Specialty Valves

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Specialty Valves for Semiconductor Equipment
SV series
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Agenda
1. Typical CMP Chemical Mixtures 2. Introduction
Of our Specialty Valves 3. Technical data
Performance data 4. New products being designed
and developed
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Dielectric BPSG,SiO2,lowk etc. Wiring
Al,Cu, W etc.
Pad
Wafer
CMP
Pad
Slurry
?
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CMP Slurry
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Agenda
1. Typical CMP Chemical Mixtures 2. Introduction
Of our Specialty Valves 3. Technical data
Performance data 4. New products being designed
and developed
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PV3(Pinch Valve)Series

• Benefit
• Compact.
• Longer life cycle.
• - Due to style of mechanism
• No cohesion.
• - Straight channel.
• - No dead space.
• High Cv rating

Best Valve for CMP Slurry
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PV3(Pinch Valve)Series
Structure
No Dead space.
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PV3(Pinch Valve)Series
Specification
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PV-SL(Slow Leak)Series
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The other PV Series
PV5 Series PV Manual Type
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PV(Pinch Valve)Series
Application example

Slurry
DIW
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HPR(High Purity Regulator) Series

• Features
• Outlet pressure (flow) regulator
• Compact.
• Simple structure.
• No moving part.

HPR series
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HPR(High Purity Regulator) Series
Structure
HPR series
Diaphragms
Outlet
P2
Pa
P1
Air
Inlet
Plug
P2 Pa
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HPR(High Purity Regulator) Series
Pressure Performance
This data is one of test result. We cant
guarantee this data.
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HPR(High Purity Regulator) Series
Flow Performance
This data is one of test result. We cant
guarantee this data.
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HPR(High Purity Regulator) Series
Specifications

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HPR(High Purity Regulator) Series

HPR series
HPR
Comp
Slurry
Slurry
Shaft
-Intricate flow path -Low stress
-Simple Structure
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HPR(High Purity Regulator) Series
Application example


Tube Pump
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HPR(High Purity Regulator) Series
Application example

Mixed Slurry
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HPR(High Purity Regulator) Series
Application example

Cu-ECD
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Topics
1. Typical CMP Chemical Mixtures 2. Introduction
Of our Specialty Valves 3. Technical data
Performance data 4. New products being designed
and developed
22
PV3(Pinch Valve)Series
Durability of Tube for CMP Slurry
Slurry Cabot SS-25 Open/Close 2 million
times
Results
Appearance Property - Burst pressure -
Surface roughness - Rubber hardness
No Change
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PV3(Pinch Valve)Series
Immersion Test
Slurry Cabot SS-25
Tensile Strength
This data is one of test result. We cant
guarantee this data.
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PV3(Pinch Valve)Series
Agglomeration of Slurry due to Equipment
Slurry Cabot SS-25
Samples PV,DV(CompA,B),Blank
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Problem of Diaphragm Valves
Wear of Diaphragm. Larger pressure drop.
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PV3(Pinch Valve)Series
Agglomeration of Slurry due to Equipment
Result
This data is one of test result. We cant
guarantee this data.
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PV3(Pinch Valve)Series
Resistance to solid particles
Leakage Test
10,000 times ?
1 times
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PV3(Pinch Valve)Series
The performance for vacuum
Pressure gauge
Three-way valve
Regulation valve
Vacuum pump
Sample PV Comp PV

This data is one of test result. We cant
guarantee this data.
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Topics
1. Typical CMP Chemical Mixtures 2. Introduction
Of our Specialty Valves 3. Technical data
Performance data 4. New products being designed
and developed
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The Other Products
4-Port Valve
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4-Port Valve
Structure
Port2
Port3 -Port4
Port3
Port4
Diaphragms
Port1 -Port2
Port1
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4-Port Valve
Application example
DIW
DIW
DIW
Slurry
Close
Open
Close
Dead Space
DIW
Flushing
OFF
Former
Polishing
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4-Port Valve
Application example