Taking Nanotechnology

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• Taking Nanotechnology
• From Lab to Market
• James R. Von Ehr
• CEO

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Vision

• Our vision is to be the leading worldwide
  supplier of tools, products, and services that
  enable adaptable, affordable, and molecularly
  precise manufacturing.
• We are taking an assembly-based approach to
  integrating across all length scales from macro
  to micro to nano.

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Resources

• Headcount 50
• 15 Ph.D.s
• Engineers, scientists, technical management
• 44,000 sq. ft. facility
• Class 100 clean room
• Several fully equipped laboratories
• CNC-equipped machine shop
• Equipment SEM, TEM, AFM, SPM, UHV STM,
  numerous lasers, MEMS motion analyzer, electrical
  testing station

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Customers
Partial List
NanoLign
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Alliances
Partial List
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Nanotech Flavors
Wet/bio
Dry/nano
Active
Passive
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Top Down
Molecular Devices Materials
Molecularly Precise Manufacturing
Molecular Assembler
Science
Technology Development

Bottom Up
Potential Products
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Tools, materials, structures
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The Zyvex ApproachNanoWorks Tools
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1st Measurement of Tensile Strength of MWNT
SCIENCE VOL 287 28 JANUARY 2000
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S100 Nanomanipulator System
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A-100
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NIST-ATP
Five-year, 25M contract Title Assemblers for
Nanotechnology Applications and Manufacturing
Enabling the Nanotechnology Era Zyvex and
partners will develop low-cost, computer
controlled, microscale assemblers that operate in
parallel to assemble three-dimensional,
microscale components. Honeywell is our Joint
Venture Partner. The RPI Center for Automation
Technology, and University of Texas at Dallas are
sub-contractors.
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MEMulator

• Interactive Visualization
• Arbitrary Complexity
• Incorporate CAD geometry
• Licensed to Coventor

40,000 x 40,000 x 100 volume element model (1.6
trillion voxels)
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Microgrippers/probes
Microgripper with 36 µm opening
Mounted
Patent 6,398,280
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Pulling CNTs from bundles
KLT
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FIB coupon pick and place
KLT
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Integrated Circuit Probing
Four tungsten probes in contact with an IC and
viewed with the focused ion beam.
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Probing Solution
Capability demonstrated for two major U.S.
semiconductor manufacturers
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Four Probe Contact
Four probe contact on an n-channel MOSFET. The
Gate probe is connected to the pass-gate shared
by four n-channel transistors. The Psub probe is
connected to the substrate contact and the S/D
probes are connected to the source and drain of
the transistor being tested.
The KZ100 is capable of connecting to contacts
that are separated by as little as 70 nm and as
large as 10 millimeters.
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Integrated Circuit Probing
The IV curve of an integrated n-type MOS-FET was
generated by the Zyvex KZ100 Nanomanipulator.
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The Zyvex ApproachMaterials
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Approaches of CNT Integration
Zyvex Corporation
Other approaches
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Technology Comparison
Suspension of SWNT in Organic Solvent (Brand X)
Suspended in Chloroform using Zyvex Technology
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Zyvex CNT Dispersion
Surface
Cross Section
SWNTs (5 wt)/Polystyrene Composites
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Mechanical Properties
Solution Cast Films At Room Temperature
Polycarbonate
SWNTs (2wt)/Polycarbonate
Youngs Modulus 1.8 GPa Tensile Strength at
Break 84 MPa Elongation at Break 145 18X
improvement Toughness increased by 40X
Youngs Modulus 1.8 GPa Tensile Strength at
Break 47 MPa Elongation at Break 8
Only 2 SWNTs significantly increase the
mechanical properties of polymer.
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Composite fracture surface
Surface
Cross Section
SWNTs in polycarbonate
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Electrical Conductivity
Conductivity of CNT-Polymer Composites
Zyvex SWNT-Polystyrene
Conductivity as an indicator for CNT dispersion
Dublin MWNT-PMPV
1.E02
Cambridge SWNT-P3OT
1.E00
Oklahoma SWNT-Polystyrene
1.E-02
1.E-04
Conductivity (S/m)
1.E-06
1.E-08
1.E-10
0
10
20
30
40
CNT percentage in Polymer ()
Dispersed SWNTs significantly increase the
electrical conductivity.
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Polymer Composites
Accomplishments

• Double the strength of pure polymers
• 5 times increase in strain handling
• 1000 times greater conductivity than best
  published results of others
• Goal Better Faster- Cheaper

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Heterogeneous Assembly(Tool Building The Next
Generation)
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Microassembly
Zyvex Mechtile structure
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Microassembly
Mechtile MEMS Structures
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Mini SEM Column
Extractor
Anode
Focusing electrode
Octu(Quadru)pole
Aperture
Octupole deflector
Octupole deflector
Einzel Lens
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Assembly simulation
1.6x1011 voxels (volume elements)
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Assembly demonstration
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Nano hype

• Lots of promises being made to funders press
• Short-term field is overcommitted, overhyped
• Long-term field is underhyped
• We should aim for the high ground
• Pro-energy
• Pro-business
• Pro-technology
• Pro-environment
• Pro-prosperity
• Pro-development

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One Grand Challenge

• By 2020, reduce our use of fossil fuel by 50
  while improving our standard of living.
• Govt estimate increase by 30-50 if we do
  nothing (probably a high estimate)
• Nanotechnology is the key

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