EE M252B MAE M282 MEMS PHYSICS

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EE M252B MAE M282 MEMS PHYSICS

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Fluidic. Applications and Case Studies: Inertia sensors. Capacitive accelerometers ... Fluidic, Biological, Example: Airbag in your car. MAE 282/EE 252. 11 ... – PowerPoint PPT presentation

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Title: EE M252B MAE M282 MEMS PHYSICS

1
EE M252B /MAE M282MEMS PHYSICS DESIGN
Spring 2007 MW 200 350 pm 5422 Boelter Hall

Eric P. Y. Chiou
UCLA Mechanical and Aerospace Engineering
Department, Eng. IV 37-138
Los Angeles, CA 90095-1594
pychiou_at_seas.ucla.edu

2
Scope

Introduction to MEMS design
Sensing and actuation mechanisms
Microsensors, and microactuators
BioMEMS and Microfluidics
Case study of MEMS products

3
Textbook

Microsystem Design
Steve Senturia (MIT)
First published in 2001
Kluwer Academic Publishers
ISBN 0-7923-7246-8
Emphasis on
Physics
Modeling
CAD
Detailed case studies

4
Reference Books

Greg Kovacs, Micromachined Transducers
Sourcebook, McGraw Hill, 1998
Covers a wide range of topics
Comprehensive list of references
N. Maluf, An Introduction to Microelectromechanica
l Systems Engineering, Artech House, 2000
Intended for use as an introductory textbook
T.R. Hsu, MEMS and Microsystems, McGraw-Hill,
2002
Introductory textbook
Research papers listed on the web
http//www.seas.ucla.edu/pychiou/M282.html

5
Syllabus

Grade
Homework (15), Midterm (30), Final (40),
Project(15)
Office Hour
Fri 12 pm, other time by appointment.
Team Base Design Project
3 people a group (from different departments and
groups)
Midterm

6
Background

Basic MEMS fabrication processes
Prerequisite EE M250A (MAE 280)
May be substituted by EE M150L
Layout tool
Have access to a layout tool such as L-Edit,
Cadence, Magic, etc.
If you dont have access, you need to find a
partner
Mathematical tools
Familiar with and have access to at least one of
the following numerical packages (or its
equivalent)
MathCAD
MATLAB
Numerical Simulation Tools (Plus but not
required)
ANSYS,
FEMLAB

7
Topics Covered in This Course

Transduction principles
Mechanical
Electrostatic
Magnetic and Electromagnetic
Thermal
Piezoelectric
Fluidic

Applications and Case Studies
Inertia sensors
Capacitive accelerometers
Piezoelectric rate gyros
Pressure sensors (piezoresistive)
Projection display
Digital Micromirror Devices
Grating Light Valve (GLV)
Optical switching
RF MEMS
RF switches
Tunable capacitors
RF resonator

8
Course Schedule

Week Topic
1-1(4/2) Welcome, Administration, MEMS
Literature, MUMPS, SUMMIT V
1-2(4/4) Lumped-Element Modeling, Transduction
Mechanisms
2-1(4/9) Electrostatics
2-2(4/11) Electrostatic Devices
3-1(4/16) Magnetostatics
3-2(4/18) Magnetostatic Devices
4-1(4/23) Elasticity
4-2(4/25) Piezoelectricty, piezoresistive
5-1(4/30) Energy Methods
5-2(5/2) MIDTERM EXAM (May 2nd)
6-1(5/7) Thermal Devices
6-2(5/9) Fluidics (Electrophoreis,
Electroosmosis, AC electroosmosis)
7-1(5/14) Fluidics (Optical Tweezers, Magnetic
Tweezers, DEP, OET)
7-2(5/16) Case Studies (Capacitive Sensor)
8-1(5/21) Case Studies (DMD Display, GLV
Display)
8-2(5/23) Case Studies (RF MEMS)
9-1(5/28) Case Studies
9-2(5/30) Memorial Day Holiday

9
What is Design?

Find a solution that satisfies a set of boundary
conditions
The boundary conditions usually have conflicting
requirements
Trade-offs have to be made
Performance is not the only goal. It is often
traded off for manufacturability ( maybe the
biggest difference between engineer and scientist)

10
MEMS System
Electronic Signal Processing, Computing Storage
Sensor
MEMS Transducers
Physical World
Actuator
Electrical Signals
Mechanical, Optical, RF, Fluidic, Biological,
Example Airbag in your car
11
What is MEMS Design?
System Architecture
Requirements
MEMS Subsystem
Non-MEMS Subsystem
Packaging Consideration
Capabilities and Limitations
Device Structure
Detailed Design
Detailed Design
Transduction Method
Manufacturing Yield Cost
Fabrication Process
Trade-offs
12
High Level Design Issues(Before You Start
Designing MEMS)
Technology Push
Market Pull
MEMS-Enabled Systems
MEMS Technologies
Market
Market Looking for Technologies
Technologies Looking for Solutions
Other Competing Technologies
Other Competing Systems