Title: Specialty Valves
1 Specialty Valves for Semiconductor Equipment
SV series
2Agenda
1. Typical CMP Chemical Mixtures 2. Introduction
Of our Specialty Valves 3. Technical data
Performance data 4. New products being designed
and developed
3Dielectric BPSG,SiO2,lowk etc. Wiring
Al,Cu, W etc.
Pad
Wafer
CMP
Pad
Slurry
?
4CMP Slurry
5Agenda
1. Typical CMP Chemical Mixtures 2. Introduction
Of our Specialty Valves 3. Technical data
Performance data 4. New products being designed
and developed
6 PV3(Pinch Valve)Series
- Benefit
-
- Compact.
- Longer life cycle.
- - Due to style of mechanism
- No cohesion.
- - Straight channel.
- - No dead space.
- High Cv rating
Best Valve for CMP Slurry
7 PV3(Pinch Valve)Series
Structure
No Dead space.
8 PV3(Pinch Valve)Series
Specification
9 PV-SL(Slow Leak)Series
10 The other PV Series
PV5 Series PV Manual Type
11 PV(Pinch Valve)Series
Application example
Slurry
DIW
12 HPR(High Purity Regulator) Series
- Features
- Outlet pressure (flow) regulator
- Compact.
- Simple structure.
- No moving part.
HPR series
13 HPR(High Purity Regulator) Series
Structure
HPR series
Diaphragms
Outlet
P2
Pa
P1
Air
Inlet
Plug
P2 Pa
14 HPR(High Purity Regulator) Series
Pressure Performance
This data is one of test result. We cant
guarantee this data.
15 HPR(High Purity Regulator) Series
Flow Performance
This data is one of test result. We cant
guarantee this data.
16 HPR(High Purity Regulator) Series
Specifications
17 HPR(High Purity Regulator) Series
HPR series
HPR
Comp
Slurry
Slurry
Shaft
-Intricate flow path -Low stress
-Simple Structure
18 HPR(High Purity Regulator) Series
Application example
Tube Pump
19 HPR(High Purity Regulator) Series
Application example
Mixed Slurry
20 HPR(High Purity Regulator) Series
Application example
Cu-ECD
21Topics
1. Typical CMP Chemical Mixtures 2. Introduction
Of our Specialty Valves 3. Technical data
Performance data 4. New products being designed
and developed
22 PV3(Pinch Valve)Series
Durability of Tube for CMP Slurry
Slurry Cabot SS-25 Open/Close 2 million
times
Results
Appearance Property - Burst pressure -
Surface roughness - Rubber hardness
No Change
23 PV3(Pinch Valve)Series
Immersion Test
Slurry Cabot SS-25
Tensile Strength
This data is one of test result. We cant
guarantee this data.
24 PV3(Pinch Valve)Series
Agglomeration of Slurry due to Equipment
Slurry Cabot SS-25
Samples PV,DV(CompA,B),Blank
25Problem of Diaphragm Valves
Wear of Diaphragm. Larger pressure drop.
26 PV3(Pinch Valve)Series
Agglomeration of Slurry due to Equipment
Result
This data is one of test result. We cant
guarantee this data.
27 PV3(Pinch Valve)Series
Resistance to solid particles
Leakage Test
10,000 times ?
1 times
28 PV3(Pinch Valve)Series
The performance for vacuum
Pressure gauge
Three-way valve
Regulation valve
Vacuum pump
Sample PV Comp PV
This data is one of test result. We cant
guarantee this data.
29Topics
1. Typical CMP Chemical Mixtures 2. Introduction
Of our Specialty Valves 3. Technical data
Performance data 4. New products being designed
and developed
30 The Other Products
4-Port Valve
31 4-Port Valve
Structure
Port2
Port3 -Port4
Port3
Port4
Diaphragms
Port1 -Port2
Port1
32 4-Port Valve
Application example
DIW
DIW
DIW
Slurry
Close
Open
Close
Dead Space
DIW
Flushing
OFF
Former
Polishing
33 4-Port Valve
Application example