Temperature%20Sensor%20Array%20Using%20flexible%20Substrate

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Temperature Sensor Array Using flexible Substrate
9533701 ???
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Outline

• Abstract
• Introduction
• Design
• Fabrication
• Results
• Conclusions

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Abstract

• Temperature sensor array based on MEMS technology
• Temperature sensor array is composed of
  256(1616) sensors inside a 2820mm2 area
• Polyimide (PI) thin film (35µm) with a copper
  layer (40µm) on one side as the starting material
• Doubled-sided fabrication process is applied to
  create the sensing elements and interconnects for
  scanning circuitry
• Measuring the resistance of each element in the
  temperature sensing array

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Introduction

• Research on artificial skin for robots has been
  popular, that should be highly arrayed in a
  requested area on a flexible substrate
• Higher density on a flexible copper-polyimide
  substrate
• Temperature sensing element is a platinum
  resistor
• The temperature variation is detected by
  measuring the resistance change of the resistor
  due to temperature variation

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Design
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Design

• The resistance is proportional to length and
  inversely proportional to cross-sectional area
• The platinum layer is designed to be long and
  narrowthe copper is relatively wide, in order to
  ensure that the resistance change is caused by
  the meandering platinum patterns
• Copper layer was designed to be 10 times larger
  than platinum
• The resistivity is 10.6µO-cm for platinum and
  1.68µO-cm for copper

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Design
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Fabrication
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Fabrication
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Results

• A thermocouple is used for measuring the accurate
  ambient temperature
• a is the TCR of platinum
• T0 is the ambient temperature

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Conclusions

• A 1616 temperature sensor array in a 2820mm2
  area is fabricated on a flexible copper-PI
  substrate using MEMS fabrication technology
• The dimensions of the copper and the platinum
  patterns are carefully designed to ensure the
  temperature dependent resistance of the copper
  layer is negligible during the temperature
  measurement