Steric hindrance of precursors does not in increasing of film roughness. ... Steric hindrance of precursors in a ALD process reduces film growth rate, but ...
... Carbon Dioxide Balance and the Role of CO2- Utilization in it ... utilisation and storing. 2. INDIRECT ALTERNATIVE (affect passes trough the natural processes) ...
(2) in situ synthesis of the precursor providing a fresh and reactive supply of ... growth rate and temperature. impurity levels of the films. A recent. example: Sc2O3 ...