? ?????? ? ?????S? 100
• T?????O???S ??O????S
• ?????S????S?
• S???S? ??? ??????????
• ??????S??S
• ????S??S??S

34
???? ????? ?????O? ?????O?

• ?????????S a-Si/c-Si
• CdTe (TF techn.)
• S??T??? ????GOG??? Cu, In, Ga, S, Se (CIS, CGS,
  CIGS) (TF techn.)
• O?G?????S ??????S ??????S (???????O?)

35
??????? ?????

• ????G????? ??S?? ?????? 1,1 ??? 1,7 eV
• ???S? ????G????? ??S??
• ??? ?????? ?? ?????? ??????? ??S???S ????GOG???
  ???????S??
• ??????????? S??T???????
• FO?????????? F????????

36
?g ??? ?????S?
37
??????G??F??

• SOLAR ELECTRICITY, T. MARKVART
• PHYSICS OF SEMICONDUCTOR DEVICES, SZE
• ??????????? ????? ????????S, KASAP
• www.sciencedirect.com