NA Facilities and Gases Committees Liaison Report

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NA Facilities and Gases Committees Liaison Report

• Updated March 09, 2011

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Gases Co-chair

• Tim Volin - Parker Hannifin

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Facilities Co-chairs
Steve Lewis - CH2M Hill
Phil Naughton - Applied Materials
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Gases Committee C Tim Volin Parker Hannifin
Components SC TBD
Contamination SC Tim Volin Parker Hann.
Materials Process SC Tim Volin Parker Hann.
Mass Flow TF Mohamed Saleem - Fujikin John
Savadkouhi Brooks Instrument
Filters Purifiers TF Mohamed Saleem Fujikin
Materials of Construction Gas Delivery Systems
TF Tim Volin Parker Hann.
Pressure Measurement TF Justin Hough - AMAT
Heater Jacket TF David Colquhoun BriskHeat
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Facilities Committee C Phil Naughton Applied
Materials C Steve Lewis CH2M Hill
F47 Revision TF (New) Ken Kapur KLA Tencor Uwe
Haller Applied Materials Phil Sarikas
Intel Todd Steudtner TI Alex McEachern - PSL
F51 Revision TF (New) Dalia Vernikovsky -
Applied Seals
Design for Facilities TF Al Chasey Arizona
State Univ.
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Meeting Information

• Last meeting
• Tuesday, November 9, NA Fall
• SEMI HQ, San Jose, CA
• Next meeting
• Tuesday, March 29, 2011, NA Spring Standards
  Meeting
• SEMI HQ in San Jose, CA
• www.semi.org/standards for the latest update

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Ballot Results Summary

• Ballot Passed Technical Committee Review 1
• Doc. 5055, Reapproval of SEMI C54-1103 -
  Specifications and Guidelines for Oxygen
• Doc. 5056, Reapproval of SEMI C55-1104 -
  Specification for Liquid Carbon Dioxide (CO2)
  Used in Near Critical, Critical and Supercritical
  Applications, gt/ 99.99 Quality
• Doc. 5057, Reapproval of SEMI C56-0305 -
  Specifications and Guidelines for Dichlorosilane
  (SiH2Cl2)
• Doc. 5058, Reapproval of SEMI C57-0305 -
  Specifications and Guidelines for Argon
• Doc. 5059, Reapproval of SEMI C58-0305 -
  Specifications and Guidelines for Hydrogen
• Doc. 5060, Reapproval of SEMI C59-1104 -
  Specifications and Guidelines for Nitrogen
• Doc. 5061, Reapproval of SEMI C60-0305 -
  Specifications and Guidelines for Nitrous Oxide
  (N2O)

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Ballot Passed Technical Committee Review 2

• Doc. 4786B, Revision of SEMI F4-1000,
  Specification for Pneumatically Actuated Cylinder
  Valves
• Doc. 5044, Revision to SEMI F32-0709 Test Method
  for Determining of Flow Coefficient for High
  Purity Shutoff Valves
• Doc. 4788A, Revision of SEMI F78-0304 Practice
  For Gas Tungsten Arc (GTA) Welding Of Fluid
  Distribution Systems In Semiconductor
  Manufacturing Applications (failed ISC Review)
• Doc. 4789B, Revision of SEMI F81-1103
  Specification for Visual Inspection and
  Acceptance of Gas Tungsten Arc (GTA) Welds in
  Fluid Distribution Systems in Semiconductor
  Manufacturing Applications (failed ISC Review)

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Ballot Passed Technical Committee Review 3

• Doc. 4722E - Revision of SEMI F70-0302, Test
  Method for Determination of Particle Contribution
  of Gas Delivery System (failed ISC Review)
• Doc. 4968 - Revision of SEMI E16-90 (Reapproved
  1104) with title change to Guide For Determining
  And Describing Mass Flow Controller Leak Rates
  (failed ISC Review)
• Doc. 4969 - Revision of SEMI E18-91 (Reapproved
  1104) with title change to Guide For Temperature
  Specifications Of The Mass Flow Controller
• Doc. 4970 - Revision of SEMI E27-92 (Reapproved
  1104) with title change to Terminology For The
  Linearity Of Mass Flow Controllers And Mass Flow
  Meters (failed ISC Review)

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Ballot Failed Technical Committee Review

• Doc. 4737A, New Standard Guide For Heater Jacket
  Requirements

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Upcoming Ballots 1/3

• Technical Ballot for Cycle 1 and 2, 2011
• Doc. 5099 - Revision of SEMI E52-0310 - Practice
  for Referencing Gases, Gas Mixtures and
  Vaporizable Materials Used in Digital Mass Flow
  Controllers
• Doc. 5677C - Revision of SEMI E66-1103, Test
  Method For Determining Particle Contribution By
  Mass Flow Controllers
• Doc. 4737B - New Standard Guide For Heater
  Jacket Requirements
• Doc. 4788B - Revision of SEMI F78-0304 Practice
  For Gas Tungsten Arc (GTA) Welding Of Fluid
  Distribution Systems In Semiconductor
  Manufacturing Applications
• Doc. 5138 - Reapproval of SEMI F20-0706E,
  Specification for 316L Stainless Steel Bar,
  Forgings, Extruded Shapes, Plate, and Tubing for
  Components Used in General Purpose, High Purity
  and Ultra-High Purity Semiconductor Manufacturing
  Applications
• Doc. 5142 - Reapproval of SEMI F60-0306 - Test
  Method for ESCA Evaluation of Surface Composition
  of Wetted Surfaces of Passivated 316L Stainless
  Steel Components

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Upcoming Ballots 2/3

• Doc. 4789C, Revision of SEMI F81-1103
  Specification for Visual Inspection and
  Acceptance of Gas Tungsten Arc (GTA) Welds in
  Fluid Distribution Systems in Semiconductor
  Manufacturing Applications
• Doc. 4722F- Revision of SEMI F70-0302, Test
  Method for Determination of Particle Contribution
  of Gas Delivery System
• Doc. 4968A - Revision of SEMI E16-90 (Reapproved
  1104) with title change to Guide For Determining
  And Describing Mass Flow Controller Leak Rates
• Doc. 4970A - Revision of SEMI E27-92 (Reapproved
  1104) with title change to Terminology For The
  Linearity Of Mass Flow Controllers And Mass Flow
  Meters
• Doc. 3383 - Reapproval of SEMI F27-0997
  (Reapproved 1103) Test Method For Moisture
  Interaction And Content Of Gas Distribution
  Systems And Components By Atmospheric Pressure
  Ionization Mass Spectrometry (APIMS)

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Upcoming Ballots 3/3

• Document 4652A - Revision of SEMI C3.2-0301,
  Specification for Arsine (AsH3) in Cylinders,
  99.94 Quality
• Document 4657B - New Standard Specifications for
  Tungsten Hexafluoride (WF6)
• Document 4734A - New Standard Specification and
  Guide for Boron Trichloride (BCl3)
• Document 5139 - Reapproval of SEMI F29-0997
  (Reapproved 1103), Test Method for Purge Efficacy
  of Gas Source System Panels
• Document 5140 - Reapproval of SEMI F37-0299
  (Reapproved 1104), Method for Determination of
  Surface Roughness Parameters for Gas Distribution
  System Components
• Document 5141 - Reapproval of SEMI F38-0699
  (Reapproved 1104), Test Method for Efficiency
  Qualification of Point-of-Use Gas Filters

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Components Subcommittee

• Mass Flow TF/Mohamed Saleem (Fujikin)
• Balloted 5 year revisions/approvals of Mass Flow
  Controller standards
• E16-90 (Reapproved 1104) MFC Leak Rates
• E27-92 (Reapproved 1104) Mass Flow Meter
  Linearity
• E66-1103 (Particle Contribution of MFC), reballot
• E67-0304 (Reliability of MFC), reballot
• Drafting doc. 5099 - Revision of SEMI E52-0310 -
  Practice for Referencing Gases, Gas Mixtures and
  Vaporizable Materials Used in Digital Mass Flow
  Controllers
• Adding two additional mixed gas codes

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Components Subcommittee

• Pressure Measurement TF/Justin Hough (Applied
  Materials)
• Drafting
• Doc. 3440B, New Standard Test Method For
  Pressure Transducers In Gas Delivery Systems

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Contamination Subcommittee

• Filters Purifiers TF/Mohamed Saleem (Fujikin)
• Balloted Doc. 4722F - Revision of SEMI F70-0302,
  Test Method for Determination of Particle
  Contribution of Gas Delivery System

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Materials Processes Subc

• Materials of Construction Gas Delivery Systems
  TF/ Tim Volin(Parker Hannifin)
• Balloted two documents for cycle 1-2011
• Doc. 4788B, Revision of F78-0304 Practice For Gas
  Tungsten Arc (GTA) Welding Of Fluid Distribution
  Systems In Semiconductor Manufacturing
  Applications
• Doc. 4789C, Revision of F81-1103 Specification
  for Visual Inspection and Acceptance of Gas
  Tungsten Arc (GTA) Welds in Fluid Distribution
  Systems in Semiconductor Manufacturing
  Applications
• Future work includes a new document for welding
  and joining processes currently not addressed by
  SEMI Standards

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Materials Processes Subc

• Heater Jacket TF/David Colquhoun (BriskHeat)
• Demand for higher performance jacketing heater
  systems in the semiconductor is needed
• Consistent ways of specifying jacket is required
• Doc. 4737A - New Standard Guide For Heated
  Systems Requirements
• Failed and returned to TF for rework
• The document was balloted in cycle 2-11

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Facilities Committee

• SEMI F47 Revision Task Force/Alex McEachern (PSL)
• F47 is up for 5 year review.
• F47 requires that tools be immune to voltage sags
  that commonly occur on AC power grids.
• Rewriting doc. 5079, Revision of SEMI F47-0706 -
  Specification for Semiconductor Processing
  Equipment Voltage SAG Immunity

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Facilities Committee 2

• SEMI F51 Revision Task Force/Dalia Vernikovsky
  (Applied Seals NA)
• F51 is up for 5 year review
• Drafting doc. 5080, Revision of SEMI F51-0200 -
  Guide for Elastometric Sealing Technology
• A review of possibilities to assign a code of
  possible levels of acceptance of what o-rings can
  be suited for ( a rating system ) was proposed
• Meeting monthly
• End user is encouraged to participate

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Contact

• For more information, please contact
• Kevin Nguyen at knguyen_at_semi.org