Semiconductor Fundamentals

1
Semiconductor Fundamentals

• OUTLINE
• General material properties
• Crystal structure
• Crystallographic notation
• Read Chapter 1

2
What is a Semiconductor?

• Low resistivity gt conductor
• High resistivity gt insulator
• Intermediate resistivity gt semiconductor
• conductivity lies between that of conductors and
  insulators
• generally crystalline in structure for IC devices
• In recent years, however, non-crystalline
  semiconductors have become commercially very
  important

polycrystalline amorphous crystalline
3
Semiconductor Materials
Elemental Compound Alloy
4
From Hydrogen to Silicon
5
The Silicon Atom

• 14 electrons occupying the 1st 3 energy levels
• 1s, 2s, 2p orbitals filled by 10 electrons
• 3s, 3p orbitals filled by 4 electrons
• To minimize the overall energy, the 3s and 3p
  orbitals hybridize to form 4 tetrahedral 3sp
  orbitals
• Each has one electron and
• is capable of forming a bond
• with a neighboring atom

6
The Si Crystal

• Each Si atom has 4 nearest neighbors
• lattice constant
• 5.431Å

diamond cubic lattice
7
How Many Silicon Atoms per cm-3?

• Number of atoms in a unit cell
• 4 atoms completely inside cell
• Each of the 8 atoms on corners are shared among
  cells
• ? count as 1 atom inside cell
• Each of the 6 atoms on the faces are shared
  among 2
• cells ? count as 3 atoms inside cell
• Total number inside the cell 4 1 3 8
• Cell volume
• (.543 nm)3 1.6 x 10-22 cm3
• Density of silicon atoms
• (8 atoms) / (cell volume) 5 x 1022 atoms/cm3

8
Compound Semiconductors

• zincblende structure
• III-V compound semiconductors GaAs, GaP, GaN,
  etc.
• important for optoelectronics and high-speed ICs

9
Crystallographic Notation
Notation Interpretation
( h k l ) crystal plane
h k l equivalent planes
h k l crystal direction
lt h k l gt equivalent directions
Miller Indices
h inverse x-intercept of plane k inverse
y-intercept of plane l inverse z-intercept of
plane
(Intercept values are in multiples of the lattice
constant h, k and l are reduced to 3 integers
having the same ratio.)
10
Crystallographic Planes and Si Wafers

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Crystallographic Planes in Si
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Summary

• Crystalline Si
• 4 valence electrons per atom
• diamond lattice
• each atom has 4 nearest neighbors
• 5 x 1022 atoms/cm3
• Crystallographic notation
• Miller indices are used to designate planes and
  directions within a crystalline lattice