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????; ???, ???,

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... (radio frequency, RF) Rf Magnetron Sputtering Circular and Planar Magnetron sputtering Guns Electron ... (Pulse Laser ... – PowerPoint PPT presentation

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Title: ????; ???, ???,


1
2004??????(?)
???? ??? ??
???? ??? ???? ???, ???,
2
  • ????
  • ???????????????????,????????????,????????????,??
    ????????????

3
  1. ??????
  2. ?????????????
  3. ????????
  4. ?????????????????
  5. ???????
  6. ??????
  7. ????????
  8. ??????
  9. ???????
  10. ??????

4
  • ?. ??????

5
????
  • 10 ???????
  • 35 ??
  • 30 ????
  • 25 ???
  • ????????????,????????????

6
  • ? ? ? ?(Evaporation)
  • ??? (Thermal Evaporation)
  • ????? (E-Gun Evaporation)
  • ??????? (Ion-Beam Assisted Evaporation)
  • ??????? (Molecular Beam Epitaxy)
  • ?????? (Pulse Laser Deposition)

7
(No Transcript)
8
????????
9
????
10
????
11
? ? ?
12
?????????????
13
??????
14
??????
15
??????
16
?????
17
?????
???????
?????
18
???????
19
??? ????????????? (??????)
20
? ????
  • 1. Ar ??????? Ar ? Ar e-
  • 2. Ar ????????????,????????????,??????????????,???
    ????????????????

21
??(DC) ? ??(radio frequency, RF) ?????
22
Rf Magnetron Sputtering
23
Circular and Planar Magnetron sputtering Guns
24
Electron Movements on a Magnetron Target
25
MagneticField Lines
26
?????
27
Magnetron sputtering Gun
28
?????
29
????
30
  • ????????

31
??????
  • ??????????

32
???????????
33
?????????
34
?.???????? ?????????
35
?????
  • ????? Kamerlingh-Onnes

36
?????????
??
  • ?????
  • ?????
  • ????? (?????)

37
BCS ??
38
?????????
39
??????
40
??????
?????????
41
???????
????????
42
  • ????(Tc)
  • ????(Hc)
  • ??????(Jc)

????????
43
???????
44
?????
  • IBM ???
  • Muller ? Bednorz 30K

45
?????
  • ???(????)??

46
  • ???????(LaBaCuO)

47
  • ????(??YBCO)???

48
????
49
?????
  • Zero Induction

50
?????
  • Zero Resistance

51
??
52
???????
53
???????????
54
???????
  • ???????

55
??????
56
?????
  • ??????,????????????,?????????
  • ??????????????????????????
  • ???????????????????????????

57
??????
58
?????
59
  • ??????????????????,??????????,???????????????????
    ?,?????????, ?????????
  • ??????????????????????,?????????????

????????
60
?????
61
???
62
???
63
????
  • ?????
  • ??????
  • ????
  • ????
  • ?????
  • ?????
  • ????
  • ????
  • ????
  • ??
  • ?????????

64
??????(??)
65
?????????
66
?????????
67
??????
68
???????
?????????????????,??????????????,???????????,?????
?Faraday???
??????????????????????????,?????Faraday??,????????
Verdet???
69
????????,?????????   f BVl f?????????
 l??????????  VVerdet??  B????
70
?????
71
????
  • ??????
  • ???? KCL
  • ???? KVL
  • ???????

72
RC ??
?? 30 V,?? 2-1 Hz
73
RC??
74
(No Transcript)
75
RL??
76
RL??
?? 30 V,?? 60-1 Hz ( T 2?   2 seconds)
77
(No Transcript)
78
(No Transcript)
79
  • ???
  • ????????? (???)?
  • ???????????? (???, 0921202308) ?
  • ?????? (???, 0920751531)?
  • ?????????? (???, 0918466790) ?
  • ????????(???, 0917884881)?
  • ????? (???)?
  • ???????????? (???, 25417296) ?
  • ???????(???, 0911700696)?
  • MgB2??????? (???)?
  • ???????????

80
???1. ????????(???)?2. ???????? (???,
0920751531)?3. ?????(???, 0921092513)?4.
SQUID???? (???) ?5. ???????(???, 0917884881)?6.
????? (???)?7.???????(???, 0911700696) ?8.
NMR??? (???. 0921114992)?9. Nb ??????????? (???)
? 10.????????????
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