52300 Sensing and Actuation in Miniaturized Systems

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52300Sensing and Actuation in Miniaturized
Systems
Topics Microlens array bio-sensing system

• ProfessorCheng-Hsien  Liu
• StudentsDen-Hua Lee
• Tsu-Wei Huang

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Contents

• Introduction
• The Goal
• Discussion
• Conclusion

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Introduction

• Improved light out-coupling in organic light
  emitting diodes employing ordered microlens
  arrays. 2002
• A novel method to fabricate gapless hexagonal
  micro-lens array. 2004
• Microlens array film with full fill factor for
  enhancing outcoupling efficiency from OLED
  lighting. 2007

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Improved light out-coupling in organic light
emitting diodes employingordered microlens arrays

• S. Möller and S. R. Forrest

J. of Applied Physics, 91 p.3324-3327 (2002)
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Mold transfer process
Si mold was etched in HNO3CH3COOHHF used Si3N4
layer as a mask
PDMS microlens array fabricated from the mold
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Paper printout
Lens sheet covered
OLED with lens sheet covered
Image blurring due to the thickness
Covered area is brighter
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A novel method to fabricate gapless hexagonal
micro-lens array

• M.C. Chou, C.T. Pan, S.C. Shen, M.-F. Chen, K.L.
  Lin, and S.T. Wu

Sensors and Actuators A, 118, p298-306 (2005)
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Si
Reflow process of AZ4620 thick PR
for fabricating half-spherical column
Ni as seed layer Electroplate Ni-Co mold CMP Hot
embossing PMMA
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90
45
95
100
Different shape with different fill factor
Distribution reflowing to form gapless hexagonal
lens
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Sequence of Ni-Co electroplating process
Different gapless lens form by different
distributions
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Laser passes through hot-embossed PMMA-based
gapless hexagonal micro-lens.
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Microlens array film with full fill factor for
enhancing outcoupling efficiency from OLED
lighting

• Hyouk Kwon, Youngjoo Yee, Chi-Hwan Jeong1,
  Hyo-Jin Nam, Ki-Won Park, Gun-Woo Lee, and
  Jong-Uk Bu

uTAS proceeding, 2EK5P, p1091-1094 (2007)
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Micro Lens Array provide brightness
increasing Higher fill factor, higher efficiency
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Trench structure keep lens shape closing to
half-spherical
Conformal coating process decrease the height of
lens
Outcoupling efficiency according to the sag ratio
Applying trench to keep higher sag height
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MLA is made by UV stamping on transparent PET film
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31.3 improvement
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OLED with MLA looked brighter