DC

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AOI

• Automatic Optical Inspection
• Supports quality control objectives through
• in-process inspection that identifies critical
  defects
• Helps prevent recurrence of critical defects by
  indicating possible process-related sources of
  error

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Basic Structure of AOI Platform
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Basic Steps

• Alignment
• Observed object moves along the path at constant
  speed
• CCD (Charge Coupled Device) cameras scan the
  object
• Analyze the image data, calculate the size,
  position, and the type of the defects on the
  object
• Move review cameras to the defect and get the
  detail

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InVision

• An in-line AOI platform by Orbotech
• http//www.orbotech.com
• In-line seamless with the product line

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Spec.
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Standard Features

• Auto stack comparison
• Real time classification
• Video classification system
• Video image grabbing

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Inspection Methods

• Periodic area/periodic connector area comparison
  of pixel with neighboring pixels
• Non-periodic connector area die-to-die

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Illumination

• Solid-state LED (Light-Emitting Diode)-based
  system
• Why LED? Long life and reliability
• Provides different levels of intensity and
  evenness of illumination

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Classification

• Based on a sub-micron-resolution real RGB (Red,
  Green, Blue) video image
• Can do go/no-go testing to different channels

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Contactless Transport Mechanism

• The glass is floated at a stable height on a
  layer of air above the table, avoiding all
  backside contact
• Minimizes contamination, scratching and
  electrostatic damage
• Results in much smoother motion than conventional
  transport mechanisms