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Specialty Valves

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4. New products being designed and developed. ASAHI ORGANIC CHEMICALS ... Immersion time(day) Elongation. Change of weight *This data is one of test result. ... – PowerPoint PPT presentation

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Title: Specialty Valves


1
Specialty Valves for Semiconductor Equipment
SV series
2
Agenda
1. Typical CMP Chemical Mixtures 2. Introduction
Of our Specialty Valves 3. Technical data
Performance data 4. New products being designed
and developed
3
Dielectric BPSG,SiO2,lowk etc. Wiring
Al,Cu, W etc.
Pad
Wafer
CMP
Pad
Slurry
?
4
CMP Slurry
5
Agenda
1. Typical CMP Chemical Mixtures 2. Introduction
Of our Specialty Valves 3. Technical data
Performance data 4. New products being designed
and developed
6
PV3(Pinch Valve)Series
  • Benefit
  • Compact.
  • Longer life cycle.
  • - Due to style of mechanism
  • No cohesion.
  • - Straight channel.
  • - No dead space.
  • High Cv rating

Best Valve for CMP Slurry
7
PV3(Pinch Valve)Series
Structure
No Dead space.
8
PV3(Pinch Valve)Series
Specification
9
PV-SL(Slow Leak)Series
10
The other PV Series
PV5 Series PV Manual Type
11
PV(Pinch Valve)Series
Application example

Slurry
DIW
12
HPR(High Purity Regulator) Series
  • Features
  • Outlet pressure (flow) regulator
  • Compact.
  • Simple structure.
  • No moving part.

HPR series
13
HPR(High Purity Regulator) Series
Structure
HPR series
Diaphragms
Outlet
P2
Pa
P1
Air
Inlet
Plug
P2 Pa
14
HPR(High Purity Regulator) Series
Pressure Performance
This data is one of test result. We cant
guarantee this data.
15
HPR(High Purity Regulator) Series
Flow Performance
This data is one of test result. We cant
guarantee this data.
16
HPR(High Purity Regulator) Series
Specifications

17
HPR(High Purity Regulator) Series

HPR series
HPR
Comp
Slurry
Slurry
Shaft
-Intricate flow path -Low stress
-Simple Structure
18
HPR(High Purity Regulator) Series
Application example


Tube Pump
19
HPR(High Purity Regulator) Series
Application example

Mixed Slurry
20
HPR(High Purity Regulator) Series
Application example

Cu-ECD
21
Topics
1. Typical CMP Chemical Mixtures 2. Introduction
Of our Specialty Valves 3. Technical data
Performance data 4. New products being designed
and developed
22
PV3(Pinch Valve)Series
Durability of Tube for CMP Slurry
Slurry Cabot SS-25 Open/Close 2 million
times
Results
Appearance Property - Burst pressure -
Surface roughness - Rubber hardness
No Change
23
PV3(Pinch Valve)Series
Immersion Test
Slurry Cabot SS-25
Tensile Strength
This data is one of test result. We cant
guarantee this data.
24
PV3(Pinch Valve)Series
Agglomeration of Slurry due to Equipment
Slurry Cabot SS-25
Samples PV,DV(CompA,B),Blank
25
Problem of Diaphragm Valves
Wear of Diaphragm. Larger pressure drop.
26
PV3(Pinch Valve)Series
Agglomeration of Slurry due to Equipment
Result
This data is one of test result. We cant
guarantee this data.
27
PV3(Pinch Valve)Series
Resistance to solid particles
Leakage Test
10,000 times ?
1 times
28
PV3(Pinch Valve)Series
The performance for vacuum
Pressure gauge
Three-way valve
Regulation valve
Vacuum pump
Sample PV Comp PV

This data is one of test result. We cant
guarantee this data.
29
Topics
1. Typical CMP Chemical Mixtures 2. Introduction
Of our Specialty Valves 3. Technical data
Performance data 4. New products being designed
and developed
30
The Other Products
4-Port Valve
31
4-Port Valve
Structure
Port2
Port3 -Port4
Port3
Port4
Diaphragms
Port1 -Port2
Port1
32
4-Port Valve
Application example
DIW
DIW
DIW
Slurry
Close
Open
Close
Dead Space
DIW
Flushing
OFF
Former
Polishing
33
4-Port Valve
Application example
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