Microelectronics Processing Course Introduction

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Microelectronics Processing CourseIntroduction
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Conductivity in solids
Resistivity ? ? cm
10-8
1018
108
10-3
Ag
Glass
Si
Pure Diamond
Cu
GaAs
Al
Quartz
10-18
103
108
10-8
Conductivity ? ? cm -1
Conductors
Semiconductors
Insulators
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History

• 1904 Vaacum Tube
• Concept of Field Effect Transistor
• 1947 Bipolar Transistor
• Bipolar IC
• MOS Transistor
• 1961 IC-MOS Technology
• 1972 MOS Microprocessor

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Moore Law(Gordon Moore 1965)
The number of transistors in a chip will be
doubled every 18 months
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MOS Transistor
Gate
Source
Drain
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MOS Transistor
Gate
Source
Drain
Electrons in inversion layer
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Schottky contact
Metal contact
Si2O
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Optical Measurements

• Photometric
• Interferometric
• Polarization
• Spectroscopic

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Basic Optical Instruments

• Microscope
• Reflectometer (Nanospec)
• Ellipsometer

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