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Transparent Electro-active Oxides and Nano-technology

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... Carrier Mobility in various semicond/. Thin Film Transistor(TFT) LCD Pixel Circuit Comparison of TCO with metal In2O3 :crystal structure ITO(In2O3): ... – PowerPoint PPT presentation

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Title: Transparent Electro-active Oxides and Nano-technology


1
Transparent Electro-active Oxides and
Nano-technology
  • Hideo HOSONO
  • Frontier Collaborative Research Center
    Materials and Structures Laboratory,
  • Tokyo Institute of Technology, Yokohama, JAPAN

2
Schedule of lecture Part (I) Transparent
Oxide Semiconductors
  • August 8 Introduction with Grand Prix -awarded
    Movie of
  • Transparent Electro-active
    Materials Project
  • What is semiconductor /
    transparent oxides ?
  • August 9 N-type transparent Oxide
    Semiconductor. electronic structure, application
    as TCOs, material designing for novel N-type TCO,
    and Nano-TCO and applications
  • August 10 P-type Transparent Oxide
    Semiconductor material design concept ,
    examples, and devices based on PN-junction
  • August 13 Comprehensive understanding of TOS
    viewed from band lineup
  • August 14 Thermoelectric oxides and performance
    enhancement utilizing artificial nanostructure
    (Dr.S.WKim of TIT), Exam (I)

3
Part II TAOS, C12A7, fs-laser
  • August 27 Transparent Amorphous Oxide
    Semiconductors(TAOS) and their application to
    TFTs
  • August 28 Nanoporous Crystal 12CaO7Al2O3
  • (I) encaging active anions (O?, O2? and H?) and
    their functional properties
  • August 29 Nanoporous Crystal 12CaO7Al2O3
  • (II) RT-stable electride, their electronic
    properties ( metal-insulator transition,
    metal-superconductor transition) and device
    application
  • August 30 Nano-maching of transparent
    dielectrics by femtosecond laser pulse
  • August 31 Summary of the lecture and Examination
    (II)

4
Energy Diagram
Vacuum level)
Ionization potential
Work Function
Electron Affinity
Conduction band
Conduction Band Minimum
Band Gap
Fermi Level
Valence Band Maximum
Valence band
5
What is semiconductor
  • ECBM EF kT for N-type
  • EF- EVBM kT for P-type

Ncarrier is controllable over several orders
of magnitude by Intentionall doping
W
For Insulator E(band edge) EF gtgtkT
6
Electrical Conductivity
Carrier Concentration (cm-3)
Mobility (cm2(Vs)-1)
Effective mass
m t / m
Carrier relaxation time ( inverse of mean free
path)
i.e., depends on quality of sample
7
Effective mass m
m ?? dE2/dk2?
m is an intrinsic material property.
8
SnO2 crystal structure
Rutile-type structure
9
SnO2 band structure
Density of States
CBM
VBM
10
Siband structure
CBM
VBM
11
Carrier Mobility in various semicond/.
Why is the electron mobility is larger than hole
mobility,?
12
Constitution of Liquid crystal displays
13
Thin Film Transistor(TFT)
Insulator
Gate
Dorain
Semicond
14
LCD Pixel Circuit
(voltage line)
(signal line)
LC
15
Thin Film Solar Cells
Superstrate type
glass
TCO(SnO2)
P-type Si
Active pure Si-layer
N-type Si
TCO(ITO)
Metal(Ag, Al)
16
Comparison of TCO with metal
17
In2O3 crystal structure
CaF2
18
ITO(In2O3) electronic structure
19
In2O3Sn content and Carrier Conc.
Carrier Conc(1021cm-3)
Sn content(Sn/In) ()
20
Plasma Frequency
21
Absorption, reflection in TCOs
22
Resistivity and reflectance_at_800nm
23
Resistivity (Min) vs Year
24
Two types of carrier scattering
25
Material design for N-type TOS
Edge-sharing MO
6
Octahedron Chain
M

p
-block heavy cation
i
e
-
e.g.
In,Ga

2-
ns0
orbital
26
SnO2 crystal structure
Rutile-type structure
27
SnO2 band structure
Density of States
CBM
VBM
28
Various TCOs
29
Nano TCOs
Ex. ZnO by Wang (Georgia Tech)
spring
spiral
ring
Nanowire arrays
30
Nano power generator
ZnO nanowire
Piezo electric
Wang (Science 2006)
31
Electron doping via oxygen vacancy formation
SnO2
Electron becomes mobile, gtcandidate of
transparent metals
32
When electron is doped to insulator via oxygen
vacancy formation
Mg2
O2-
O-vacancy
???????
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