Nanomotion

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Ceramic Servo Motors
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Theory Of Operation

• Traditional Piezo VS
• Reversed Piezo VS
• Ultrasonic Standing Wave

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Piezo Direct and Reverse Effect
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Poling a Piezo Element
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Basic Structure of Nanomotions Piezoelectric
Element
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Ultrasonic Standing Waves
Bending Mode
Longitudinal Mode

• Simultaneous excitation of both modes
• creates motion at the edge of motor fingertip

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Finite Element SimulationLongitudinal
Mode Bending Mode
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Motor Ellipse

• Amplitude of ellipse varies with voltage
• Slow speed ellipse at the few nm level
• High speed- ellipse at the tens of microns
• The larger the ellipse, the more the mechanical
  stress, the more the heat, the less the duty
  cycle

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Nanomotion Motor Basics
Rotary Table

• Linear Motion Rotary Motion

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Motor Assembly
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Motor Features

• Standard motors for most operating environments
• Unlimited travel with small operating package
  (Drive strips to 4m length)
• Superior move settle Slow speed CV
• Vacuum motors for high and UHV
• Up to 10-10 Torr
• Non-Magnetic motors / No EMI from motor
• No servo dither no hysteresis
• Built in holding / braking without power
  consumption
• Wide range of dynamic performance
  (Resolution to 1nm, velocity from 1u/sec to
  300mm/sec)
• Cost effective direct drive solution

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The EDGE

• New high volume industrial motor.
• Low voltage
• Supported by ASIC based driver
• Low price in volume
• Performance Characteristics
• Max velocity 150mm/sec
• Max force 30g (.3N)
• Highest resolution 1um
• Requires straight slide (to 10um)

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The EDGE

• Drive System
• The Edge is supported by a dual axis ASIC
• 2 independent drive/control or one drive for (2)
  motors.
• ASIC is a complete drive simple control,
  programmed via I2C protocol. Can close the loop
  at 5um resolution (30k counts/sec)
• ASIC drive available with /-10vdc input for use
  with external servo controller.
• Market Positioning
• Mid to high volume industrial markets
• Biomedical Pumps, biometric security, Drug
  delivery
• Military/Aerospace Aperture control, shutters,
  target manipulation
• Vision Industrial focus/zoom

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The EDGE

• Benefit / Feature
• SIZE Smallest closed loop servo motor
• SAFETY Low voltage for medical applications
• POWER .3N force
• COST Low price in volume
• Target Applications
• Aperture/Shutter control (vision, laser, etc)
• Medical devices (pumps, wands, fluid control)
• Vision/Industrial focus/zoom

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• DuraMotor
• Next Generation Motor by
• Nanomotion
• For Better Productivity and Cleanliness
• at Challenging Motion Conditions

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DuraMotor

• Introduction
• Critical factor definition in vacuum environment
• Operating Conditions
• Experimental results and analysis
• Summary and conclusions
• Design recommendations

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Introduction

• Nanomotion products are serving a wide range of
  applications
• Challenging applications are often involved with
  high cleanliness requirements
• Semiconductor, FPD, data storage, high resolution
  microscopy
• Medical, military, and Nanotech applications with
  analytical instruments
• Main factors impacting performance at the above
  conditions
• Stage stiffness
• Motion dynamics
• Vacuum VS Ambient environment
• Control optimization
• DuraMotor was designed for
• Operation at challenging motion environments to
  achieve HIGH PRODUCTIVITY
• High dynamics acceleration, velocity
• Vacuum environment
• High duty cycle
• Full compatibility with the HR motor family
• Seamless integration with existing servo or open
  loop systems

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Critical Factor Definition at Vacuum
applicationsExperimental Comparison for Standard
HR Motors

Stage Stiffness and Motion Dynamics are the
Critical Factors
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Design Recommendation

• DuraMotor is recommended for challenging vacuum
  and ambient applications
• High stiffness stage is the most critical
  factor for the motor performance with low
  particles level
• Servo parameter optimization is essential to
  avoid vibrations which contribute to particles
  during dynamic move profiles
• Both HR and DuraMotor are suitable to use at
  high stiffness and well controlled servo systems

A stiff stage design with DuraMotor allows for
high productivity (dynamics) and cleanliness in
motion systems
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DuraMotor

• Benefit / Feature
• CLEANLINESS Reduced particle generation
• DURABILITY Higher accel rates, more aggressive
  move profiles.
• Target Applications
• Semiconductor vacuum stages for wafer inspection,
  E-beam Ion beam microscopes
• XY Z motion for medical microscopes
• Any application that is sensitive to
  contamination

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The Flex DC
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Flex DC

• Product Configuration
• Single Axis (AB1A or AB5)
• Dual Axis (AB1A, AB5, or Mixed)
• 8 kHz Servo Update Rate
• DAC Output /-10v, 16 bit
• Easy to use GUI
• RS232, Ethernet, and CAN-open interface
• Quadrature Encoder input
• Sin/Cosine Multiplier Option

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Flex DC Hardware

• I/O
• 8 x Digital Isolated Inputs
• 2 x Digital Isolated Outputs
• 2 x Digital Fast Inputs
• 2 x Digital Fast Outputs
• AC Input (wall)
• 100 240 VAC, 50-60 Hz

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Flex DC Software

• PID or PIV Control Algorithm
• Data Recording
• Nanomotion Algorithms for
• Deadband
• Ultra-High Resolution Positioning
• Thermal Protection (to come)

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Flex DC

• Board level dual axis option
• Board level 4 axis option
• Rack mounted box with 4 axis (TBD)

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Flex DC

• Benefit / Feature
• SINGLE RESPONSIBLITY Eliminating all the guess
  work of interfacing drives controls
• EASE OF USE Simple front end GUI and strong
  factory support (from Nanomotion)
• PLUG PLAY Set up for any FB motor and encoder
  to plug directly into the controller
• COMMUNICATIONS RS232, Ethernet, CAN-Open
• Target Applications
• EVERY FB or CUSTOM STAGE CUSTOMER (you will not
  sell many of these without our motors. It is a
  support product.

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Stages

• Nanomotion continues to expand its offering of
  standard stages and custom motion systems to be a
  provider of complete motion solutions.

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Stages

• Nanomotion Standard Stages
• FB Linear Stages
• Sizes 50mm to 150mm wide
• Travels up to 300mm
• Resolutions 1um to 10nm
• Single and multi axis
• FBR Rotary Stages
• 60mm output diameter
• (150mm diameter available)
• Resolution of 5 to 0.5 arc seconds
• Single or multiple HR2 motors

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Custom Motion Systems

• Nanomotions first hybrid motion platform,
  combining two axis of Nanomotion motors with one
  axis of ballscrew and step motor drive.

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Custom Semi-Standard Motion Systems

• Motion systems that utilize standard components
  of bearings, slides and encoders, but require
  custom machined assembly housings creates
  distinction in the market place.

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Custom Drive Electronics

• Nanomotion has designed and manufactured many
  custom drive configurations for customer
  applications.
• Small multi axis amplifiers
• 4 channel card for HR1 motors
• Miniature amplifiers with TTL inputs
• To drive ST or MM motors
• Nanomotion will look to standardize an offering
  of smaller electronics (based on motor sizes).
• Do not let electronics packaging be an obstacle
  to developing an application.

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• Drive Technology Comparison

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Drive Technology Comparison
2 Piece Construction

• ?? Piece Construction

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Drive Technology Comparison

• Nanomotion positions its ceramic servo motors
  against other applications using step or servo
  motors or stages with closed loop rotary step or
  servo motors (using ball/lead screw) or brushless
  linear servo motors.

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Positioning with respect toother motion
technologies
Motor Drive Feedback Configuration
Step Motor Lead/ball screw None Open Loop
Step Motor Lead/ball screw Rotary Encoder Closed Loop
Servo Motor Lead/ball screw Rotary Encoder Closed Loop
Step Motor Lead/ball screw Linear Encoder Closed Loop
Servo Motor Lead/ball screw Linear Encoder Closed Loop
Ceramic Servo Motor Ceramic Servo Motor Linear Encoder Closed Loop
DC Linear Servo Motor DC Linear Servo Motor Linear Encoder Closed Loop
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Drive Technology Comparison
VS
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Performance Comparison

• Travel
• Accuracy / Repeatability
• Velocity
• Accel / Decel
• Load

• Dynamic/Static Stiffness
• Smoothness of Motion
• Control Interface
• Special Environments
• Cost

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Travel Comparison

• Travel can be configured for any length in both
  systems
• Once ballscrew length is defined, travel is fixed
• Ballscrew has length limitations by diameter and
  bearing span
• Nanomotion can travel any length defined by
  bearing structure
• Advantage Ceramic Servo Motors

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Accuracy / Repeatability Comparison

• Nanomotion relies on direct feedback on the
  motion platform and does NOT induce any potential
  errors from mounting or compliance.
• Ballscrews can use either linear or rotary
  encoders which can introduce errors related to
  lead error, screw mounting, or compliance.
• Ceramic servo motors have no negative effects
  with respect to accuracy and work to the limit of
  the feedback.
• Advantage Ceramic Servo Motors

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Velocity Comparison

• While ballscrews are limited by the pitch and
  critical speed, based on mounting, Nanomotions
  motor technology is limited to 250mm/sec.
• High pitch ballscrews can go much faster
• Advantage Ballscrews Rotary Motor for Speed
• However, Nanomotion has a significantly higher
  bandwidth in velocity, with a ratio of 1250,000
• Advantage Ceramic Servo Motors for Range

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Accel /Decel Comparison

• In terms of pure acceleration, Nanomotion has
  achieved rates in excess of 10gs.
• Ballscrews have a practical limit of 1g, before
  balls start jamming in the return tubes.
• While ceramic servo motors can achieve a high
  rate, it is very load dependent.
• Advantage Shared / Application Dependent

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Load Comparison

• While ceramic servo motors are competitive within
  the defined speed/force curves, the mechanical
  advantage of the ballscrew is much greater than
  the force capability of our direct drive.
• Advantage Ballscrew Rotary Motor

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Dynamic Stiffness Comparison

• Dynamic stiffness is a function of the motor
  response, control loop, and mechanical system.
• The compliance in a rotary motor coupling-
  bearing mount- ballscrew creates a much slower
  response.
• The direct drive of a motor coupled to the load,
  without any internal motor inertia, makes ceramic
  servo motors a much faster responding technology
• Advantage Ceramic Servo Motors

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Static Stiffness Comparison

• The static stiffness of the ballscrew can be
  significantly higher that the ceramic servo
  motors.
• However, it is dependent on the shaft bearing
  configuration and type and ball nut preload.
• Advantage Ballscrew Rotary Motor

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Smoothness Comparison

• The impact of ball bearings running in/out of
  preload creates vibration that will be
  transmitted to the mechanical structure.
• The issues of ball screw pitch diameter
  variations and preload variations create torque
  fluctuations that will effect smoothness of
  travel.
• Ceramic servo motors do not effect the bearing
  structure and can travel smoothly at the level of
  1 micron/sec.
• Advantage Ceramic Servo Motors

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Control Interface Comparison

• Most rotary servo motors and amplifiers have the
  ability to accept step/direction inputs as well
  as analog inputs
• Nanomotion amplifiers are limited
• /-10 vdc analog input
• SPI digital input
• However, the new AB5 allows use with ANY
  controller that provides /-10 vdc, including
  PLCs
• Advantage Ballscrew Rotary Motor

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Special Environment Comparison

• Nanomotions ceramic servo motors are well suited
  to
• Vacuum UHV
• High Magnetic Field
• Clean Room
• Radiation
• High RF
• Rotary motors with ballscrews (and lubricants)
  are far more limited
• Advantage Ceramic Servo Motors

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Comparison Summary
Characteristic Advantage
Travel Nanomotion
Accuracy/Repeatability Nanomotion
Velocity Max Speed Ballscrew Bandwidth -Nanomotion
Accel / Decel Even
Load Ballscrew
Dynamic Stiffness Nanomotion
Static Stiffness Ballscrew
Smoothness Nanomotion
Control Interface Ballscrew
Special Environments Nanomotion
Cost Nanomotion
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Comparison Summary

• Ceramic Servo Motors bring advantages in size,
  simplicity, force per volume, dynamic
  performance, and cost over traditional drive
  technology.