O ?1??? ?????, ?2??? ????? ,

1
????? ?? ?????
????? ?? ?????
? ? ?
2
3. ????? ?? ????? ????? ? ? ?? ???
?? O ?1??? ?????, ?2??? ????? , ?3?? ????? O
1980??? ??? ?????(SPMScanning Probe
Microscope)(1) O ?????? ??? STM(Scanning
Tunneling Microscope)(2) ?? ?? ??? ??????
AFM(Atomic Force Microscope)(3) (1) For
comprehensive reference see "Scanning
probemicroscopy and spectroscopy" by R.
Wiesendanger. Cambridge University Press.
1994. (2) G. Binning. H. Rohrer. Ch. Gerber. and
E. Weibel. "Surface studies by scanning tunneling
microscopy." Phys. Rev. Lett.. Vol. 49. p.57.
1982 (3) G. Bining. C. F. Quate. and Ch. Gerber.
"Atomic force microscope." Phys. Rev. Lett. Vol.
56. p.930. 1986.
3

• ?????? ??
• STM(Scanning Tunneling Microscope) ?????? ??

4

• ?? ?? ???? ?? ? ??? ??
• ? ??? ?? ??.
• 2. ??? ??? ???? ?? ????? ?? ???? ??
• 3. ??? ???? ?? ??? ?? ? ? ? ??? ??(0.5nm)?? ???
  ??
• 4. ???? ??? ??? ???? ??? ????? ?? ??? ??? ???
  ????? ???(Tunneling) ??? ????
• 5. STM? ??? ??? ????? ???? ???(scanner)? ?? ??,
  ??, ??? ?????, ? ????? 0.01nm ??? ???
• 6. ??? ?? ??? ??? ??? ?? ???
• ??? ??? ??
• 7. ??, ??? ??(??)? ?? ??? ?? ??
• ?? ????? ???? ??.

5
8. ? ???? ??? ??? ???? ?? ?? 9. ??? ??? ????
??? ??? ???? ?? 10. ??? ???? ??? ? ??, ? ???
???, ???, ??? ? ?? ????? ?? ? ??.
6

• 2. AFM(Atomic Force
  Microscope)
• AFM?? ??? ????????? ??? ????(Cantilever)
• (4?? ??? ?? ??? ??.
• 2. ????? ??? 100?, ??1??? ??? ?? ???? ???? ??
  ???.(??3)

7
3. ??? ?? ??? ?????, ?? ?? ??? ????? ?? ???
??? ??? ?? ??????(??) ??? ?(??)? ????.
(??4)
8
4. ????? ???? ?? ?? ???? ??? ??? ??? ????? ???
???? ???? ??? ??? ??? ??????(Photodiode)?
???? ????. 5. ?? ?? 0.01nm ??? ???? ???? ???
?? 6. ?? ?? ???? ???? ????(feedback)?? AFM?
????? ???? ??? ?? 7. ??? ??? ??? ?? ????? ?? ? ?
??. Non-contact mode? AFM??? ????? ??? ????? ?
?? ??? 0.1-0.01nNwjd?? ??? ???? ?? contact mode?
?? ?? ?? ???? ?? ???? ??? ????? ??
9
(No Transcript)
10
3. EFM(Electrostatic Force
Microscope) 1. ?? AFM? ??? ?? ??? ???(dcac)
? ???? ??? ??? ?? 2. ?? ????(surface chang)
(5), ????(6), ??? ???(chemical potential) ,
??? ??? ??, ????(trapped charge)?? ??. 3.
PSPD(Position sensitive Photo detector)? A-B
signal? input?? lock-in technique? ???? ???
??? ???. (5) Y. Martin. D. W. Abraham. and H. K.
Wickramasinghe. "High-resolution capacitance
measurement and potentiometry by force
microscopy." Appl. Phys. Lett.. Vol. 52. p. 1103.
1988. (6) J. W. Hong. G. H Noh. Sang-il Park. S.
-1. Kwun. and Z. G. Khim. "Surface charge density
and evolution of domain structure in triglycine
sulfate determined by electrostatic-force
microscopy." Phys. Rev. B. Vol. 58. p. 5078. 1998
11

12
4. EFM? ??? (?? 7)
? ???? sensing part? tip-cantilever ??? PSPD?
???? ?? AFM? ????. Tip? Sample ???? DCAC? mixing
bias? ????. PSPD?? ??? A B ??? cantilever? static
deflection ??? ????? harmonical vibration(1m,
2m1, ) piezoelectric oscillator? ?? ??? low-pass
filter? ?? topography feedback? ????.
13
EFM Family1. 1.
?????? ???? Scanning Keivin Probe
Microscope(SKPM), Scanning
Potentiometry(SP), Scanning Kevin probe
force Microscope(SKM), Scanning Maxwell
stress Microscope(SMM) 2. Modulation????
Amplitude Modulation(AM), Frequency
Modulation(FM)? ??? 3. Free oscillation ???? ??
??? ???? ??? ? ??? ??? ???? ??? ??? ??? ??? ?????
?? ?? AM, FM?? ??? 4. ?? ??? EFM? Dynamic Contact
EFM(DCEFM)? Scanning Piezo-Response
Microscope(SPRM)??? ?? 5. ????? ?? ???
piezo-response? ?? ??? ?? ??
14
EFM? ??? ?? 1. ?????? ??8? ??? ???? ?? ???
EFM????? 3D? ??? ???. ?? ????? ? ??? ??? ?? ??
???? ??? ??? ??? ??. ?? ?? ?? ?? ??? DC ??? ???
????(10V, 10V) ???? ?? ??? ?? ??? ?? ?? NC-EFM?
??? ? ???.
15
??8? A-B??? ?? ??????. (?? 9)
16
2. ???? ?? ??? ????(Scanning Potentiometry)?
Lock-in? W?? ??? sample?? tip? ???(feedback)??
???? ??? ?? ????? ??(nulling)???. ?? ??? ??? ???
??? ????? ????? ? ? ??. ??? U??? ??? ??? ???
5V? ??? rf? U??? ??? ?? ??? ohmic?? ???? ?? ????
??? 3D ???? ???? ??. (??10)
17
3. ??? ??? ?? ?? ?? ?? EFM tip? sample? ??? ??
????? (capacitance system)? ?????. (?? 11)
??-???-???(MOS)??? ???????? ??(Gate)? ?? ?? ???
???? DC??? ?? ??? ??? depletion layer? ??? ? ??.
? ?? ??? ??? ????? ???? ? ?? ?????? ?? ???
????(Cm)? ? ?? ????(C4)? ???? ? ??? ??. ??? ???
?? EFM tip-???-???-??? ???? ????
18
?? 12? NC-EFM? ???? topography? capacitance
image? ?? ??? ???. ??? p-type sillicon safer?
As ? n-type high doping? ? ???. ??? ??
?(patterned line)??? ??? doped region? ???.
19
4. EFM? ????? ?? 1. ???? ??
???? ?? ???(polarization field)? ????? ??? ??.
??? ???? ??? ??? ??? ??(dipole)?? ??? ??????
????? ??? ????? ?? ???? ???? ??? ?? ? ???
poling? ???? ??(domain)? DC-EFM?? scang? ? ???
???? ??? ????? ? ???. (?? 13)
20
? TGS ???? ?? ??
TGS(triglicine sulfate)? ???? ???? ?? ?? ? ????
?? ?? ?? ????(49?)? ??? ? ???(pyroelectric
sensor)?? ?? ???? ????. ????? ???? ????
????(spontaneous polarization)? ??? ?? ???? ?? ?
??? ?? ?? ??(switching) ????? DC-EFMm? ???? ? ?
??? ???? ??? ?? ??? ??? ??.
21
?? ??? TGS ???? b-axis ???? topography? domain
image? EFM?? ?? ???. EFM?? ????? ??? ? ? ?? ?
??? ??? domain?? switching?? ???? ??? writing??
control ? ?? ??. ??? TGS ???? ??? switching ?
????. (?? 14)
22
?? ??? -10V, ???? 10V? DC ??? ??? tip? ???? ????
scan? ? 0V DC?? domain imaging? ? ???. (?? 15)
23
? ???? ????? ?? TGS??
?? ??? ? ???? ???? AFM? ???? ??? ??? ? ? ?? ???
??. ??? ??? 100nm ??? ???? ??(film)? ???? ?? ???
dynamic? ??? ? ?? ??? tool? AFM??? ??. Grain
boundary? trapped charges? ?? domain? switching?
??? ? ? ?? ???? ?? ???? ??? ?? ???? ??? ???? ??
????. ??? ???? ???? ??? ????? ???(FRAM)??? ???
???? ??? AFM(EFM)? ??? ??? ?????? ?? ?? ??.
24
??? ???? ???? ??? PZT ??? ?? EFM?? domain
contrast? ??? ????. (?? 16)
??? ?? grain image?? ???? ??? ??? domain(??)?
????.
25
EFM?? DC??? ?? ?? ???? ??? ??? switching field
point? ?? ? ?? ??. ?? a)? scan speed? 1nm/s??
50um/s?? ???? ?????? -10V? write? ? ????, b)?
0V?? 10V?? DC??? ?????? line writing? ? ????.
???? domain reversal point? 4V????. (?? 17)
26
???? ??? ?? ??? ???, ???, ??? ?? ??
MFM(Magnetic Force Microscope)(7), LFM(Lateral
Force Microscope)(8), FMM(Force Modulation
Microscope), PFM(Pulsed Force Microscope(9).
EC-SPM(Electro chemistry Scanning Probe
Microscope). NSOM(Near Field Scanning Optical
Microscopes)(10) ?? ??? ?? ?? SThM(Scanning
Thermal Microsope)(11)
27
(7) D. Rugar. H. J. Mamin. P. Guethner. S. E.
Lambert. J. E. Stern. I. McFadyen. and T. Yogi.
"Magnetic force microscopy General principles
and application to longitudinal recording media."
J. Appl. Phys. Vol. 68. p.1169. 1990. (8) G.
Meyer and N. M. Amer. "Simultaneous measurement
of lateral and normal forces with
anoptical-beam-deflection atomic force
microscope." Appl. Phys. Lett. Vol. 57.
p.2089.1990 (9) http//www.witec.de/pfm.html/ (1
0) E. Betzig. M. Isaacson. and A. Lewis.
"Collection mode near-field scanning optical
microscopy." Appl. Phys. Lett. Vol. 51. p.2088.
1987. (11) C. C. Williams and H. K.
Wickcramasinghe. "Scanning thermal profiler."
Appl. Phys. Lett. Vol. 49. p.1587. 1986
28
???? (1) For comprehensive reference see
"Scanning probemicroscopy and spectroscopy" by R.
Wiesendanger. Cambridge University Press.
1994. (2) G. Binning. H. Rohrer. Ch. Gerber. and
E. Weibel. "Surface studies by scanning tunneling
microscopy." Phys. Rev. Lett.. Vol. 49. p.57.
1982 (3) G. Bining. C. F. Quate. and Ch. Gerber.
"Atomic force microscope." Phys. Rev. Lett. Vol.
56. p.930. 1986. (4) P. Maivald. H. J. Butt. S.
A. C. Gould. C. B. Prater. B. Drake. J. A.
Gurley. V. B. Elings. and P. K. Hansma.
Nanotechnology. Vol 2. p.103. 1991. (5) Y.
Martin. D. W. Abraham. and H. K. Wickramasinghe.
"High-resolution capacitance measurement and
potentiometry by force microscopy." Appl. Phys.
Lett.. Vol. 52. p. 1103. 1988.
29
(6) J. W. Hong. G. H Noh. Sang-il Park. S. -1.
Kwun. and Z. G. Khim. "Surface charge density and
evolution of domain structure in triglycine
sulfate determined by electrostatic-force
microscopy." Phys. Rev. B. Vol. 58. p. 5078.
1998 (7) D. Rugar. H. J. Mamin. P. Guethner. S.
E. Lambert. J. E. Stern. I. McFadyen. and T.
Yogi. "Magnetic force microscopy General
principles and application to longitudinal
recording media." J. Appl. Phys. Vol. 68. p.1169.
1990. (8) G. Meyer and N. M. Amer. "Simultaneous
measurement of lateral and normal forces with
anoptical-beam-deflection atomic force
microscope." Appl. Phys. Lett. Vol. 57.
p.2089.1990 (9) http//www.witec.de/pfm.html/ (10)
E. Betzig. M. Isaacson. and A. Lewis.
"Collection mode near-field scanning optical
microscopy." Appl. Phys. Lett. Vol. 51. p.2088.
1987. (11) C. C. Williams and H. K.
Wickcramasinghe. "Scanning thermal profiler."
Appl. Phys. Lett. Vol. 49. p.1587. 1986 (12 ).
???,????? ?? ??,????,30(2002.4)