Pressure Dispense Efficiency

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Pressure Dispense Efficiency

• Damo Srinivas
• Lou Blanchard

2
Outline

• Industry drivers
• Pressure Dispense Technology v. Traditional
  Methods
• Application Example Semiconductor CMP
• Business Outlook

3
Delivery Method and Materials are Inseparable

• Advanced Materials High impact, and precious
• Delivery Methods - Must enable full potential of
  materials
• Yield
• Performance
• Cost
• Environmental

Delivery Method
Materials Technology
Containment and Delivery
Material Selection
Enables high volume mfg.
Enables Process Tech.
Two sides of the same coin
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Pressure Dispense Efficiency
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Applications for Pressure Dispense

• Flat Panel Display
• Color Filter
• Photolithography
• Liquid Crystal

• Semiconductor
• Photolithography
• CMP Slurries

• New Applications
• High Value Chemicals

• Maximum chemistry utilization
• Increased substrate throughput
• Enables tool-specific chemical formulations and
  delivery
• Lowest operating cost
• Lower capital expenditures

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Pressure Dispense
System Operation
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Extending Pressure Dispense to Copper CMP
Most Inefficient Process in Back End of Line

• Process variability induced by slurry delivery
• Fixed material concentrations resulting in
  process compromises
• Inefficient material use
• Process bottlenecks leading to lower throughput

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CMP One Size Fits All ApproachThe Problems
with Status-Quo
Inflexible Process
Constraints
1
2
3
4
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Turns plumbing variability
Fab Sub Fab
Line length variability
Backpressure Control Valve
Head pressure variability
Mixer
Remote Instrumentation
Distribution Tank
Global Loop
Supply Vessel
Distribution Pump
Process Variability
Fixed concentrations Process knobs are
constrained
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CMPlicity TM Integrated Solution to CMP
CMPlicity
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CMPlicity TM Integrated Approach
Optimized Process Enabled
Superior Process Control
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Operational Process Efficiency
Capital Investment 54.6M Bulk Chemical
Delivery System Investment 4.1M
Conventional Approach
Capital Equipment Investment 37.8M CMPlicity
Delivery System Investment 2.7M
CMPlicity Approach
Calculations based on a fab running 30K wspm
Customer Capital Savings 19M
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CMPlicity TM - Benefits Summary
Superior Process Control

• Modular design with precise flow control -
  Superior process control and tool to tool
  matching
• Ability to deliver super concentrated slurries -
  Low slurry usage/wafer
• Slurry composition flexibility within process
  step - Higher throughput enabled, leading to
  significantly lower capital investment

19M Savings
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CMP - Market Potential for ATMI
CMPlicity TAM
529M TAM Opportunity in 2011
20 market share is gt 100M revenue opportunity
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QA
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ATMI, the ATMI logo, AccuDose, AutoClean, Better
Process. Delivered., Cerulean, EPM, ErgoNOW,
GasGauge, IDEAL Clean, LOK cap, NOWPak, NOWTrak,
PDMPak, ProAct, the ProAct logo, ProE-Vap,
RegenSi, SAGE, The Source of Process Efficiency,
TiTaN Kleen, UniChem and VAC are trademarks or
registered trademarks of Advanced Technology
Materials, Inc. in the United States, other
countries or both. SDS is a trademark or
registered trademark of Advanced Technology
Materials, Inc. and Matheson Gas Products, Inc.
in the United States, other countries or both.
Other company, product, or service names may be
trademarks or service marks of others.