SEMI S2 Section 26 Laser Safety

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SEMI S2 Section 26 Laser Safety

• SEMI S2
• Section 26 Changes
• Laser Data Sheet
• John ODonnell
• Texas Instruments

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Objective

• Communicate the rationale for and changes to the
  laser safety section of SEMI S2 0706

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Laser Safety Task Force

• The Laser Task Force scope was limited to
• Relocating needed information from Related
  Information 9 (Laser Data Sheet) to an Appendix
  (7)
• Making suitable changes to Section 26 and RI-9 to
  reflect the relocation of the Laser Data Sheet
• Addressing any international or regulatory
  changes.
• This move would provide the equipment users
  needed information about lasers in equipment

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Rationale for Change

• The original purpose of the S2 Laser Data Sheet
  was to provide a standard format to communicate
  laser equipment hazards and control measures
  information to the user.
• Located in Related Information 9, the Laser Data
  Sheet was not being used.
• The change to S2 was made to get appropriate
  laser information to the people that need to use
  it to establish control measures during the use,
  maintenance, and service of semiconductor
  manufacturing equipment
• Equipment users needed access to laser hazard and
  control data in order to implement effective
  laser safety programs.

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Rationale for Change

• The User Perspective
• A standard format would communicate critical
  information on laser hazards and controls needed
  for installation and maintenance personnel to
  control laser hazards.
• Efficient Use of Resources
• Suppliers perform a laser hazard analysis once
  per model
• Every user would have to perform an analysis for
  each tool that they have from every equipment
  manufacturer
• ESH has few enough resources and needs to
  maximize the ability to provide a safe healthy
  workplace

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Who is affected?

• Equipment manufacturers
• Laser equipment requirements in SEMI S2, Section
  26.
• Third Parties
• Evaluate control measures and laser hazards
  documented on Laser Data Sheet
• Device manufacturers
• Source of laser safety information to use in
  workplace laser safety programs

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From Information To Requirement

• The original Laser Data Sheet was published in
  Related Information 9 but remained there unused
  by equipment manufacturers
• The laser line item required essential laser data
  to be documented on the Laser Data Sheet.
• This change was approved in March 2004, but the
  effective date was delayed until July 2006
• Effective July 1, 2006, the Laser Data Sheet is
  Appendix 7, documentation for requirements of
  Section 26

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Laser Data Sheet
9
Section 26 Changes

• 26.1 Requirement for laser product class and
  applicable standard documented on Laser Data
  Sheet
• 26.1.1 Alternate formatting option for Laser Data
  Sheet
• 26.1.3 Laser and equipment labeling requirement

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Section 26 Changes (continued)

• 26.1.4 Maintenance and service task information
  with access above MPE
• 26.1.4.1 Information on laser hazards, control
  measures and PPE documented on Laser Data Sheet.
  (Exceptions Proprietary Information, Stand Alone
  system components)
• 2.1.5 Identification of laser source locations in
  user documentation

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Summary

• Laser equipment classification and hazard
  information is now a requirement
• Maintenance and Service task hazards and control
  measures are required to be documented
• Laser Data Sheet provides format to document
  required information
• This change was approved over 2 years ago