Recent Progress in Nanoimprint Technology and its Applications

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• Recent Progress in Nanoimprint Technology and its
  Applications
• Author L Jay Guo
• Presenter Octavian Florescu
• EECS Department, University of Michigan
• Journal of Physics D Applied Physics 2004

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Outline

• Motivation for NanoImprint Lithography (NIL) in
  biological applications
• NIL used in various blocks intended for
  bio-applications
• Analyte Manipulation
• Analyte Separation
• Analyte Detection
• Conclusions

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Motivation What is appealing about NIL for bio
applications?

• Cost
• Biosensors are often disposable
• Resolution
• In some cases the biosensor sensitivity depends
  on minimum feature size
• Novel structures
• Enables more/different applications than
  traditional photolithography

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Analyte Manipulation Microfluidics

• NIL enables sealed channels with predictable
  dimensions
• Cost effective

Guo L J, Cheng X and Chou C F 2004 Nano Lett. 4 69
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Analyte Separation

• Electrophoresis
• Capillary effect due to the nano pillars emulates
  a high viscosity gel

Pepin et al., Microelectronic Engineering 6162
(2002)
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Analyte Separation

• Filters
• Generated by multi-level reverse nanoimprinting

Bao L R et al., 2002 J. Vac. Sci. Technol. B 20
2881
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Analyte Separation

• Protein patterning
• NIL in conjunction with lift-off to define areas
  coated with functional protein

Falconnet et al., Nano Letters 2004
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Analyte Detection

• Electrochemical transducers
• Nano particles/ molecules between electrodes
  change conductance (i.e. redox cycling)
• Smaller inter-electrode distance can improve
  sensitivity

Vieu et al., LITHO2004, June 2004, Beck et al.,
Microelectronic Engineering 7374 (2004)
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Analyte Detection

• Cantilever
• Nanoparticles/molecules can change cantilever
  properties
• Smaller cantilevers can detect single binding
  events

Luo et al., Nanotechnology 17 (2006) 19061910
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Conclusions

• NIL is remarkably well suited for bio
  applications
• Low cost
• Versatile
• One of the main stumbling blocks for bio
  applications is separation of analytes
• NIL is a potential cost effective solution

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Thank you!