SUGAR

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SUGAR

• Tool for system-level MEMS simulation
• Goal Be SPICE to the MEMS world
• Analyzes static, dynamic, and linearized
  steady-state behavior
• Challenges
• Be fast enough for design and optimization (not
  just verification)
• Handle coupled physical effects (electrical,
  mechanical, thermal, optical, )

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SUGAR Current work

• Broad set of component models
• Validation against optical measurements
• Deployment of Millennium-based web service (used
  in EE245 in Fall 2001)
• Analyze dependence on parameters (sensitivity
  analysis, bifurcation analysis)
• Design synthesis and optimization
• Integration of state-of-the-art solvers

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