RTA

1
RTA
FYS4310
RTA
Rapid Thermal Annealing
History of fast thermal processing
Laserzapping, Ion beam zap, Laser scan, Q switch,
CW, Electron Beam Zap,
2
Why RTA
The selling argument for I2 annealing
1/tdiff
1/tdefect
Diffusion OK
Defect OK
1/T
3
What is RTA
600-1200C
2s-60s
Industrial heating lamps
4
What is RTA II
5
(No Transcript)
6
(No Transcript)
7
(No Transcript)
8
(No Transcript)
9
Transient enhanced diffusion
10
Chapter 6
11
(No Transcript)
12
(No Transcript)
13
(No Transcript)
14
(No Transcript)
15
(No Transcript)
16
RTO-Rapid thermal oxidation