???????????? F-Tron High Accuracy Digital Capacitance Manometer

1
????????????F-TronHigh Accuracy Digital
Capacitance Manometer
2
?????? System Outline
????????? General Type
F-ton New Technology
Analog Architecture
Digital Architecture
Pressure-Analog output Transducer
Pressure-PIM Transducer
Noise
Analog signal (0-10V)
Pulse signal
Display unit
Display unit
Pulse Interval Counter / MPU
Analog-Digital Converter

• ?????????????? ???????(???)
• ????-????????? ????????
• ???????????????? ??
• ???????????? (????)

• ???????????????PIM (Pulse Interval
  Modulation)???
• ??????????????????? ??????????
• ?????????????????? ??
• ???????????

3
????? Sensor Outline
Pressure f (Cap)
Reference Pressure
Silicon Fixed Electrode
SiO2
SiO2
Silicon Diaphragm
Getter
Measurement Pressure
4
? ? Features

• ???? High Resolution ?????1/1000000
• ??? High Accuracy ??0.1 of Reading
• ?????? High Noise Resistance ?????????????????
• ??????? Excellent Compatibility with Digital
  Network ???????(RS-485)????
• ????? Compact ?????????????????1/2??

FTR-1
F-133K
5
?????? System configuration
ACCESSORY ????
????????? ????ZERO??
??????????
??????
??? FTR-1
???? DC24V
??? F-133K
6
? ? Specifications
?? Model ?? Model FTR-1 (Display) F-133K (Sensor)
????????? Full Scale Range ????????? Full Scale Range 1000Torr (133kPa)
?????(?????) Measurement Resolution (Display Resolution) ?????(?????) Measurement Resolution (Display Resolution) 0.01 of F.S. (1ppm of F.S.)
?? Accuracy ?? Accuracy 0.1 of Reading
???? Temp. Coefficients ?? Zero 0.0004 of F.S./deg.
???? Temp. Coefficients ??? Span 0.002 of Reading/deg.
?????? Analog output ?????? Analog output 0 to 10 VDC into gt 10k Ohm
????????? Set Points ????????? Set Points 3 open collector transistors rated 50mA _at_ 30VDC
???????? Interface ???????? Interface RS-485 4wire full duplex
???? Power Supply ???? Power Supply 24VDC _at_ 0.2A
???? Operating Temperature Range ???? Operating Temperature Range 10 to 50 deg.
????? Materials exposed to Vacuum ????? Materials exposed to Vacuum Silicon, SiO2, SUS304, Viton
?? Fittings ?? Fittings 8VCR, NW16
7
????_at_23? Repeatability
8
???? Thermal error
9
?????? Calibration System
N2 inlet
Mass Flow Controllers
Temperature/ HumidityControl chamber
Vacuum chamber
manifold
Reference Vacuum Gauges
PC???????????
???????
????