Impurity flux and sputtering

1
Impurity flux and sputtering
Sputtering
Flux (part./s/m2)
Shot
hydrogen
oxygen
carbon
titanium
oxygen
carbon
titanium
1.92E19
16912
3.06E18
1.91E18
15.9
9.9
16919
6.07E17
4.09E17
1.39E17
3.7
2.5
0.85
16928
1.12E18
1.18E18
5.7
6.0
16928_M
2.63E18
3.32E18
3.8
4.7
16928_M
5.66E18
3.89E18
12.0
8.3
16934
9.90E17
1.23E18
5.0
6.2
16934_M
5.73E18
5.13E18
7.5
6.8
16935
3.30E17
2.79E17
1.93E17
1.7
1.4
0.97
2
Impurity flux and sputtering
Sputtering
Flux (part./s/m2)
Shot
hydrogen
oxygen
carbon
titanium
O
C
Ti
16912
1.92E19
3.06E18
1.91E18
15.9
9.9
16919
1.63E19
6.07E17
4.09E17
4.23E17
3.7
2.5
2.6
16928
1.97E19
1.12E18
1.18E18
5.7
6.0
16928_M
7.00E19
2.63E18
3.32E18
3.8
4.7
16928_M
4.70E19
5.66E18
3.89E18
12.0
8.3
16934
2.00E19
9.90E17
1.23E18
5.0
6.2
16934_M
7.60E19
5.73E18
5.13E18
7.5
6.8
16935
2.00E19
3.30E17
2.79E17
4.67E17
1.7
1.4
2.3
3
Titanium flux

• Spectral lines
• 4533.24 A y3Do - a3F (ground)
• 3958.21 A y5Fo - a5F (metastable)
• For Te30 eV and
• ne5 1018 part./m3
• (S/XB)45331.65
• (S/XB)395813

4
S/XB Titanium

5
Titanium flux
6
Plot of Impurity Flux
7
Plot of Impurity Flux
8
Plot of Impurity Sputtering