Amorphous Transparent Conducting Oxide Films

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???????????? Amorphous Transparent Conducting
Oxide Films
??? ??? ???? ????
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??? ?????? ????? ?? (2002.12) ????? ???
???? ???? (2008.2??) ???????????
(2005.82008.1) ??????????
(2003.72005.7) ?????????? (2003.22003.6)
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• ?????????
• ????? 400 700 nm (3.1 1.77 eV)
• ????? lt 1.77 eV ????? ???
• ????? gt 3.1 eV ?????? ? ??
• ?????? ?? 3 eV
• GaN, ZnS, ZnO

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Transparent Conducting Oxides
SnO2F (FTO) SnO2Sb (ATO)
ZnOAl (AZO) ZnOGa (GZO)
In2O3Sn (ITO)
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• ????????????
• ?????(LCD, PDP)
• ????(solar cell)
• 2. ?????(low-E glass)
• 3. ????(?UV, ???)

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• ????????????
• InGaZnO4 (IGZO)
• Flexible Transparent TFT
• ??
• ???? (??)
• ?????
• ???? (10 cm2/Vs) (a-Si1 cm2/Vs )

Oxygen 2p orbital
Metal ns orbital (n?4)
Si
InGaZnO4
K. Nomura et al., Nature 432, 488 (2004).
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• ?????
• Mn-, Cr-doped IGZO films (PLD)
• Mo-doped IGZO films (co-sputtering)

Mn-doped IGZO films
S. J. Liu et al., Appl. Phys. Lett. (2009)
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• ????
• ???????????????????????????? (???????)
• In-Ga-Zn-O?????????In, ??? TFT(??)

• ????(?)
• ???????
• 1. 2-gun ???? 2 target, 4 wafer
• 2. ???????? (??, ??)
• 2. ????????? AFM, XRD, EDX, TEM
• 
  (????, ??)

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????(?) 3. ?????? a.???? Keithley
2400 I V source, I V measurement
Picotest M3500A I, V, R measurement
Keithley 2182A nano-volt meter (???) b.
???? UV/Vis/NIR ??? ??????? (???)
c. ???? SQUID M-T M-H (??, ??)
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• ?????
• ?? ??? ??? 1 ?
• ?? ??? ??? 1 ? (???????)
• ???? 3 ?
• ?? 2 ?

??? ???? ????? sjliu_at_ntnu.edu.tw 02-77148400
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