Cleanrooms

1
Clean Technologies for Controlled
Environment Tengfang (Tim) Xu, Ph.D.,
PE Lawrence Berkeley National Laboratory
2
Issues and Trends in Clean Technologies

• From Traditional Cleanrooms to Minienvironments
  and Nano-technology Facilities
• Tengfang (Tim) Xu, Ph.D., PE
• Environmental Energy Technologies Division
• Lawrence Berkeley National Laboratory
• June 23, 2005

3
Outline

• Introduction to clean technologies
• Cleanrooms and minienvironments
• Energy saving opportunities
• Case studies
• Issues and trends
• Whats coming?

4
Introduction Cleanroom

• Definition
• A Cleanroom is "a room in which the concentration
  of airborne particles is controlled, and which is
  constructed and used in a manner to minimize the
  introduction, generation, and retention of
  particles inside the room and in which other
  relevant parameters, e.g., temperature, humidity,
  and pressure, are controlled as necessary."
• ISO Standard 14644-1

5
Introduction Cleanroom

• Design
• The design of cleanroom HVAC systems requires the
  unique understanding of cleanliness requirements,
  guidelines, airflow, filtration, room
  pressurization, code requirements, specialty
  equipment, precise control, and many more
  details.
• IEST CC RP12.2 Considerations in Cleanroom Design
  
• Subgroup 1 Cleanroom Design Considerations
• Subgroup 2 Installation of Cleanroom Production
  Equipment
• Subgroup 3 Cleanroom Electrical Systems

6
Introduction Minienvironment

• Definition
• A minienvironment is a localized environment
  created by an enclosure to isolate a product or
  process from the surrounding environment
• Guidelines
• Separative Devices, ISO Standard 14644-7 (IEST)
• IEST CC RP28.1 Minienvironments

7
Minienvironment Applications

• A variety of names
• Separative devices, separative enclosures,
  isolators, or barriers in the
  microelectronics, chemical, and pharmaceutical
  industries
• Safety cabinets in biomedical and healthcare
• Gloveboxes in research and defense industry

8
Clean Technologies for Controlled Environment

• Process-driven
• contamination
• Planning
• Design
• Qualifications
• Operation

9
Cleanroom Electric Power

Cleanroom Measured Power
10
Energy Savings Opportunities

• Efficient Air Systems
• initial costs
• optimized sizing
• utility costs and productivity
• non-energy benefits
• Energy efficient planning and design
• strategy to achieve cost savings and to improve
  bottom lines in the industry

11
Case Studies on Minienvironment/Cleanroom
12
Why Minienvironment?
13
Results

• Total fan power
• Power factor
• Pressure control
• EPI (W/cfm)
• Comparison with Cleanrooms

14
Results
15
Results
16
Issues and Trends

• Issues - Contamination control
• Source particle, molecular, bio, mechanical,
  electronic
• Preciseness, costs, safety, regulation
• Trends
• Multi-level particle retention and/or bio
  containment
• Minienvironments/Bio-safety cabinet
• Nano-tech facilities

17
Issues and TrendsStandards

• The Institute of Environmental Sciences and
  Technology (IEST)
• ISO Standard 14644 (1 through 8) Cleanrooms and
  Controlled Environments
• ISO Standard 14698 (1 through 3)
  Bio-contamination

18
Issues and Trends Solutions

• Resources for clean technologies
• IEST RPs addressing a variety of cleanroom
  technologies http//www.iest.org/technical/ccwgs.h
  tml
• Design, construction, operation, compliance,
  qualifications, procedure, control, etc.
• WG12 gt WG28 gt New WGs on Nano-tech facilities
• LBNL
• Energy related technologies and strategies

19
Whats Coming Stay Tuned

• Cleanrooms
• Minienvironments - upcoming workshop to
• Share knowledge and improve performance of
  minienvironments
• Understand energy implications of minienvironment
  vs. cleanroom
• Develop and identify strategies in energy
  efficiency for effective environmental control

20
Questions

• TTXU_at_LBL.GOV
• Lawrence Berkeley National Laboratory