Plasma%20Chamber%20Spectrographic%20Data%20Acquisition%20and%20Archival

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Plasma Chamber Spectrographic Data Acquisition
and Archival
SFR Workshop November 8, 2000 Timothy D. Duncan,
Costas Spanos Berkeley, CA
2001 GOAL To Provide a growing data archive for
ongoing research.
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Motivation

• OEM Rainbow Plasma Chamber has few metrology
  sensors.
• More metrics are needed to better predict effects
  of recipe parameters on overall wafer processes.
• Cost of many individualized experiments is
  prohibitive.
• Looks forward to APC using feed-forward and
  feedback control loops.

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The Metrology Equipment Installed
PC System
SECS Port Cable
ZScan Port Cable
Fiber-Optic
Optical Lens
ZScan Sensor
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Labview Interface
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Archival System
N E T W O RK
Database Registry
Data Gathering Process
Data Gathering Process
Database Store
Data Gathering Process
Data Gathering Process
Archive User Interface (GUI)
Archive User Interface (GUI)
Archive User Interface (GUI)
Archive User Interface (GUI)
Data Gathering Process
Data Gathering Process
Data Gathering Process
Data Gathering Process
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Archive Interface
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System Block Diagram
NETWORK
Advanced Energy ZScan RF Data Capture
Data Archiving System
PC Data Capture Processes
LAM5 Rainbow Plasma Etcher
SECS
Ocean-Optics Spectroscopic Data Capture
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AEC/APC Future Goals

• Provide real-time Advanced Processing Control.
• Extend the functionality by providing custom run
  definitions for designed experiments.
• Provide advanced alarm function reporting
  utilizing database archive.

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2002 and 2003 Integration Goals

• Integrate the system into the networked lab
  AEC/APC system.
• Provide feedback and feed forward control at
  factory level of automation.
• Provide online browsing of advanced alarm
  reporting of archived database.